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  • Offer Profile
  • Sensirion is a leading sensor manufacturer, providing relative humidity sensors and flow sensor solutions with unique performance. Together with our capacitive humidity sensor, the product range includes liquid flow sensors, mass flow meters, mass flow controllers and differential pressure sensors. Using our microsensor solutions, OEM customers benefit from the proven CMOSens® Technology and excellent technical support. Best-in-class products, unmatched experience and excellent application support make Sensirion the no.1 Partner. Among a large variety of applications, the flow and humidity sensors are successfully used in the automotive and medical industry.
Product Portfolio
  • Experts for Smart Sensor Solutions

  • Sensirion is a leading sensor manufacturer, providing relative humidity sensors and flow sensor solutions with unique performance. Together with our capacitive humidity sensor, the product range includes liquid flow sensors, mass flow meters, mass flow controllers and differential pressure sensors. Using our microsensor solutions, OEM customers benefit from the proven CMOSens® Technology and excellent technical support. Best-in-class products, unmatched experience and excellent application support make Sensirion the no.1 Partner. Among a large variety of applications, the flow and humidity sensors are successfully used in the automotive and medical industry.
      • Digital Humidity Sensors (RH/T)

      • Sensirion is the world’s leading manufacturer of digital relative humidity sensors. By pioneering digital humidity sensors 15 years ago, Sensirion has defined an industry standard with the SHTxx series. Best-in-class products, unmatched experience, and excellent application support make Sensirion the no. 1 partner for humidity sensing.

        Sensirion’s relative humidity sensors win over customers thanks to their high performance and integration (CMOSens® technology) in a miniature format. The capacitive humidity sensors provide digital and fully calibrated output that allows for easy integration without the need for additional calibration. Their excellent long-term stability is very well perceived and the cutting-edge low energy consumption makes them the right choice for any application.
          • Digital Humidity Sensor SHT4x (RH/T)

          • The 4th Generation of Best-in-Class Humidity Sensing

            In line with Sensirion’s industry-proven humidity and temperature sensors, the SHT4x offers the best price-performance ratio on the market. Tape and reel packaging combined with its suitability for standard SMD assembly processes make the SHT4x ideal for high-volume applications.

            The SHT4x builds on a completely new and optimized CMOSens® chip that offers reduced power consumption and improved accuracy specifications. With the extended supply voltage range from 1.08 V to 3.6 V, it’s the perfect fit for mobile and battery-driven applications. The exceptionally small size in a robust DFN housing enables integration into challenging designs while meeting the highest reliability demands, as demonstrated by the JEDEC JESD47 qualification.

            The high-accuracy versions SHT41 and SHT45 feature typical and maximal accuracies that have been honed even further, down to ?RH = ± 1.5% RH and ?T = ± 0.1°C, making them suitable for the most demanding applications in all industries. The year 2022 will also bring additional protection options to complete the portfolio, meeting even the most rigorous technological challenges. The on-package filter membrane ensures IP67 compliance for exposed designs, while the protection option ensures reliable conformal coating.

            Features

            Size 1.5 x 1.5 x 0.5 mm3
            Output I²C
            Supply voltage range 1.08 to 3.6 V
            Energy consumption 0.4µA (at meas. rate 1 Hz)
            RH operating range 0 - 100% RH
            T operating range -40 to +125°C (-40 to +257°F)
            RH response time 8 sec (tau63%)
          • Digital Humidity Sensors SHT3x (RH/T)

          • The Industry Standard in Humidity Sensing

            The digital SHT3x humidity sensor series takes sensor technology to a new level. As the successor of the SHT2x series it sets the industry standard in humidity sensing. The SHT3x humidity sensor series consists of a low-cost version with the SHT30 humidity sensor, a standard version with the SHT31 humidity sensor, and a high-end version with the SHT35 humidity sensor. Automotive grade versions are also available. The SHT3x humidity sensor series combines multiple functions and various interfaces (I2C, analog voltage output) with a applications-friendly, very wide operating voltage range (2.15 to 5.5 V). The SHT3x humidity sensor is available in both large and small volumes.

            The SHT3x builds on a completely new and optimized CMOSens® chip, which allows for increased reliability and improved accuracy specifications. The SHT3x offers a range of new features, such as enhanced signal processing, two distinctive and user-selectable I2C addresses, an alert mode with programmable humidity and temperature limits, and communication speeds of up to 1 MHz.

            The DFN package has a footprint of 2.5 × 2.5 mm2 with a height of 0.9 mm. This allows for integration of the SHT3x into a great variety of applications. Additionally, the wide supply voltage range of 2.15 to 5.5 V and variety of available interfaces guarantee compatibility with diverse integration requirements. All in all, the SHT3x humidity sensor series incorporates 15 years of knowledge from Sensirion, the leader in the humidity sensor industry.

            Features

            Size 2.5 x 2.5 x 0.9 mm
            Output I²C, Voltage Out
            Supply voltage range 2.4 to 5.5 V
            Energy consumption 4.8µW (at 2.4 V, low repeatability, 1 measurement / s)
            RH operating range 0 - 100% RH
            T operating range -40 to +125°C (-40 to +257°F)
            RH response time 8 sec (tau63%)
          • Digital Humidity Sensor SHT85 (RH/T)

          • Pin-type Humidity Sensor Enabling Easy Replaceability

            A highly accurate, digital pin-type relative humidity sensor for easy replaceability in a wide range of applications.

            The digital humidity sensor SHT85 is Sensirion’s best-in-class humidity sensor with a pin-type connector for easy integration and replacement. It builds on a highly accurate SHT3x sensor with long-term stability that is at the heart of Sensirion’s new humidity and temperature platform. The unique pac kage design allows for the best possible thermal coupling to the environment and decoupling from potential heat sources on the main board. The SHT85 features a PTFE membrane dedicated to protecting the sensor opening from liquids and dust according to IP67 without affecting the response time of the RH signal.

            It thus allows for sensor use under harsh environmental conditions such as high exposure to dust. Final accuracy testing on the product level ensures best performance, making the SHT85 the ultimate choice for even the most demanding applications.

            Features
             
            Size 17.8 x 4.9 x 2.1 mm3
            Interface I²C
            Supply voltage 2.15 to 5.5 V
            Energy consumption 4.8µW (at 2.4 V, low repeatability, 1 measurement / s)
            RH operating range 0 - 100% relative humidity
            T operating range -40 to +105°C
            Response time (RH) 8s (tau63%)
          • Digital Humidity Sensor SHTC3 (RH/T)

          • The Standard for Humidity Sensing in Consumer Electronics

            The SHTC3 digital humidity sensor builds on the success of the proven SHTC1 sensor. Thanks to a broader supply voltage range (1.62 – 3.6 V) and higher accuracy (±2% RH, ±0.2°C) than its predecessor, it enables greater flexibility.

            Sensirion’s CMOSens® Technology offers a complete sensor system on a single chip, consisting of a capacitive humidity sensor, a bandgap temperature sensor, analog and digital signal processing, A/D converter, calibration data memory, and a digital communication interface supporting I2C fast mode. The small 2 x 2 x 0.75 mm3 DFN package enables applications in even the most limited space. The sensor covers a humidity measurement range of 0 to 100% RH and a temperature measurement range of -40°C to 125°C with a typical accuracy of ±2% RH and ±0.2°C. The broad supply voltage of 1.62 V to 3.6 V and an energy budget below 1 μJ per measurement make the SHTC3 perfectly suited to mobile or wireless applications powered by battery.

            With the industry-proven quality and reliability of Sensirion’s humidity and temperature sensors providing constant accuracy over a large measurement range, the SHTC3 offers the best performance-price ratio. Tape and reel packaging combined with suitability for standard SMD assembly processes make the SHTC3 ideal for high-volume applications.

            Features
             

            Interface I²C
            Supply voltage 1.62 - 3.6 V
            Power consumption 0.5 µA (at 1 reading per second in low power mode)
            Measuring range (RH) 0 - 100 % relative humidity
            Measuring range (T) -40 to +125°C (-40 to +275°F)
            Response time (RH) 8s (tau63%)
          • Digital Humidity Sensor SHTC1 (RH/T)

          • Designed For High-Volume Consumer Electronics Applications

            The SHTC1 is a digital humidity sensor designed especially for high-volume consumer electronics applications. This humidity sensor is strictly designed to overcome conventional limits for size, power consumption, and price-performance ratio, in order to fulfill the current and future requirements of the consumer electronics market.

            Sensirion’s CMOSens® technology offers a complete sensor system on a single chip, consisting of a capacitive humidity sensor, a band-gap temperature sensor, analog and digital signal processing, A/D converter, calibration data memory, and a digital communication interface supporting I2C fast mode. The ultra-small, 2 × 2 × 0.75 mm3 DFN package enables applications to be placed in even the most limited of spaces. The sensor covers a humidity measurement range of 0 to 100 %RH and a temperature measurement range of –30°C to 100°C with a typical accuracy of ±3 %RH and ±0.3°C.

            The operating voltage of 1.8 V and an energy budget below 1 µJ per measurement make the SHTC1 suitable for mobile or wireless applications running on the lowest power budgets. With the industry-proven quality and reliability of Sensirion’s humidity sensors and constant accuracy over a large measurement range, the SHTC1 humidity sensor offers an unprecedented price-performance ratio. Tape and reel packaging together with suitability for standard SMD assembly processes make the SHTC1 predestined for high-volume applications.

            Features
             
            Interface I²C
            Supply voltage 1.8 V
            Power consumption 2µW (at 1 reading per second in low power mode)
            Measuring range (RH) 0 - 100 % relative humidity
            Measuring range (T) -30 to +100°C (-22 to +212°F)
            Response time (RH) 8s (tau63%)
          • Digital Humidity Sensor SHT2x (RH/T)

          • Used For A Variety Of Applications And Has Become The Industry Standard

            The digital SHT2x humidity sensor series is used in high volumes in a wide variety of applications and has today become the de facto industry standard. The SHT2x series consists of a low-cost version with the SHT20 humidity sensor, a standard version with the SHT21 humidity sensor, and a high-end version with the SHT25 humidity sensor. The open cavity mold package - which encapsulates the complete chip except for the humidity sensor area - protects the capacitive humidity sensor against external impact and facilitates excellent long-term stability. The SHT2x sensors are available both in large and small volumes.

            Embedded in a reflow solderable dual-flat no-leads (DFN) package of 3 × 3 × 1.1 mm3, the SHT2x provides calibrated, linearized sensor signals in digital, I2C format. The SHT2x humidity sensor series contains a capacitive-type humidity sensor, a band-gap temperature sensor, and specialized analog and digital integrated circuits – all on a single CMOSens® chip. This yields superior sensor performance in terms of accuracy and stability as well as minimal power consumption.

            Every sensor is individually calibrated and tested. Lot identification is printed on the sensor and an electronic identification code is stored on the chip – which can be read out on command. Furthermore, the resolution of the SHT2x humidity sensor can be changed on command (8/12 bit up to 12/14 bit for RH/T) and a checksum helps to improve communication reliability. With this set of features and its proven reliability and long-term stability, the SHT2x humidity sensor series offers an outstanding price-performance ratio. To test a humidity sensor from the SHT2x series, two evaluation kits, EK-H4 and EK-H5, are available.

            Features
            Size 3 x 3 x 1.1 mm
            Output I²C digital, PWM, SDM
            Supply voltage range 2.1 to 3.6 V
            Energy consumption 3.2µW (at 8 bit, 1 measurement / s))
            RH operating range 0 - 100% RH
            T operating range -40 to +125°C (-40 to +257°F)
            RH response time 8 sec (tau63%)
          • Evaluation Kits For Sensirion's Humidity Sensors

          • Fast and Easy Evaluation for Your Sensor Application

            The kit combines plug-and-play hardware with an easy-to-use viewer software (ControlCenter) for in-depth evaluation. Each evaluation kit includes a Sensirion SensorBridge, all required connector cables, as well as various sensor samples. The SensorBridge features two independent I2C channels that allow simultaneous evaluation of two environmental sensor samples. The ControlCenter viewer software makes it possible to display and log the sensor signals for multiple sensors connected to several SensorBridges on the same PC.

