Sensirion
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  • Offer Profile
  • Sensirion is a leading sensor manufacturer, providing relative humidity sensors and flow sensor solutions with unique performance. Together with our capacitive humidity sensor, the product range includes liquid flow sensors, mass flow meters, mass flow controllers and differential pressure sensors. Using our microsensor solutions, OEM customers benefit from the proven CMOSens® Technology and excellent technical support. Best-in-class products, unmatched experience and excellent application support make Sensirion the no.1 Partner. Among a large variety of applications, the flow and humidity sensors are successfully used in the automotive and medical industry.
Product Portfolio
  • Digital Humidity Sensors (RH/T)

  • Sensirion is the world’s leading manufacturer of digital relative humidity sensors. By pioneering digital humidity sensors 15 years ago, Sensirion has defined an industry standard with the SHTxx series. Best-in-class products, unmatched experience, and excellent application support make Sensirion the no. 1 partner for humidity sensing.

    Sensirion’s relative humidity sensors win over customers thanks to their high performance and integration (CMOSens® technology) in a miniature format. The capacitive humidity sensors provide digital and fully calibrated output that allows for easy integration without the need for additional calibration. Their excellent long-term stability is very well perceived and the cutting-edge low energy consumption makes them the right choice for any application.
      • Digital Humidity Sensor SHTW1 (WLCSP)

      • The digital SHTW1 humidity sensor is the result of Sensirion’s pursuit of consistent size reductions in our sensors. This chip-scale package humidity sensor is only one-seventh of the size of a comparable DFN humidity sensor and has a tiny footprint of 1.3 x 0.7 x 0.5mm3. These features open up countless opportunities for the Internet of Things, wearable, and mobile markets.

        The SHTW1 humidity sensor is a digital humidity sensor in a wafer-level chip-scale package (WLCSP). This type of package opens up a new category of ultra-small humidity sensors, which are suitable for applications with the tightest space constraints. The SHTW1 is designed especially for high-volume consumer electronics applications. The sensor is based on Sensirion’s CMOSens® technology, which offers a complete sensor system on a single chip, consisting of a capacitive humidity sensor, a band-gap temperature sensor, analog and digital signal processing, A/D converter, calibration data memory, and a digital communication interface supporting I2C fast mode.

        The humidity sensor covers a humidity measurement range of 0 to 100 %RH and a temperature measurement range of –30°C to 100°C with a typical accuracy of ±3 %RH and ±0.4°C. The operating voltage of 1.8 V and the low power consumption make the SHTW1 humidity sensor suitable for wearable applications running on the tightest power budgets. With the industry-proven quality and reliability of Sensirion’s humidity and temperature sensors and constant accuracy over a large measurement range, the SHTW1 humidity sensor offers an unprecedented price-performance ratio. Tape and reel packaging together with its suitability for standard SMD assembly processes make the SHTW1 predestined for high-volume applications.

        Features
         
        Interface I²C
        Supply voltage 1.8 V
        Power consumption 2µW (at 1 reading per second in low power mode)
        Measuring range (RH) 0 - 100 % relative humidity
        Measuring range (T) -30 to +100°C (-22 to +212°F)
        Response time (RH) 8s (tau63%)
        Package type Wafer-Level-Chip-Scale-Package (WLCSP)
      • Digital Humidity Sensor SHTC1 (RH/T)

      • The SHTC1 is a digital humidity sensor designed especially for high-volume consumer electronics applications. This humidity sensor is strictly designed to overcome conventional limits for size, power consumption, and price-performance ratio, in order to fulfill the current and future requirements of the consumer electronics market.

        Sensirion’s CMOSens® technology offers a complete sensor system on a single chip, consisting of a capacitive humidity sensor, a band-gap temperature sensor, analog and digital signal processing, A/D converter, calibration data memory, and a digital communication interface supporting I2C fast mode. The ultra-small, 2 × 2 × 0.75 mm3 DFN package enables applications to be placed in even the most limited of spaces. The sensor covers a humidity measurement range of 0 to 100 %RH and a temperature measurement range of –30°C to 100°C with a typical accuracy of ±3 %RH and ±0.3°C.

        The operating voltage of 1.8 V and an energy budget below 1 µJ per measurement make the SHTC1 suitable for mobile or wireless applications running on the lowest power budgets. With the industry-proven quality and reliability of Sensirion’s humidity sensors and constant accuracy over a large measurement range, the SHTC1 humidity sensor offers an unprecedented price-performance ratio. Tape and reel packaging together with suitability for standard SMD assembly processes make the SHTC1 predestined for high-volume applications.

        Features
         
        Interface I²C
        Supply voltage 1.8 V
        Power consumption 2µW (at 1 reading per second in low power mode)
        Measuring range (RH) 0 - 100 % relative humidity
        Measuring range (T) -30 to +100°C (-22 to +212°F)
        Response time (RH) 8s (tau63%)
      • Digital Humidity Sensors SHT3x (RH/T)

      • The new digital SHT3x humidity sensor series takes sensor technology to a new level and as the successor of the SHT2x it is destined to become the next industry standard in humidity sensing. The SHT3x humidity sensor series consists of a low-cost version with the SHT30 humidity sensor, a standard version with the SHT31 humidity sensor, and a high-end version with the SHT35 humidity sensor, available in the second quarter of 2016. The SHT3x humidity sensor series combines multiple functions and various interfaces (I2C, analog voltage output) with a user-friendly, very wide operating voltage range (2.4 to 5.5