          • Digital Humidity and Temperature Module SCC30-DB (RH/T)

          • The Solution for Humidity and Temperature Sensing Remotely from the Main Control Board

            There are applications that require a humidity and temperature sensor to be located in a specific part of the device – often at a different location than the main control board, i.e. the sensor can not be assembled on the main board.

            With the SCC30, customers can place a humidity and temperature sensor anywhere in a device and connect it to the main board with a cable without having to spend design resources for creating an own sensor module. Based on Sensirion’s experience and expertise in environmental sensing the SCC30 is optimized for easy design-in and sensing performance. The SCC30 offers superior sensor performance of capacitive type sensor elements and a very attractive price/performance ratio due to Sensirion’s latest generation of highly integrated humidity and temperature sensors SHT3x.

            The module provides high reliability and excellent long-term stability, a broad supply voltage range of 2.4 to 5.5V and delivers fully calibrated and processed measurement values through an I2C interface. The compact design with connector and easy-to-use digital interface make the SCC30 a cost-effective and versatile plug & play solution for a wide range of applications.
          • SF2 Filter Cap for SHT2x and SHT3x Humidity Sensors

          • Easily mountable solution to protect SHT2x and SHT3x humidity sensors. The SF2 filter cap protects against water, dust, soot, particles and other contaminants. It consists of a single piece of PBT and an integrated water vapor-permeable filter membrane.

            The cavity inside the cap is designed so that the dead volume between membrane and sensor is negligible; hence the impact on response time for humidity measurements is reduced to a minimum. The cap is available in black with a black filter membrane. The cap is made of a single piece of polybutylene terephthalate (PBT) with a filter membrane welded on. The cap is designed to be mounted after soldering by clipping the four pins on to the PCB. Together with the sensor, it provides a compact entity that can serve as an adaptor to the device housing. With the addition of adhesive for sealing to the PCB and use of an o-ring, it provides a waterproof mounting solution.

            Features
             
            Filtration Efficiency 99.99% of all particles > 0.1µm
            Protection class IP67

            Easily mountable after reflow soldering

          • SHT4x Smart Gadget

          • Sensirion's Reference Design for SHT4x Humidity and Temperature Sensors

            The SHT4x Smart Gadget is a simple reference design circuit board which demonstrates the outstanding performance and ease of use of Sensirion’s SHT4x humidity and temperature sensors.

            It is equipped with a LCD display showing humidity and temperature information. It also possesses a Bluetooth Low Energy module allowing it to communicate with Bluetooth SMART capable devices like smartphones. More detailed information about our SHT4x Smart Gadget can be found in the SHT4x Smart Gadget user guide.

            Soon you can order the SHT4x Smart Gadget at our distributors.
        • High-Accuracy Digital Temperature Sensors

        • The high-accuracy digital temperature sensors are based on Sensirion’s CMOSens® technology, which combines the strengths of standard CMOS production processes and advanced MEMS technology on a single silicon chip. The working principle behind all STSxx temperature sensors is a silicon bandgap thermometer.

          Due to different requirements regarding power consumption and space, Sensirion is offering three types of high-accuracy temperature sensors. The universal STS3x temperature sensor has a wide supply voltage range of 2.4 to 5.5 V. Combined with its outstanding performance as well as high accuracy of ±0.3°C, it is ideally suited for integration into a wide variety of applications. The STSC1 temperature sensor focuses on consumer electronics applications that require very low power consumption and a tiny size. With compact dimensions of just 2 mm × 2 mm × 0.8 mm, low power consumption, and supply voltage of 1.8 V, it clearly fulfills industry requirements. The STS2x temperature sensor comes in a 3 mm × 3 mm × 1.1 mm package and operates at 2.1 to 3.6 V. It offers a typical temperature accuracy of ±0.3°C.

          The STSxx temperature sensors deliver high-accuracy, fully calibrated and processed digital temperature information. They come into play whenever there is a need for digital temperature information at low power consumption. In addition, the STS3x series has a built-in alert, which allows the sensor to be used as a watchdog.
            • Temperature Sensor STS3x

            • Best-In-Class Temperature Sensor For Various Applications

              The STS3x is Sensirion’s newest high-accuracy digital temperature sensor series. The STS3x temperature sensor utilizes the industry-proven CMOSens® technology and wins over users with its increased intelligence, reliability, and improved accuracy specifications.

              The functionality of Sensirion’s new STS3x temperature sensor includes enhanced signal processing, two distinctive and user-selectable I2C addresses, and communication speeds of up to 1 MHz. The dual-flat no-leads (DFN) package has a footprint of 2.5 × 2.5 mm2 while retaining a height of 0.9 mm. This allows for easy integration of the STS3x series into various applications. Additionally, the wide supply voltage range of 2.4 to 5.5 V and low current consumption (2 µA typical average current at 1 measurement per second) guarantees compatibility with a wide range of applications.

              The STS3x temperature sensor gives a fully calibrated, linearized, and supply-voltage-compensated digital output and has an outstanding accuracy of +/–0.3°C (typical). There are two versions available: the standard version, STS31, guarantees an accuracy of ±0.3°C over a temperature range of –40°C to 90°C, while the low-cost version, STS30, has an accuracy range of 0°C to 65°C. Thanks to Sensirion’s CMOSens® technology, the STS3x temperature sensor is designed for mass production, comes with a high signal-to-noise ratio and high process capability, and is proven to be highly reliable and stable over the long term.

              An automotive version of the STS3x temperature sensor is also available.

              Features
               
              Output I²C
              Energy consumption 6.6µW (at 3.3 V, low repeatability, 1 measurement / s)
              T operating range -40 to +125°C (-40 to +257°F)
              T response time 2 sec (tau63%)
              Typical accuracy ±0.3 °C
            • Temperature Sensor STS32 / STS33

            • GDP compliant data logging with ISO17025 calibration certificate

              The STS32 and STS33 are Sensirion’s new high accuracy ISO17025 certified digital temperature sensors optimized for cold and frozen chain applications. Both rely on the industry proven CMOSens® Technology, enabling increased computational power, reliability and improved accuracy specifications compared to its predecessors.

              Its functionality includes enhanced signal processing, two distinctive and user selectable I2C addresses and communication speeds of up to 1 MHz. The DFN package has a footprint of 2.5 x 2.5 mm2 while keeping a height of 0.9 mm. Every STS32 or STS33 is identified by its unique serial number and is supplied with a ISO17025 accredited calibration certificate. The calibration certificate comprises three temperatures, -30°C, 5°C, and 70°C.

              Calibration certificates and data for each STS32, STS33 sensor can be downloaded from a server address given in the shipment documents, enabling efficient processing by automated systems. In turn, STS32 users not only embed sensor hardware into their product but are also able to merge the provided calibration data from the sensor with the calibration information needed for their dataloggers. This approach heavily simplifies the manufacturing process, as the typically expensive and time-consuming calibration of the assembled device is replaced and completely covered by using a digital, pre-calibrated temperature sensor, all while meeting the stringent quality requirements of the pharmaceutical and medical industries.
              Output I²C
              Energy consumption 5.6 µW (at 3.3 V, low repeatability, 1 measurement / s)
              T operating range -40 to +125°C (-40 to +257°F)
              T response time 2 sec (tau63%)
              Accuracy Up to ±0.4 °C
          • Carbon Dioxide Sensors

              • Carbon Dioxide Sensor SCD4x

              • Breaking the Size Barrier in CO2 Sensing

                The SCD4x is Sensirion’s next generation miniature CO2 sensor that offers an unmatched price-to-performance ratio. Tape and reel packaging combined with its SMD assembly processing make the SCD4x ideal for high-volume applications.

                This sensor builds on the photoacoustic sensing principle and Sensirion’s patented PASens® and CMOSens® Technology to enable unmatched small sensor size combined with high performance. SMD compatibility and the small footprint allow cost- and space-effective integration to boost freedom of design for customers. The integrated best-in class humidity and temperature sensor enables superior on-chip signal compensation and addition RH and T outputs. Finally, the large supply voltage (2.4 V – 5.5 V), the robustness towards external stresses and the adjustable power consumption make the SCD4x the perfect fit for varying customer needs.

              • Carbon Dioxide Sensor SCD30

              • SCD30 - Sensor Module for HVAC and Indoor Air Quality Applications

                CMOSens® Technology for IR detection enables highly accurate carbon dioxide measurement at a competitive price. Along with the NDIR measurement technology for CO2 detection, a best-in-class Sensirion humidity and temperature sensor is also integrated on the same sensor module. Ambient humidity and temperature can be outputted by Sensirion’s algorithm expertise through modeling and compensating of external heat sources without the requirement for any additional components.

                Thanks to the dual-channel principle for the measurement of carbon dioxide concentration, the sensor compensates for long-term drifts automatically by design. The very small module height allows easy integration into different applications.

                Carbon dioxide is a key indicator of indoor air quality. Thanks to new energy standards and better insulation, houses have become increasingly energy efficient, but the air quality can deteriorate rapidly. Active ventilation is needed to maintain a comfortable and healthy indoor environment, and to improve the well-being and productivity of the inhabitants. Sensirion’s SCD30 offers accurate and stable CO2, temperature and humidity monitoring. This enables customers to develop new solutions that increase energy efficiency and simultaneously support well-being.
              • Carbon Dioxide Sensor STC31

              • The most effective way to measure high CO2 concentrations

                The STC31 is a chip-sized gas concentration sensor for high range, accurate CO2 measurements designed for high-volume production.

                The sensor is based on a revolutionized thermal conductivity measurement principle, which results in superior repeatability and long-term stability. This makes the STC31 the perfect choice for applications where reliability is key. Thermal conductivity technology has an ultra-low power consumption, even compared to low-power optical sensor. This makes it the ideal choice for battery operated applications, delivering top-performance at an absolute minimal power budget.

                The STC31 features a digital I2C interface, which makes it easy to connect directly to a microprocessor. The outstanding performance of these sensors is based on Sensirion’s patented CMOSens® Technology, which combines the sensor element, signal processing and digital calibration on a small CMOS chip. The well-proven CMOS technology is perfectly suited for high-quality mass production and is the ideal choice for demanding and cost-sensitive OEM applications.
            • Nubo

                • Nubo Sphere

                • Locate leaks reliably, minimize emissions sustainably.

                  Sensirion's Nubo Sphere methane (CH4) leak detection system is an end-to-end solution for real-time monitoring of methane emissions based on the Nubo platform. Relying on Sensirion's market-leading environmental and air quality sensing know-how paired with the expertise in scaling solutions into high volumes, Nubo Sphere offers high performance at low total cost of ownership. The robust system design enables reliable and highly accurate data at all times. It is fast to deploy and easy to use, while the two sensor cartridges ensure low maintenance expenses and provide a future-proof, sustainable set-up.

                  Nubo Sphere changes the state of the art in methane leak detection. It has never been easier to locate and quantify fugitive methane emissions. The deployment of consistent ground-based CH4 data logging enables leak detection much earlier than was previously possible through human detection, ensuring fast, accurate, and cost-saving damage control through rapid incident response actions for increased safety and reduced financial losses.
                • Nubo Air

                • Know your air quality and make meaningful decisions

                  Sensirion's Nubo Air monitoring system is an end-to-end solution for real-time monitoring of air pollution. Relying on Sensirion's market-leading environmental sensors Nubo Air offers excellent data quality. This is underlined by the MCERTS certification and various independent evaluations.

                  It has never been easier to measure reliable and trustworthy air quality data. Whether you want to measure air quality in your community or facility or plan a larger sensor network, with Nubo Air you do not have to compromise between quality and total cost of ownership.

                  Nubo Air is based on a convenient system with exchangeable cartridges to allow for easy maintenance and quality control. The system enables future and sustainable upgrades to the latest sensing technology. With the first available sensing cartridge you get access to the most reliable measurement of

                  • Fine dust PM1 & PM2.5
                  • Temperature 
                  • Humidity 
                  • Barometric pressure
              • More Environmental Sensors

                  • Environmental Sensor Node SEN5x (Upcoming)

                  • All-In-One Air Quality Sensing

                    The SEN5x environmental node is a straightforward, all-in-one sensor solution platform for the accurate measurement of various environmental parameters, such as particulate matter, volatile organic compounds (VOCs), oxidizing gases, such as nitrogen oxide compounds (NOx) and ozone (O3), as well as humidity & temperature. Thanks to proprietary algorithms, the module enables straightforward integration into various applications. This allows device manufacturers to save valuable project time and personnel resources and focus on their core competencies. End customers receive reliable air quality measurement data based on the SEN5x and benefit from improved air quality to increase health and comfort.

                    Applications:

                    • Air purifiers
                    • Air conditioners
                    • HVAC / ventilations systems
                    • Air quality monitors
                  • Multi-Pixel Gas Sensors SGP - VOC Sensor SGP40

                  • Sensirion’s Future of MOX Technology

                    The SGP40 is Sensirion’s new digital VOC (volatile organic compounds) sensor designed for easy integration into air purifiers or demand-controlled ventilation.

                    SGP40 is Sensirion’s new digital VOC (volatile organic compounds) sensor designed for easy integration into air treatment devices and air quality monitors. Based on Sensirion’s CMOSens® Technology, the SGP40 offers a complete sensor system on a single chip and features a digital I2C interface, a temperature-controlled micro-hotplate and a humidity-compensated indoor air quality signal. In combination with Sensirion’s powerful VOC Algorithm (part of the SGP40 VOC Index driver package), the sensor signal can be directly used to evaluate indoor air quality, e.g., for triggering the gradual fan control of an air treatment device. Both the SGP40 chip and VOC algorithm feature unrivalled robustness in the final application over their lifetimes. Pushing the multipixel and multi-hotplate approach to the next level of individual control of each sensing element, the SGP40 enables a drastic reduction in power consumption, making it suitable for battery-driven applications as well. Sensirion’s state-of-the-art production process guarantees high reproducibility and reliability.
                  • Particulate Matter Sensor SPS30

                  • For HVAC and Air Quality Applications

                    With this new particulate matter sensor, Sensirion expands its range of environmental sensing solutions and opens up a new dimension in indoor and outdoor air quality applications.

                    The MCERTS-certified SPS30 particulate matter (PM) sensor marks a new technological breakthrough in optical PM sensors. Its measurement principle is based on laser scattering and makes use of Sensirion's innovative contamination-resistance technology. This technology, together with high-quality and long-lasting components, enables precise measurements from the device's first operation and throughout its lifetime of more than ten years.

                    PM2.5 refers to particulate matter with particle diameter up to 2.5 microns and is among the most dangerous air pollutants. Due to their small size, PM2.5 particles can travel deep into the human lung and cause a variety of health issues; for instance, by triggering asthma attacks or contributing to cardiovascular disease. The SPS30 will enable the implementation of innovative air quality monitoring devices that prevent air pollution damage.
                  • Carbon Dioxide Sensor SCD4x

                  • Formaldehyde sensing made aasy

                    Formaldehyde is a commonly encountered indoor pollutant that can have long-term negative health effects even at concentrations as low as 0.000008 %. The SFA30, Sensirion’s digital formaldehyde sensor, offers best-in-class detection of this substance and can be easily integrated into air purifiers, demand-controlled ventilation systems and indoor air-quality monitors.

                    Based on Sensirion’s electrochemical technology, the sensor is tailored to sense levels of formaldehyde in the parts-per-billion (ppb) region, which is important to human health, and has a unique output accuracy when exposed to omnipresent volatile organic compounds (VOCs). The sensor has excellent long-term stability and durability, in addition to its ability to give accurate humidity and temperature readings, which combine to produce a fully temperature/humidity-compensated and factory-calibrated formaldehyde concentration output. Moreover, as with other Sensirion environmental sensors, its selectable digital UART and I2C interface options, standard electrical connector and versatile mounting options enable easy integration into the final device.
                • Liquid Flow Meters

                • Sensirion’s liquid flow meters establish new standards wherever monitoring of low liquid flow rates, liquid handling, and liquid dispensing are important. Our unique CMOSens® Technology allows bidirectional measurement of the liquid flow through the wall of the sensor’s flow channel in milliliters, microliters, and down to single-digit nanoliters per minute. Applications in fields such as medical devices, diagnostics, process control, and automation technology benefit daily from our safe and reliable sensor solutions.
                    • SLx – Standalone Liquid Flow Meters

                    • The SLI, SLS, SLQ, and SLG liquid flow meters all feature a robust IPxx protected housing and the same 4-pin M8 connector. In combination with the SCC1-USB, RS485, or analog sensor cables, they provide a modular solution that covers a wide range of flow rates from single-digit nanoliters per minute up to several hundred milliliters per minute, and a suitable electrical interface for almost any environment:

                      • SCC1-USB sensor cable for laboratory and desktop use provides a plug-and-play connection to a PC for operation with Sensirion’s viewer software or user-built programs.
                      • SCC1-RS485 sensor cable for demanding industrial automation environments features a stable RS485 interface and includes advanced functionalities such as dispense volume totalizer, automatic dispense detection and data buffer for asynchronous read-out.
                      • SCC1-Analog sensor cable for simple and quick readings without programming or for integration into generic controller systems. In addition to a 0-10 V analog voltage output, the cable provides a configurable digital (high/low) output that can be programmed to act as a flow switch or as a pulse output. 


                      The SLx liquid flow meters are the first choice for standalone applications in industrial automation systems, laboratory set-ups, bench-top testing, and technology evaluation. The robust housing (IP53 or higher) protects them from dust or accidental spills.

                        • Liquid Flow Meter SLG

                        • For Ultra-Low Flow Rates and UHPLC

                          The SLG liquid flow meters are the perfect solution for dynamic liquid flow monitoring in cutting edge Ultra-High-Pressure Liquid Chromatography (UHPLC) and other applications requiring precise measurement of ultra-low flow rates.

                          A highly sensitive CMOSens® microchip detects the mass flow through the wall of the fused silica flow channel. The flow channel withstands pressures up to 1200 bar / 17500 psi. At the same time the response time for measurements is 40 ms only. The combination of these properties enables the high-end devices of the SLG series to be especially suited for monitoring dynamic flow rates in cutting-edge chromatography systems. Great repeatability for analyses - the most important criterion in HPLC and microfluidic systems - is ensured. The maximum flow rate of the SLG-0075 is 5 µl/min in precision mode and 20 µl/min in extended mode. The SLG-0025 provides reliable liquid flow measurements down to 70 nl/min and even below. The SLG-0150 completes the SLG series with a slightly higher flow range than the SLG-0075, at a reduced pressure drop. It is the first choice for laboratory setups and leakage detection at moderate pressures up to 500 bar.

                          The SLG liquid flow meters in combination with one of the SCC1 sensor cables offers a modular solution with a suitable electrical interface for almost any environment:

                          Features

                          • Three sensors versions with maximum flow rates of 1.5, 5.0, or 8.0 µl/min, extended range of the SLG-0075 up to 20 µl/min.
                          • Ultra low flow detection with 0.5 nl/min resolution
                          • Repeatability better than 0.6% of the measured value
                          • Response time: 40ms
                          • Media isolated, ultra high pressure resistance up to 1200 bar / 17500 psi
                          • Inert wetted materials: Flow path made of fused silica and PEEK sealing
                          • Stainless steel fittings for 1/16" OD tubing
                          • Calibrated RS485 interface, 0-10 V analog output, or I2C

                          Applications
                          • Ultra High Pressure Liquid Chromatography, LC/MS
                          • High-pressure/ultra-low flow analytical instruments and life science applications
                          • Leakage testing
                          • Microfluidics
                        • Liquid Flow Meter SLI

                        • For Life Science and Automation

                          Designed for integration in demanding flow control systems, the SLI liquid flow meter series is a high precision solution for low flow rates of liquids based on water or hydrocarbons (alcohols, solvents, oil, fuel, adhesives). Sensirion’s modular approach, which allows the liquid flow meter to be combined with several interface cables, ensures an optimal match and simplifies the integration of a liquid flow meter into a fluidic system.

                          The short response time and high precision of the SLI liquid flow meter allow accurate monitoring of highly dynamic processes such as fast dosing operations. As with all other Sensirion liquid flow meters, this reliable device works without any moving parts, measuring through the wall of a straight flow path. Ultimate media compatibility of all wetted parts is ensured by the exclusive use of highly inert materials (glass, PEEK and flouropolymer sealing). The robust IP65 protected housing in a compact form makes the SLI flow meter the first choice for the measurement of low flow rates from single-digit microliters to several milliliters per minute in demanding applications in the life sciences and industrial automation.

                          Features
                          • Three sensor versions cover different flow ranges from microliters per minute to milliliters per minute
                          • Maximum flow rate for water-based liquids: 10 ml/min
                          • Maximum flow rate for hydrocarbons: 80 ml/min
                          • Repeatability: below 1% of the measured value
                          • Highest sensitivity down to <1 µl/min
                          • Fast response time down to 40 ms
                          • RS485, USB or 0-10 V analog voltage output
                          • Inert wetted materials: glass, PEEK, and fluoropolymer
                          • Maximum recommended operating pressure: up to 50 bar depending on flow range
                          • IP65 water and dust protection

                          Applications
                          • General process monitoring
                          • Pump control
                          • Fuel flow monitoring
                          • Lubricants dosage monitoring
                          • Monitoring of spray coating
                          • Conformal coating
                          • Leakage detection
                        • Liquid Flow Meter SLS-1500

                        • Versatile and Robust

                          Featuring Sensirion’s innovative sensor technology in a robust housing, the SLS-1500 offers a versatile sensing solution for applications in demanding industrial environments and laboratory settings. Sensirion’s modular approach to combining sensor and interface cable ensures an optimal match, which means the integration of a flow sensor has never been easier.

                          Capable of fast and precise measurements for flow rates of 0 ml to 40 ml/min, the SLS-1500 enables closer process monitoring than ever before. With a typical response time of 20 ms, it measures highly dynamic dispensing processes quickly and reliably. The flow channel inside the sensor is completely straight, open and has no moving parts. Inert, wetted materials provide outstanding chemical resistance and excellent biocompatibility.

                          The SLS-1500 is compatible with SCC1 interface cables, offering USB, RS485 or analog voltage output connections. The most recent addition to Sensirion’s range of liquid flow sensors is a compact, cost-effective and precise sensor that is ready for immediate use.

                          Features
                          • RS485, USB or analog voltage output connections
                          • Fast response time of 20 ms
                          • Flow rates of 0-40 ml/min
                          • No moving parts
                          • Completely calibrated, digital linear output signal
                          • Compact Size
                          • Wetted materials: Stainless steel, PTFE und PEEK

                          Applications
                          • Diagnostics
                          • Analytical instruments
                          • Biomedical devices
                          • Fuel cells
                          • Industrial automation
                        • Liquid Flow Meter SLQ-QT500

                        • Versatile Liquid Flow Meter for up to 120 ml/min and Highly Viscous Fluids

                          The SLQ-QT500 features a flow range of up to 120 ml/min for water-based and hydrocarbon-based liquids, such as alcohols, solvents, oil, fuel and adhesives. It is the first choice for measurement of liquids containing particles or with a high viscosity. The SLQ-QT500 in combination with one of the SCC1 sensor cables can be easily integrated into demanding coating systems in the semicon industry, as well as into a wide array of dispensing and liquid flow systems in other industries.

                          The high sensitivity and measuring speed offers new possibilities for the monitoring and control of fast dispensing processes. The sensor is available with calibrations for H2O and isopropanol (IPA). Due to its micro-thermal measurement principle and large inner diameter, the measurement performance of the SLQ-QT500 does not depend on the viscosity itself, and so there is no strict upper or lower viscosity limit (e.g. kinematic viscosities of up to ~1000 mm2/s). It is also ideal for liquids that contain small particles, as long as they do not abrade the quartz glass tube.

                          For wetted parts, only PFA for the fittings and quartz glass for the inner flow channel have been chosen. As with all other Sensirion liquid flow meters, this reliable device has no moving parts and measures through the wall of a straight flow path.

                          Features
                          • Maximum flow rate for hydrocarbons and water-based liquids: 120 ml/min
                          • For high- and low-viscosity liquids or for liquids with small particles
                          • Fast response time down to 50 ms
                          • Highest sensitivity down to the lowest flow rates
                          • RS485, USB, or 0-10 V analog voltage output
                          • Straight flow path, no moving parts
                          • Assured purity
                          • Superb chemical resistance
                          • Inert wetted materials: PFA and quartz glass
                          • Maximum recommended operating pressure: 12 bar

                          Applications
                          • High-end semiconductor process control
                          • High-viscosity applications
                          • Industrial automation
                          • Fast dosing operations
                        • Liquid Flow Meter SLQ-QT105

                        • Versatile Liquid Flow Meter for up to 120 ml/min and Highly Viscous Fluids

                          Tailored to the integration in demanding coating systems, the SLQ-QT105 is a semicon grade-sensor solution for flow rates below 120 ml/min of hydrocarbon based liquids like photoresists and solvents.

                          Based on Sensirion's proven thermal microsensor technology, it opens new perspectives in terms of sensitivity, reliability and speed. The short response time of the SLQ-QT105 allows the accurate monitoring of highly dynamic processes such as fast dosing operations. Equipped with fittings for 4x3mm PFA tubing, this reliable device works without any moving parts measuring non-invasively through the wall of a straight flow path. A smart digital interface and robust RS485 communication is offered for long distance and bus capability.

                          Features
                          • Maximum flow rate for hydrocarbons: 120 ml/min
                          • Designed for photoresists and solvents
                          • Highest sensitivity down to the lowest flow rates
                          • Fast response time down to 30 ms
                          • RS485, USB or 0-10 V analog voltage output
                          • Superb chemical resistance
                          • Inert wetted materials: PCTFE, PFA, and quartz glass
                          • Assured purity
                          • Straight flow path, no moving parts
                          • Maximum working pressure: 3 bar (high pressure ratings available on request)

                          Applications
                          • High-end semiconductor process control
                          • Photoresist dispensing
                          • Fast dosing operations
                      • Lx – Compact Liquid Flow Meters

                      • The Lx liquid flow meters are designed for compact integration into OEM devices or instruments. The sensor’s dimensions are reduced to a minimum in order to provide maximum flexibility for the design-in. With the Lx liquid flow meters, Sensirion is able to offer competitive pricing for large volume applications throughout different industries.

                        The LG01 liquid flow switch provides a cost-effective solution for the reliable detection of flow, the presence of air, or a leakage in a fluidic system within less than 100 ms in situations where quantitative flow information is not required.

                        All Lx liquid flow meters feature a 4-pin or 5-pin Molex PCB connector for compact electrical integration.

                          • Liquid Flow Meter LG16

                          • The LG16 liquid flow meters offer Sensirion’s CMOSens® microsensors in a compact and stripped-down housing for integration into instruments and other closed systems.With five different flow ranges, calibration options for different media (H 2O and/or hydrocarbons), and a selectable electrical interface (digital I2C or 0-5 V analog), the LG16 liquid flow meters offer a comprehensive solution for measuring low and ultra-low flow rates. All subtypes feature the strengths of Sensirion’s liquid flow meters: fully calibrated digital flow sensing, inert wetted materials (glass, PEEK, fluoropolymer), fast response times (down to 40 ms and below), and low power consumption.

                            They offer the ideal solution for measuring highly dynamic fluidic processes, closed-loop control of microfluidic systems, bead and droplet count, or bubble detection. The 5 subtypes cover maximum flow rates from 1.5 µl/min by the smallest version (LG16-0025) up to 5 ml/min (LG16-2000) for water and aqueous solutions. With hydrocarbon liquids such as oils, organic solvents, fuel, or lubricants, flow rates up to 80 ml/min can be measured (see LG16-2000HC-D).

                            Features
                            • LG16 series for flow rates from nl/min up to 5 ml/min
                            • Resolutions down to the sub nl-range
                            • Response time: 40 ms
                            • Digital I2C interface or analog output 0-5 V
                            • Supply voltage range 7 V - 12 V (analog output) or 3.5 V - 12 V (digital interface)
                            • Inert wetted materials: flow channel made of glass (borosilicate or fused silica)
                            • Excellent media compatibility and chemical resistance
                            • Media isolated sensing principle - no direct sensor contact with the fluid

                            Applications
                            • Medical applications
                            • Point-of-care diagnostic devices
                            • Vaporizers
                            • Environmental testing units
                          • Liquid Flow Meter LG01

                          • The LG01 Flow Switch sensor detects ultra-low liquid flow rates or the presence of air in fluidic systems and therefore makes them more reliable.

                            The detection of liquid flows is possible within the range of a few ml/min and less. The sensor's output signal of either 0 or 5 volts indicates whether the current flow rate is above or below the specified flow switch level. At flow rates above this limit the identification of air bubbles within the flow channel is equally consistent (leak detection). The non-invasive measurement principle of the liquid flow sensor LG01 allows detecting the current state of fluid through the wall of the internal glass capillary. Thus, the sensor provides highest bio-compatibility and chemical resistance. Measurements of the liquid flow detector are performed with a response time of less than 100ms.

                            Features
                            • Maximum flow rate up to 220 ml/min (valid for H2O)
                            • Standard flow switch threshold at 4.5 ml/min or 0.25 ml/min (valid for H2O)
                            • Air-/bubble detection
                            • Fluid connections: 1/4-28 standard fittings for OD 1/8" (3.2 mm) or 1/16" (1.6 mm) plastic tubing
                            • Response time: below 100 ms
                            • Inert wetted materials: glass, PEEK, and fluoropolymer
                            • Media isolated sensing principle - no direct sensor contact with the fluid
                            • Supply voltage of 5 - 12 V

                            Applications
                            • Biomedical devices
                            • Lab automation
                            • Process monitoring
                            • Leakage detection
                          • Liquid Flow Meter LS32-1500

                          • Sensirion offers the compact and chemical-resistant liquid flow meter LS32-1500 for integration into instruments and other closed systems with low flow rates of up to 40 ml/min.

                            With a compact form factor of just 18x18x59 mm3, the LS32-1500 liquid flow meter is mechanically extremely robust. Its fast response time of 20 ms, excellent repeatability and outstanding chemical resistance make the sensor ideal for use in biomedical applications. The sensor is highly versatile and can be used in fuel cells, for example, as well as a wide range of applications in dosage control and industrial automation monitoring.

                            The use of high-performance stainless steel, PTFE, and PEEK ensures outstanding media-compatibility and exceptional chemical resistance. Customized solutions (e.g. downmount version for manifold systems) based on the design of the LS32-1500 are also feasible.

                            The LS32-1500 liquid flow meter offers a cost-efficient, compact, and reliable sensor solution for the measurement of low flow rates and is an excellent addition to the range of high quality products from Sensirion.

                            Features
                            • Maximum flow rates for water-based liquids: 40 ml/min
                            • Fast response time of 20 ms
                            • No moving parts along the flow path
                            • Completely calibrated, linearized, and temperature-compensated digital output signal
                            • Compact size
                            • Inert wetted materials: 904L high-performance stainless steel, PTFE, und PEEK
                            • Digital I2C interface

                            Applications
                            • Diagnostics
                            • Analytical instruments
                            • Biomedical devices
                            • Fuel cells
                            • Industrial automation
                        • More Liquid Flow Meters

                            • Liquid Flow Sensor LPG10

                            • Miniaturized Planar Package

                              With a tiny footprint of only 10x10 mm2, Sensirion’s LPG10 liquid flow sensor series provides outstanding performance and speed in measuring liquid flow in a planar microfluidic glass substrate with down-mount fluidic ports for a highly compact integration into any fluidic manifold system. It is thus ideal for high-volume applications with strict space limitations.

                              Two core technologies are combined at this point: microfluidics chips and digital microsensor chips. This unique approach enables measurement of liquid flow inside a cost-efficient planar glass substrate. The digital microsensor chip provides the full signal processing functionality for a fully calibrated, temperature compensated, and linearized digital output.

                              The LPG10 series is a smart sensor solution offering flow rates from the low microliter per minute range up to 1 ml/min. Glass as the only wetted material ensures optimum compatibility with biological and pharmaceutical processes.

                              Features

                              • Incredibly small foot print of 10mm x 10mm
                              • High speed: 30 ms response time and better
                              • Flow rates up to 1ml/min
                              • Completely calibrated, digital linear output signal
                              • Excellent bio-compatibility, chemically-resistant
                              • Media isolated sensing principle - no direct sensor contact with the fluid
                              • Supply voltage 3.3V - 3.6V
                              • Digital I²C interface
                            • Liquid Flow Sensor LD20

                            • Single-use Flow Sensor for Biomedical Applications

                              Safe, precise, and reliable measurement of low flow rates in medical environment has never been so easy: The single-use liquid flow sensors of the LD20 series measure the liquid flow rate directly and at the point of interest for a more effective patient treatment and improved safety.

                              Nowadays, keywords and trends such as point-of-care, patient compliance, complex drug administering, and wearable designs demand the development of smart medical devices. The LD20 series combines Sensirion’s proven liquid flow sensing technology with a single-use, cost-optimized design for high volume applications in the medical, life-science or food industry. The sensor provides a bidirectional measurement of flow rates from 1300 ml/h down to single-digit ml/h, while it as well reliably detects common failure modes such as occlusion, free flow, or air bubbles with unprecedented speed and sensitivity.

                              The LD20 series optimizes costs by reducing the flow sensor to its bare minimum while still ensuring easy fluidic, electrical and mechanical connections. Barbed or luer lock fittings guarantee secure and straight-forward integration into the fluidic line: for example, into a catheter or an infusion set. Inert wetted materials provide outstanding chemical resistance and excellent media compatibility.

                              Features
                              • Maximum flow rate for water-based liquids: 1300 ml/h
                              • Bidirectional measurement and real time failure detection
                              • Highest sensitivity for detection of infiltration and multi-infusion settings
                              • Media isolation: No contact of the sensor chip with valuable medications or body fluids
                              • High speed measurement: Response time < 50 ms
                              • Low power consumption: Suitable for battery-powered applications
                              • Highly integrated: Fully calibrated, linearized, and temperature compensated digital I2C signal from a single chip
                              • Highly scalable sensor design: Competitive pricing for single-use applications
                            • Liquid Flow Concentration Sensor SLF3C-1300F

                            • More than flow: Thermal Conductivity Feature

                              The SLF3C-1300F takes the industry-approved flow sensing system from Sensirion to the next level: the thermal conductivity feature now makes it possible to take a closer look at the liquid inside your application.

                              The thermal conductivity feature allows you to measure the thermal conductivity of the liquid after the flow is stopped, thus enabling new applications and features for your system:

                              Features
                              • Concentration monitoring: measure the concentration of two-component mixtures such as oil or glycol in water
                              • Fluid selection: switch between different flow calibration profiles depending on which liquid is in the sensor (e.g. switching between IPA and water calibration)
                              • Precision check: ensure fluid is the same as the calibrated fluid to ensure precise flow rate measurement
                              • Cleaning verification: distinguish between “working solution” and “cleaning solution” to be sure that the cleaning cycle of your instrument is valid
                              • Safety check: prevent damage to your instrument by checking if the right bottle/liquid was attached to your System
                              • Low power consumption: Suitable for battery-powered applications
                            • Liquid Flow Sensor SLF3x

                            • Made to Measure: The Next Level in Liquid Flow Sensing

                              The SLF3x series is the next generation of Sensirion’s liquid flow sensors. By combining Sensirion’s excellent 20-year track record in low and lowest flow rate sensing with a radically optimized mechanical design, the SLF3x takes the well-established functionality to the next level in price-performance ratio. The sensor provides maximum safety, stability and long-term reliability and allows monitoring the entire system operation and detecting common failure modes for a wide range of applications, including the fields of diagnostics, analytical instruments and life sciences.

                              The liquid flow sensors of the SLF3x series are based on Sensirion’s proven CMOSens® Technology and optimize costs by simplifying the design without sacrificing the easy fluidic, electrical and mechanical connections. The straight and unobstructed flow channel has no moving parts; inert wetted materials provide outstanding chemical resistance and excellent media compatibility.

                              The SLF3x enables applications in the fields of diagnostics, analytical instruments and life sciences to reach unparalleled fluid control, system reliability and thus new heights in performance and end-user satisfaction. Its compact form factor and cost-effective design permit system designs with one or more sensors that were previously unfeasible.
                          • Liquid Flow Meter Kit

                                • Liquid Flow Meter Kit

                                • Quick and Easy Testing of Various Liquid Flow Meters

                                  In order to conduct initial measurements quickly and easily all our SLI, SLS, SLG, or SLQ liquid flow meters can be ordered as part of a Liquid Flow Meter Kit. Next to the liquid flow meter of your choice, the kit contains everything necessary to enable first measurements within 10 to 15 minutes. It is meant to provide you with a first impression of the CMOSens® Technology and the performance of our liquid flow meters.

                                  Besides the standard Liquid Flow Meter Kits, we offer specific Evaluation Kits for the liquid flow sensors of the LG16, the LPG10 and LD20 Series. For the LPG10 series a pre-assembled manifold body is additionally included or a base station for electrical connection of the contact pads in case of the LD20 series.
                            • Mass Flow Meters for Gases

                            • With our long history of designing mass flow solutions for medical and industrial automation, Sensirion is your ideal partner to support you in the development of new products. Our mass flow meters ensure fast, accurate and economical measurements of gas flow over a wide dynamic range. They are extremly reliable and long-term stable and are free from zero-point drift.

                              At the heart of every mass flow sensor is a MEMS based calorimetric microsensor, which measures the gas flow using the thermal measurement principle. The sensor element is integrated with the complete signal conditioning electronics on one single chip. This unique integrated technological approach - provided by the unparalleled and innovative CMOSens® Technology - results in excellent performance at a very attractive cost.
                                • Mass Flow Meter SFM3000

                                • Low Pressure Drop Flow Meter

                                  The SFM3000 is a digital flow meter especially suitable for high-volume applications. The design of the flow channel results in very low pressure drop through the sensor element, making it highly suitable for medical ventilation and respiration applications.

                                  The SFM3000 bidirectionally measures the flow of air and other non-aggressive gases at rates up to 200slm with excellent accuracy and extremely high speed. It outputs a 14-bit digital signal at a 2kHz update rate. The signal is internally linearized and temperature compensated. Furthermore, the SFM3000 flow meter operates from a 5 Vdc supply voltage and features a digital 2-wire interface, making it easy to connect directly to a microcontroller.

                                  The outstanding performance of the SFM3000 sensor is based on Sensirion's patented CMOSens® Technology, which combines the sensor element, signal processing and digital calibration on a tiny microchip. The gas is measured by a thermal sensor element to provide an extended dynamic range and enhanced long-term stability compared to other flow measuring technologies. Thanks to this proven CMOSens® Technology, the flow meter is perfectly suited for high-quality mass production and is the ideal choice for demanding and cost-sensitive OEM applications.

                                  Features
                                  • Very low pressure drop < 6mbar @ 200sml
                                  • Flow range: +/-200slm (bidirectional)
                                  • Accuracy 1.5% m.v.
                                  • Ultra fast response time
                                  • Digitally calibrated & temperature compensated
                                  • Digital Output (I²C)

                                  Applications
                                  • Ventilation, anaesthesia, inhalers and other medical instruments
                                  • Process automation
                                  • Burner control
                                  • Fuell cell control
                                  • Spectroscopy
                                  • Environment monitoring
                                  • Laboratory
                                • Mass Flow Meter SFM3100

                                • Analog Flow Sensor for Respiratory Applications

                                  The analog mass flow meter SFM3100 is highly accurate and fast. The SFM3100 has a compact design and can be easily integrated into existing devices. There is a temperature sensor in the gas channel of the flow meter. This enables highly precise temperature compensation and obviates the need to integrate a dedicated temperature sensor.

                                  The SFM3100 measures flow ranges between -24 and +240 slm. It can also detect negative flow ranges, thereby recognizing errors or impeded flows in a reliable manner. At the same time, multiple gases are compensated with great precision. The flow rates and signal characteristics can be customized to meet customer-specific requirements.

                                  Like all Sensirion sensors, the analog mass flow sensor is based on the patented CMOSens® Technology, which combines the sensor and analysis electronics on a single microchip. The result is a highly stable and precise system for demanding and cost-sensitive applications. The SFM3100 is particularly suitable for inspiration applications as well as for mixing oxygen and air to a very precise degree.

                                  Features
                                  • Flow range: -24 to +240 slm
                                  • Accuracy 5% m.v. (typ.)
                                  • Ultra-fast response time
                                  • Low pressure drop < 16mbar @ 200slm (typ.)
                                  • Temperature sensor integrated
                                  • Compact design, easy integration
                                  • Gas compensation
                                  • Detection of errors and impeded flows
                                  • Customized flow rates and signal characteristics
                                  • Analog output
                                  • Fully calibrated and temperature compensated

                                  Applications
                                  • Ventilation (Inspiratory)
                                  • Gas Mixture
                                  • Inhalers
                                • Mass Flow Meter SFM3200

                                • Flow Sensor for a Superior Performance at Low Flows

                                  The SFM3200 mass flow meter is characterized by its wide dynamic measurement range of up to 250 slm, as well as its measurement accuracy at low flows.

                                  The special design of the flow channel results in a very low pressure drop through the flow body of the sensor, which makes it extremely suitable for medical ventilation and other respiratory applications. The thermal sensor element assures very fast signal processing time and bidirectional measurement mode, with the signal being internally linearized and temperature compensated.

                                  The outstanding performance of the SFM3200 sensor is based on Sensirion's patented CMOSens® Technology. The technology allows the integration of the sensor element and the analysis electronics on a single, tiny CMOS silicon chip. The result is a highly stable and precise system for demanding and cost-sensitive applications.

                                  Features
                                  • Flow range: up to 250 slm (bidirectional measurement mode)
                                  • Superior performance at very low flows
                                  • Low pressure drop
                                  • High robustness and reliability at variable inlet conditions
                                  • Very fast signal processing time
                                  • Signal internally linearized and temperature compensated

                                  Applications
                                  • Inspiratory flow measurement
                                  • Respiratory measurements
                                  • Ventilation
                                  • Anesthesia
                                  • Drug delivery
                                • Mass Flow Meter SFM3300

                                • Proximal Flow Sensors (Autoclavable / washable or single-use)

                                  The SFM3300 mass flow meter is a sensor for proximal flow measurement in respiratory applications such as ventilation or anesthesia. There are two versions available: the SFM3300-AW is autoclavable and washable and the SFM3300-D is single-use.

                                  The SFM3300 features outstanding measuring accuracy and robustness as well as a short signal processing time. The digital flow sensor measures bidirectional flow volumes of up to 250 slm and is fully calibrated for air, N2 and O2 gases. The special design of the flow channel results in a low dead space volume and the slightly greater pressure drop ensures more stability compared to variable inlet conditions. The sensor also features medical cones for pneumatic connection to the respiratory cycle and has a mechanical interface for a user-friendly electrical connection. Thanks to its performance characteristics, the SFM3300 mass flow meter is ideally suited for single-use proximal flow measurements in medical ventilation, hospital applications, residential care applications and emergency situations.

                                  Like all Sensirion sensors, the SFM3300 is based on the innovative CMOSens® Technology, which combines the sensor element and processing electronics on a single, tiny CMOS microchip. The CMOSens® mass flow sensor offers durably stable and interference-free measurement and enables a very fast and highly precise sensor signal.

                                  Features

                                  • Autoclavable / washable (SFM3300-AW) or single-use (SFM3300-D)
                                  • Flow rates: ±250 slm (bidirectional)
                                  • Fully calibrated
                                  • Very fast update time (0.5 ms)
                                  • Small dead space: < 10 ml
                                  • Best-in-class accuracy
                                  • Robust
                                  • Low dependency on different inlet conditions
                                  • Medical cones for pneumatic connection to standard breathing circuits
                                  • Mechanical interface for electrical reconnection

                                  Applications
                                  • Proximal flow measurement
                                  • Expiratory measurement
                                  • Ventilation
                                  • Anesthesia
                                  • Respiratory measurements
                                  • Metabolic measurements
                                • Mass Flow Meter SFM3300-D

                                • The SFM3300-D flow sensor is a single-use sensor for proximal flow measurement in respiratory applications such as ventilation or anesthesia.

                                  It features outstanding measuring accuracy and robustness as well as a short signal processing time. The digital flow sensor measures bidirectional flow volumes of up to 250 slm and is fully calibrated for air, N2 and O2 gases. The special design of the flow channel results in a low dead space volume and the slightly greater pressure drop ensures more stability compared to variable inlet conditions. The sensor also features medical cones for pneumatic connection to the respiratory cycle and has a mechanical interface for a user-friendly electrical connection. Thanks to its performance characteristics, the SDM3300-D mass flow meter is ideally suited for single-use proximal flow measurements in medical ventilation, hospital applications, residential care applications and emergency situations.

                                  Features
                                  • For proximal flow measurements
                                  • Flow rates: ±250 slm (bidirectional)
                                  • Fully calibrated
                                  • Very fast update time (0.5 ms)
                                  • Small dead space: < 10 ml
                                  • Best-in-class accuracy
                                  • Robust
                                  • Low dependency on different inlet conditions
                                  • Medical cones for pneumatic connection to standard breathing circuits
                                  • Mechanical interface for electrical reconnection

                                  Applications

                                  • Proximal flow measurement
                                  • Ventilation
                                  • Anesthesia
                                  • Respiratory measurements
                                  • Metabolic measurements
                                • Mass Flow Meter SFM3400

                                • Proximal Flow Sensor for Neonatal and Pediatric OEM Applications

                                  The SFM3400 flow sensor is a proximal flow sensor for neonatal and pediatric applications in respiratory devices such as ventilation or anesthesia. The sensor is available as both a single-use version (SFM3400-D) and a reusable version (SFM3400-AW). The reusable solution is autoclavable and washable.

                                  The SFM3400 flow sensor features outstanding measurement accuracy and a short signal processing time as well as high robustness. The digital flow sensor measures bidirectional flow rates of up to 33 slm and is fully calibrated for air, N2 and O2 gases. The special design of the flow channel results in a low dead space volume of less than 1 ml. The sensor features standard medical cones for pneumatic connection to the respiratory cycle and has a mechanical interface for a simple and user-friendly electrical connection. Thanks to its performance characteristics, the SFM3400 mass flow meters are ideally suited for proximal flow measurements in neonatal and pediatric OEM applications, ventilation in hospitals, emergency situations and home care applications.

                                  Features
                                  • For neonatal and pediatric applications
                                  • Reusable (autoclavable / washable) and single-use versions
                                  • Flow rates: ±33 slm (bidirectional)
                                  • Fully calibrated, no recalibration
                                  • Very fast update time (0.5 ms)
                                  • Small dead space: < 1 ml
                                  • Best-in-class accuracy
                                  • Robust
                                  • Highest sensitivity
                                  • Low dependency on different inlet conditions
                                  • Medical cones for pneumatic connection to standard breathing circuits
                                  • Mechanical interface for electrical reconnection

                                  Applications

                                  • OEM Applications
                                  • Proximal flow measurement (neonatal and pediatric applications)
                                  • Ventilation
                                  • Anesthesia
                                  • Respiratory measurements
                                  • Metabolic measurements
                                • Mass Flow Meter SFM4100

                                • Versatile Flow Sensor

                                  Designed for anaesthesia equipment, the CMOSens® mass flow meter SFM4100 precisely measures air and other non-aggressive gases. It provides an impressively wide dynamic measuring range up to 20 slm. The sensor unit has a digital I2C interface, provides a fully calibrated and temperature compensated output signal, and operates reliably at pressures of up to 7 bar.

                                  Its outstanding long-term stability makes the SFM4100 first choice for products that require a high rate of deployment with long service intervals. For OEM projects, more than one gas calibration can be stored simultaneously in each sensor device. Self-test features allow testing of the entire signal chain (from capture of the analogue signal through digital signal chain) while the mass flow meter is in use. This makes the SFM4100 an optimal solution for safety-critical applications.

                                  Features
                                  • Measurement of flow rates from 0 to 20 l/min
                                  • No drift
                                  • Wide dynamic range (1:500)
                                  • Digital I²C interface
                                  • Digitally calibrated and temperature compensated
                                  • Multigas Option

                                  Applications
                                  • Anaesthesia, inhalers and other medical instruments
                                  • Analytical equipment
                                  • Process Automation
                                • Mass Flow Meter SFM4200

                                • Pressure-Resistant Mass Flow Meter for Gas-Mixing Applications

                                  The SFM4200 digital mass flow meter for air, oxygen and non-corrosive gases is particularly suitable for high-volume applications. One highlight is its pressure resistance. In contrast to its predecessors, the SFM4200 is highly pressure-resistant and delivers reliable measurements at pressure surges of up to 8 bar. With a signal processing time of 0.5 ms, the SFM4200 is incredibly fast, as well as highly accurate. It also enjoys an expanded measurement range of up to 160 slm.

                                  Thanks to the combination of the expanded measurement range and outstanding pressure resistance, the sensor is ideal for high-volume applications such as oxygen gas mixing for medical ventilators, where the sensor is integrated into the high-pressure side. The flexible installation allows customers to use the SFM4200 to significantly develop their own devices and designs or to expand applications.

                                  The sensor is also fitted with a digital I2C two-wire interface and delivers internally linearized and temperature-compensated measurements. The sensor has been built using Sensirion’s patented CMOSens® Technology, which enables both high-quality mass production and demanding, cost-efficient and customer-specific applications.

                                  Features

                                  • Flow rates of 0-160 slm
                                  • Pressure-resistant and capable of operating at pressures of up to 8 bar
                                  • Rapid signal processing time of 0.5 ms
                                  • Digital I2C two-wire interface
                                  • Linearized and temperature-compensated measurements

                                  Applications
                                  • Medical instruments
                                  • Process automation
                                  • Spectroscopy
                                  • Environment monitoring
                                  • Laboratory (Analytical instruments)
                                • Mass Flow Meter SFM5400

                                • Versatile Flow Meter for Several Applications

                                  The SFM5400 mass flow meter measures mass flows with outstanding accuracy (errors < 1%), long-term stability and repeatability and covers an impressively wide dynamic measurement range. The SFM5400 is made of metal and highly configurable. It is available with a variety of fluidic connections and various interfaces and measures maximum flow rates between 50 sccm and 200 slm. The sensor signal is directly converted into a digital, completely calibrated and temperature-compensated signal on the chip. Multiple gas calibrations can be stored on a single device. Additionally, the flow meter can check whether the activated gas calibration matches the actual gas present. The SFM5400's versatility makes it the ideal solution for industrial and medical applications.

                                  The outstanding performance of the SFM5400 mass flow meter is based on the innovative CMOSens® Technology, which integrates the high-precision sensor element and the analog and digital processing electronics on a single CMOS silicon chip. Combined with high-quality materials, the result is a durably stable, extremely fast and highly precise mass flow meter.

                                  Features
                                  • High accuracy at low flow rates (< 1 sccm)
                                  • Excellent accuracy / repeatability (0.8% / 0.1% of measured value respectively)
                                  • Wide dynamic range (turndown ratio 1000:1)
                                  • Multiple gases and gas recognition
                                  • Digital and analog interfaces
                                  • Flexible mechanical connection options: down mount, VCR and VCO, Swagelok,
                                  • C-/W-Seal, etc.
                                  • Highly configurable
                                  • MTBF 169 years - no recalibration required

                                  Applications
                                  • Analytical instruments (e.g. gas chromatography, mass spectrometry, thermal analysis)
                                  • Medical devices (e.g. ventilation, anesthesia)
                                  • Industrial process automation (e.g. coating, thermal processing)
                                  • Semiconductor industry (e.g. plasma etching processes, thin film deposition)
                                • Mass Flow Meter SFM5300

                                • Flow Meter for Cost-Sensitive OEM Projects with High Unit Quantities

                                  The SFM5300 mass flow meter enables the measurement of mass flows with outstanding accuracy (errors < 2%), long-term stability and repeatability. It boasts an impressive dynamic measurement range and a compact size. The SFM5300 mass flow meter is available with downmount connections and digital interfaces. The metal SFM5300 is the smaller variant of the SFM5400 mass flow meter and is exclusively for cost-sensitive OEM projects with high unit quantities.

                                  The outstanding performance of the SFM5300 mass flow meter is based on the innovative CMOSens® Technology, which integrates the high-precision sensor technology and the processing electronics on a single CMOS silicon chip. Combined with high-quality materials, the result is the durably stable, extremely fast and highly precise SFM5300 mass flow meter.

                                  Features

                                  • High accuracy with low flow rates (< 1 sccm)
                                  • Excellent accuracy / repeatability (2% / 0.2% of measured value respectively)
                                  • Wide dynamic range (turndown ratio 1000:1)
                                  • Compact size with downmount connection
                                  • Multiple gases and gas recognition
                                  • Digital interfaces
                                  • Highly configurable
                                  • MTBF 169 years - no recalibration required

                                  Applications
                                  • Analytical instruments (e.g. gas chromatography, mass spectrometry, thermal banalysis)
                                  • Medical devices (e.g. ventilation, anesthesia)
                                  • Industrial process automation (e.g. coating, thermal processing)
                                  • Semiconductor industry (e.g. plasma etching processes, thin film deposition)
                                • Differential Pressure Sensors SDP800 Series

                                • SDP800 – Proven and Improved

                                  Differential pressure sensors of the SDP800 series are the reliable solution for precise air flow measurement in most demanding but cost-sensitive HVAC applications, such as VAV controllers, burners, heat recovery systems and filter monitoring.

                                  The SDP800 differential pressure sensors are based on the next generation of the CMOSens® sensor chip and consequently utilize the successful features of the SDP600 series. They are the result of more than 15 years of experience in measuring air flow in tens of millions of patients, car engines and HVAC systems. The sensors of the SDP800 series can easily be integrated due to their proven form factor. This next-generation sensor chip offers extended functionality, smart averaging functions and multiple measurement modes. Like all Sensirion differential pressure sensors, those from the SDP800 series are characterized by their outstanding accuracy and long-term stability, together with no zero-point drift.  

                                  Features

                                  • No offset, no zero-point drift, hysteresis free
                                  • Outstanding accuracy and long-term stability
                                  • Pressure range of up to ±500 Pa (±2 inch H2O / ±5 mbar)
                                  • Excellent accuracy and repeatability (even below 1 Pa)
                                  • Fully calibrated and temperature compensated (-20° C to +85° C)
                                  • For air and non-aggressive gases
                                  • Suited for standard wave soldering

                                  Applications
                                  • HVAC (heating, ventilation, air conditioning)
                                  • Gas boilers, pellet stoves and fuel cells
                                  • Filter Monitoring
                                  • VAV control
                                  • Heat recovery
                                  • Medical (e.g. respiratory devices)
                                • Mass Flow Meter Evaluation Kits

                                • The evaluation kits are designed for an easy and cost-efficient evaluation of Sensirion's mass flow meters. Test now the features of the mass flow meters. Especially at lowest flow rates, the sensors provide very low pressure drop, highest accuracy and fast response time.

                                  The evaluation kits consist of a USB cable to which the mass flow meter is connected. With help of the available software the sensors can be tested fast and under real conditions. There is no need to program a microprocessor as the evaluation kit can be connected directly to a PC. The software displays the measurement data directly on the user's screen. It also allows the data to be exported to an Excel spreadsheet, making it easy to save and process.

                                  At the heart of every mass flow sensor is a MEMS based calorimetric microsensor, which measures the gas flow using the thermal measurement principle. The sensor element is integrated with the complete signal conditioning electronics on one single chip. This unique integrated technological approach - provided by the unparalleled and innovative CMOSens® Technology - results in excellent performance at a very attractive cost.
                              • Mass Flow Controllers for Gases

                              • Sensirion's mass flow controllers are characterized by fast and accurate control of gas flow over a wide dynamic range. Based on the innovative CMOSens® Technology, the heart of these mass flow controllers is a calorimetric microsensor (MEMS), which is integrated with the complete signal conditioning electronics on one single chip. While the flow is measured using the thermal measurement principle, efficient control is provided by an analog controlling circuit. This unique integrated technological approach results in excellent performance and reliability - at a very attractive cost.
                                  • Mass Flow Controller SFC5500

                                  • High Performance Off The Shelf - The World's First MFC Available via Catalogue Distribution

                                    SFC5500 mass flow controller series represent the culmination of Sensirion’s excellent 20-year track record in precision control of gas flow. The sensor is based on the microthermal measurement principle and makes use of Sensirion’s proven CMOSens® MEMS Technology. This allowed us to build a radical mass flow controller with best-in-class performance and excellent reliability, which unlike most other devices on the market, does not drift and does not require in-service re-calibration.

                                    Thanks to the exceptionally high control range enabled by the CMOSens® MEMS flow sensor, SFC5500 series can cover multiple flow ranges of a traditional mass flow controller in a single device. Coupled with multi-gas calibration and exchangeable fittings, SFC5500 seriesare the first mass flow controllers on the market available as standard off-the-shelf products suitable for applications in medical, analytical and industrial sectors. Thanks to this versatility, SFC5500 series are also the first mass flow controllers available via catalogue distribution.

                                    Features

                                    • Excellent accuracy and repeatability (0.8% / 0.1% of setpoint respectively)
                                    • Very wide control range (better than 1000:1)
                                    • Ultra-fast settling time (<100 ms)
                                    • G ¼″ flange compatible with a broad range of connectors: e.g. Swagelok, Legris, Festo
                                    • Calibrated for multiple gases (Air, N2, O2, H2, He, CH4, N2O, Ar, CO2)
                                    • Digital interface with temperature-compensated output
                                    • EK-F5x evaluation kit for quick and easy testing
                                    • NIST traceable calibration
                                    • Mean Time Between Failures (MTBF) 169 years
                                    • No drift and no re-calibration required in the field

                                    Applications
                                    • Analytical instruments (e.g. gas chromatography, mass spectrometry, thermal analysis)
                                    • Bioreactors
                                    • Medical equipment (e.g. ventilation, anesthesia)
                                    • Process control and industrial automation (e.g. coating, thermal processing)
                                    • Chemical, plastics and glass Industry
                                    • Semiconductor industry (e.g. plasma etching processes, thin film deposition)
                                    • Gas mixing
                                  • Mass Flow Controller SFC5400

                                  • Versatile Mass Flow Controller

                                    The SFC5400 mass flow controller measures and controls mass flows with outstanding accuracy, long-term stability and repeatability and covers an impressively wide dynamic measurement range. The SFC5400 highly configurable and its body housing is made of metal. Furthermore, the flow controller is available with various interfaces and a variety of fluidic connections and measures maximum flow rates from 50 sccm up to 200 slm. The sensor signal is directly converted into a digital, completely calibrated and temperature-compensated signal on the chip. Multiple gas calibrations can be stored on a single device. Additionally, the flow controller can check whether the activated gas calibration matches the actual gas present. The versatility of the SFC5400 makes it the ideal solution for industrial and medical applications.

                                    The SFC5400 mass flow controller is, as all sensor products, based on the innovative CMOSens® Technology, which integrates the high-precision sensor element and the analog and digital processing electronics on a single CMOS silicon chip and guarantees an outstanding performance. Combined with high-quality materials, the result is a durably stable, extremely fast and highly precise mass flow controller.

                                    Features
                                    • Ultra-fast gas flow control (settling time < 100 ms)
                                    • High accuracy at lowest flow rates (< 1sccm)
                                    • Excellent long-term stability and reliability
                                    • No aging effects
                                    • Wide dynamic range (turndown ratio 1000:1)
                                    • Multigas feature
                                    • High configuration
                                    • Attractive price-performance-ratio thanks to CMOSens® Technology
                                    • Digital and analog interfaces
                                    • Flexible mechanical connection options: down mount, VCR and VCO, Swagelok, C-/W-Seal, etc.
                                    • Customized versions available on request

                                    Applications
                                    • Analytical instruments (e.g. gas chromatography, mass spectrometry, thermal analysis)
                                    • Medical devices (e.g. ventilation, anesthesia)
                                    • Industrial process automation (e.g. coating, thermal processing)
                                    • Semiconductor industry (e.g. plasma etching processes, thin film deposition)
                                  • Mass Flow Controller SFC5300

                                  • Flow Controller for Cost-Sensitive OEM Projects with High Unit Quantities

                                    The SFC5300 mass flow controller measures and control mass flows with outstanding accuracy, long-term stability and repeatability. It boasts a compact size and an impressive dynamic measurement range. The body housing of the SFC5300 is metal. The SFC5300 mass flow controller is available with downmount connections and two digital interfaces. The SFC5300 is the smaller variant of the SFC5400 mass flow controller and is for cost-sensitive OEM projects with high unit quantities.

                                    As all Sensirion sensors, the outstanding performance of the SFC5300 mass flow meter is based on the innovative CMOSens® Technology, which integrates the high-precision sensor technology and the processing electronics on a single CMOS silicon chip. Combined with high-quality materials, the result is the durably stable, extremely fast and highly precise SFC5300 mass flow controller.

                                    Features

                                    • High accuracy at lowest flow rates (< 1sccm)
                                    • Excellent long-term stability and reliability
                                    • No aging effects
                                    • Wide dynamic range (turndown ratio 1000:1)
                                    • Multigas feature
                                    • Attractive price-performance-ratio thanks to CMOSens® Technology
                                    • Compact size

                                    Applications
                                    • Analytical instruments (e.g. gas chromatography, mass spectrometry, thermal analysis)
                                    • Medical devices (e.g. ventilation, anesthesia)
                                    • Industrial process automation (e.g. coating, thermal processing)
                                    • Semiconductor industry (e.g. plasma etching processes, thin film deposition)
                                  • Evaluation Kit EK-F5x

                                  • The EK-F5x evaluation kit is a simple test set for the evaluation and qualification of Sensirion SFC5000 mass flow controllers. Precise measurements for test purposes can be made quickly and inexpensively with this easy-to-use kit. The evaluation kit consists of a RS485-to-USB adapter cable, a 100/240V AC adapter, an USB stick with PC software and a Sensirion mass flow controller out of the SFC5000 series.

                                    The EK-F5x Viewer software, data sheet and calibration certificate can be downloaded from this page. Installing the software on a PC is quick and easy. No hardware or software configuration or supplementary calibration is necessary. The Windows Viewer software shows mass flow versus time on the monitor and supports data export in a file, enabling subsequent data analysis with Excel.

                                    Features
                                    • Fast and reliable evaluation and qualification
                                    • Enables initial testing of samples
                                    • Easy to use with a normal PC
                                    • Precise measurement with the SFC5000 mass flow Controller
                                  • Customized (OEM) Mass Flow Controllers

                                  • Besides the standard gas flow sensor solutions, Sensirion also offers customized OEM sensor solutions at an attractive price performance ratio. We adapt or develop your customized mass flow controllers according to your specific requirements.

                                    Developing your product, we rely on our unique and patented CMOSens® Technology. This technology allows for integrating the highly precise sensor element as well as the electronics for signal processing on one single tiny chip. Correspondingly, gas flow sensor solutions based on CMOSens® set new standards for precision, reliability, functionality and cost effectiveness.
                                • Gas Meter Modules for Smart Gas Meters

                                • The innovative microthermal gas meter modules from Sensirion enable gas consumption to be reliably monitored in real time at ultra-low power consumption. They feature dust resistance and excellent long-term stability, and achieve MID accuracy class 1.5. Furthermore, they enable the design of very compact MID-compliant gas meters for easy installation in the field, with no moving parts and therefore noiseless operation. Sensirion’s microthermal gas meter modules are the ideal choice for high-volume residential and industrial smart gas metering applications.

                                  Sensirion’s microthermal sensor technology has been installed for years in industrial and residential gas meters. In Europe, more than 1 million smart gas meters rely on Sensirion's microthermal gas meter modules. Sensirion’s microthermal technology features self-diagnosis capabilities and lays the foundation for future implementation of energy content monitoring of natural gas.

                                  The advantages of Sensirion's innovative gas meter modules are driving forward the smart energy industry.

                                      • Gas Meter Modules SGM63xx

                                      • Sensirion’s Next Generation Gas Meter Modules for Smart Gas Metering Applications

                                        The SGM63xx is Sensirion’s next generation series of gas meter modules for residential smart gas metering applications.

                                        It is equipped with the next generation CMOSens® flow chip, combined with Sensirion’s long experience in flow sensing. The SGM63xx series is available for meter sizes G1.6, G2.5, G4 and G6, certified according to EN 14236 and OIML R 137 for natural gas types H and L, and achieves MID accuracy class 1.5. The new gas meter modules feature all proven key properties of the SGM70xx series and offer additional benefits, such as ultra-low power consumption.

                                        On request, an evaluation kit is available for our certified standard products SGM63xx that enables fast and cost-effective evaluation of the sensor modules.

                                        Features

                                        • Ultra-low power consumption
                                        • High reliability and long-term stability
                                        • Compact design
                                        • No moving parts – noiseless operation
                                        • Certified for natural gas, type H and L
                                        • MID accuracy class 1.5
                                        • Self-diagnosis capabilities

                                        Applications
                                        • Residential gas metering
                                        • Sub-metering
                                  • Differential Pressure Sensor for Gases

                                  • The differential pressure sensors from Sensirion measure reliably, fast and long-term stable. The fully calibrated and temperature compensated sensors offer highest accuracy and resolution, especially at very low differential pressures. The small and cost-effective design makes them an ideal match for price-sensitive solutions, e.g. in medical and HVAC applications.

                                    Sensirion's digital and analog differential pressure sensors are mostly used to measure mass air flow in a bypass configuration. In many high-volume applications, it is the low-cost alternative to complete flow sensors.

                                    The outstanding performance of Sensirion's differential pressure sensors is based on the CMOSens® dynamic measuring principle, in which the differential pressure is determined using intrinsic flow measurement. Due to internal intelligence on the CMOSens® sensor chip, the systems are precise and flexible for customized OEM adaptations.
                                      • Differential Pressure Sensor SDP3x

                                      • The World's Smallest Differential Pressure Sensor

                                        The SDP3x is the world's smallest differential pressure sensor. It measures just 5 mm x 8 mm x 5 mm, opening up new dimensions of integration and application possibilities. The sensor is based on the next generation of the CMOSens® sensor chip and is the heart of Sensirion's new sensor platform for measuring differential pressure and mass flow.

                                        The SDP3x differential pressure is ideal for the measurement of mass flow in a bypass configuration. The sensor is reflow solderable, provides extended functionality, such as multiple I2C addresses and interrupt functions and a fast sampling time. Like all Sensirion differential pressure sensors, the SDP3x features excellent accuracy and long-term stability and has no zero-point drift. All this makes Sensirion's differential pressure sensor of the SDP3x series the perfect choice for high volume and cost-sensitive applications, where small size is essential.

                                        The digital and fully calibrated and temperature compensated differential pressure sensor are available in different versions. The digital SDP31 sensor and the analog SDP36 sensor measure bi-directional pressure differences up to 500 Pa, while the digital SDP32 and the analog SDP37 measure bi-directional pressure differences up to 125 Pa.

                                        The SDP3x Series

                                        SDP31 - digital version (I2C), pressure range: +/- 500 Pa
                                        SDP32 - digital version (I2C), pressure range: +/- 125 Pa
                                        SDP36 - analog version, pressure range: +/- 500 Pa
                                        SDP37 - analog version, pressure range: +/- 125 Pa

                                        Features
                                        • Smallest size (5mm x 8mm x 5mm), opening up new dimension of integration and applications possibilities
                                        • Measurement range ±500Pa (±2 in. H2O), other ranges available later 2016
                                        • Excellent accuracy and repeatability, even below 1Pa
                                        • No zero-offset, no drift
                                        • Calibrated and temperature compensated
                                        • Fast sampling time of 2kHz at 16 bit resolution
                                        • Digital I2C and analog output versions
                                        • Reflow solderable, shipped in tape and reel for pick and place
                                        • Smart averaging algorithm and other digital and analog features
                                        • Evaluation kit available

                                        Applications
                                        • Medical home care applications
                                        • Portable medical devices
                                        • Smart Inhalers
                                        • Lifestyle and consumer (IoT)
                                        • Appliances
                                        • Drones
                                        • Wind speed meters
                                      • Differential Pressure Sensor SDPC3

                                      • Tiny size, huge track record Sensirion has done it again, and broken through the size barrier in flow sensor technology once more. In a concept study, the sensor manufacturer has shown how small a flow sensor can become without reducing performance. Sensirion has developed the SDPC3 for this purpose. The SDPC3 measures just 3 mm x 3.5 mm x 2.1 mm, and has ultra-low power consumption. This enables countless new possibilities for integration and application, and makes it particularly suitable for small, portable and battery-powered devices.

                                        The SDPC3 differential pressure sensor is suitable for mass flow measurement in a bypass configuration. It is reflow solderable, available on tape and reel and therefore suitable for pick and place. It is fully calibrated, and its temperature compensation has a very fast response time. Like all Sensirion differential pressure sensors, the digital SDPC3 impresses with its outstanding accuracy and long-term stability; it is also free of zero drift. All this makes Sensirion's SDPC3 flow sensor the perfect choice for cost-sensitive applications with very high volumes.

                                        Do you have an idea for a project with the world's smallest flow sensor? Contact us for a non-binding discussion. You will benefit from our more than ten years of experience with very large projects in medical technology and the automotive industry. Sensirion can ramp up production to quantities in the millions within a very short time, and offer you a solution tailored to your project.

                                        Features
                                        • Smallest size (3mm x 3.5mm x 2.1mm), opening up new dimension of integration and applications possibilities (for portable devices)
                                        • Ultra-low power consumption (for battery-powered devices)
                                        • Measurement range ±500Pa (±2 in. H2O)
                                        • Fully calibrated and temperature compensated, digital output (I2C)
                                        • Excellent accuracy and repeatability, even below 1Pa
                                        • No zero-point offset, no drift
                                        • Fast sampling time of up to 2kHz at 16 bit Resolution
                                        • Media compatibility: Air, N2, O2, non-condensing
                                        • Voltage: 1.71V to 3.6V
                                        • Reflow solderable, shipped in tape and reel for pick and place
                                        • Smart averaging algorithm and other digital and features

                                        Applications
                                        • Medical home care applications
                                        • Portable medical devices
                                        • Smart Inhalers
                                        • Lifestyle and consumer (IoT)
                                        • Appliances
                                        • Drones
                                        • Wind speed meters
                                      • Differential Pressure Sensors SDP800 Series

                                      • SDP800 – Proven and Improved

                                        Differential pressure sensors of the SDP800 series are the reliable solution for precise air flow measurement in most demanding but cost-sensitive HVAC applications, such as VAV controllers, burners, heat recovery systems and filter monitoring.

                                        The SDP800 differential pressure sensors are based on the next generation of the CMOSens® sensor chip and consequently utilize the successful features of the SDP600 series. They are the result of more than 15 years of experience in measuring air flow in tens of millions of patients, car engines and HVAC systems. The sensors of the SDP800 series can easily be integrated due to their proven form factor. This next-generation sensor chip offers extended functionality, smart averaging functions and multiple measurement modes. Like all Sensirion differential pressure sensors, those from the SDP800 series are characterized by their outstanding accuracy and long-term stability, together with no zero-point drift.

                                        Features

                                        • No offset, no zero-point drift, hysteresis free
                                        • Outstanding accuracy and long-term stability
                                        • Pressure range of up to ±500 Pa (±2 inch H2O / ±5 mbar)
                                        • Excellent accuracy and repeatability (even below 1 Pa)
                                        • Fully calibrated and temperature compensated (-20° C to +85° C)
                                        • For air and non-aggressive gases
                                        • Suited for standard wave soldering

                                        Applications
                                        • HVAC (heating, ventilation, air conditioning)
                                        • Gas boilers, pellet stoves and fuel cells
                                        • Filter Monitoring
                                        • VAV control
                                        • Heat recovery
                                        • Medical (e.g. respiratory devices)
                                      • Differential Pressure Sensor SDP2000

                                      • For measurements up to 3500 Pa

                                        The SDP2000 differential pressure sensor accurately measures differential pressures up to 3500 Pa (14" H2O) and provides the results on an analog 0 to 4 voltage output. The SDP2000 sensor is suited for demanding applications, for example medical and HVAC systems, where an extra high differential pressure range is needed.

                                        Like all of Sensirion's differential pressure sensors, the fully calibrated and temperature-compensated sensor features excellent long-term stability with high sensitivity at very low differential pressures.

                                        The SDP2000 differential pressure sensor is based on Sensirion’s innovative CMOSens® Technology, which combines the sensor element and processing electronics on a single, small CMOS microchip. CMOSens® differential pressure sensors offer a reliable sensor signal without drift and a high dynamic range.

                                        Features
                                        • Pressure range 3500 Pa (Unidirectional)
                                        • Analog voltage output: 0 to 4 V
                                        • Fully calibrated and temperature compensated
                                        • No offset, zero drift, hysteresis free
                                        • High dynamic range thanks to flow measurement principle
                                        • Not sensitive to the mounting orientation

                                        Applications
                                        • Medical
                                        • Heating, Ventilating, Air Conditioning (HVAC)
                                      • Evaluation Kit EK-P4

                                      • The evaluation kit EK-P4 is designed for an easy and cost-efficient evaluation and qualification of Sensirion's SDP3x differential pressure sensors. Test now the features of the new differential pressure sensor. Especially at lowest pressure differences, the sensor provides highest accuracy and long-term stability.

                                        The evaluation kit consists of a USB stick connected to a PCB on which an SDP3x differential pressure sensor is already attached. The included flow element can be easily affixed to the kit with two screws and then directly connected to the gas flow. Detailed information about the flow element can be found in the application note.

                                        The EK-P4 viewer software, the SDP3x datasheet as well as a quick start guide can be downloaded from this website. The viewer software shows the measured differential pressure using a graph. It allows simple data logging and the export of measurement data in the form of an Excel list. The software is easy to install on a personal computer. No further calibration of the sensor is necessary.

                                        Features
                                        • Fast and reliable evaluation and qualification (for a reduced time-to-market)
                                        • Easy handling, with a Windows PC
                                        • High-performance measurements thanks to SDP3x differential pressure sensor

                                        SDP3x - Characteristics
                                        • Pressure range: -500 to 500 Pa, -/+ 2" H2O
                                        • Accuracy: 0.1 Pa, + 3% of reading
                                        • Calibrated gases: Air, N2
                                      • Evaluation Kit EK-P5

                                      • The EK-P5 evaluation kit provides a straightforward and cost-effective option for testing and evaluating Sensirion's digital differential pressure sensors of the SDP800 series.

                                        The evaluation kit comprises a USB stick that is connected to the SDP810-500Pa differential pressure sensor with an adapter cable. Using the viewer software, the differential pressure sensor can be tested under realistic conditions by following the simple installation steps. There is therefore no need to program a microprocessor, as the evaluation kit is connected directly to a PC. The included software can be used to display measured values on the screen and makes it possible to export the data to an Excel datatype. This enables the data to be saved and processed in a simple manner.

                                        Features

                                        • Fast evaluation (for a reduced time-to-market)
                                        • Easily connected to a PC
                                        • High-performance measurements thanks to SDP810 differential pressure sensor
                                         
                                    • Customized OEM Solutions

                                    • For applications not covered by standard commercial products, Sensirion offers individual OEM solutions and special customized system solutions featuring unbeatable value for money. We aim to always offer refined and economical products that exactly meet your needs. Our many years of experience make this possible. See for yourself.
                                        • Customized (OEM) Mass Flow Meters

                                        • Besides the standard gas flow sensor solutions, Sensirion also offers customized OEM sensor solutions at an attractive price performance ratio. We adapt or develop your customized mass flow meters according to your specific requirements.

                                          Developing your product, we rely on our unique and patented CMOSens® Technology. This technology allows for integrating the highly precise sensor element as well as the electronics for signal processing on one single tiny chip. Correspondingly, gas flow sensor solutions based on CMOSens® set new standards for precision, reliability, functionality and cost effectiveness.

                                          During the development process, you can rely on Sensirion's highly qualified project teams. Thanks to our committed and competent employees you always benefit from fast and effective technical Support.
                                        • Customized OEM Liquid Flow Meters

                                        • Sometimes innovative ideas ask for new solutions and the team of experts at Sensirion is always keen on finding ways to make interesting applications happen through our technology. Customizations are made to fit special requirements, such as resistance to aggressive chemicals, limited space constraints or dedicated low-price and even disposable sensor designs for high-volume applications.

                                          Our cutting-edge sensor technology and a wealth of experience in liquid flow sensing lead to many successful customer projects. Customized sensors are used in a variety of applications, such as medical devices, diagnostic equipment or process control. The essential goal is to understand the requirements of our customers and to skillfully implement the key benefits of our technology to their advantage:

                                          Low Flow Rates
                                          Years of experience and expertise combined with the high sensitivity of our sensors enables flow measurement in extremely low ranges, from nanoliters to milliliters per minute.

                                          High Speed
                                          The MEMS sensor integrated on a CMOS chip permits ultra-fast response times below 50 ms due to its small thermal mass.

                                          Flexibility and Cost-Efficiency
                                          With our advanced technology, Sensirion has the flexibility to address the customer’s requirements in a way that ensures a customized sensor solution which is both high-performance and cost-efficient.

                                          Features
                                          • Flow rates from nl/min up to 120 ml/min
                                          • Media isolated sensing principle - no direct sensor contact with the fluid
                                          • High speed: 50 ms response time and better
                                          • Bio-compatible and high chemical resistance
                                          • Small size micro and nano flow meters
                                          • Ultra high sensitivity (< 0.5 nano liter/min)
                                        • Customized (OEM) Mass Flow Controllers

                                        • Besides the standard gas flow sensor solutions, Sensirion also offers customized OEM sensor solutions at an attractive price performance ratio. We adapt or develop your customized mass flow controllers according to your specific requirements.

                                          Developing your product, we rely on our unique and patented CMOSens® Technology. This technology allows for integrating the highly precise sensor element as well as the electronics for signal processing on one single tiny chip. Correspondingly, gas flow sensor solutions based on CMOSens® set new standards for precision, reliability, functionality and cost effectiveness.

                                          During the development process, you can rely on Sensirion's highly qualified project teams. Thanks to our committed and competent employees you always benefit from fast and effective technical Support.
                                      • Markets

                                      • Sensirion’s sensors are used in a wide range of markets and different applications. In many markets, Sensirion’s years of experience and continuous innovation have made us the market leader. Again and again, Sensirion sets the standard in markets around the world.
                                          • Industrial

                                          • Industrial Market (HVAC, Appliances, Industrial Automation and Gas Meter Industry)

                                            Sensirion is one of the world's leading manufacturer of sensor solutions for heating, ventilation and air conditioning technology (HVAC), appliances, gas meters and industrial automation. Thanks to the many years of use of our established sensor solutions, we help family homes, industrial facilities and entire building complexes to operate energy-efficiently and at the same time increase comfort for a pleasant indoor climate.

                                            We also help manufacturers of household appliances to make their devices more energy-efficient, so that end consumers consume less electricity. For example, by activating the heaters built into the refrigerator to prevent condensation only when condensation is possible.

                                            Our sensor solutions help companies optimize processes and make them as efficient as possible for greater reliability and longevity in industrial automation.

                                            With our innovative gas meter modules, we advance the gas meter industry. For example, our gas meter modules enable real-time billing of gas consumption and offer energy suppliers and end consumers more transparent and better control over natural gas consumption. This reduces gas consumption in the long term and extends the service life of the equipment. >
                                          • Medical

                                          • Medical devices must meet the highest standards in terms of quality and reliability. Doctors, nurses, and patients benefit daily from applications in the field of medical technology that are getting smarter by the day. The use of proven Sensirion sensor solutions contributes to this and offers the possibility of making applications safer, more reliable, and more convenient. Our many years of experience in the field of medical technology make us the preferred experts for leading medical-technology companies.

                                            Applications
                                            • Home Care Devices (Ventilation)
                                            • Critical Care Devices (Ventilation)
                                            • Anesthesia
                                            • Point-of-Care Diagnostic
                                            • Drug Delivery / Infusion
                                            • Catheters
                                            • Smart Inhalers
                                            • Metabolic measurements
                                            • E-Health / M-Health
                                          • Automotive

                                          • Sensirion offers comprehensive sensor solutions for the automotive market with outstanding quality, low prices, and expert support. Using Sensirion’s proven sensor solutions, we help automotive manufacturers meet stringent emission standards in the automotive industry. Our sensors set new standards in terms of comfort, safety, and energy consumption. They ensure that cabin air is always optimally regulated inside the vehicle for the driver by means of air-conditioning or climate-controlled seats. Furthermore, by determining the dew point the vehicle’s air-conditioning can be controlled to eliminate fogging of the windshields and ensure a clear view of the road ahead.

                                            Applications
                                            • Climate Control
                                            • Anti-Fogging
                                            • Climate Seat
                                          • Consumer Electronics

                                          • The Internet of Things (IoT), smart homes, smart phones, wearables - consumer electronics have permeated every aspect of human life. A sector that is constantly looking for new technologies and innovations to solve humankind's everyday problems.

                                            By leveraging our established sensor solutions, we help consumer electronics manufacturers make their applications smarter and create new ones that add significant value to the end user. Our sensors enable a wide range of new applications in the areas of comfort and indoor air quality.

                                            Thanks to our many years of experience in sensor technology and software development, we are the only company to offer holistic solutions for applications in the areas of IoT, consumer electronics and smart homes – from the implementation of the sensors to industrialization support. This makes us a valuable partner who can support you in all matters relating to a more comfortable life at home.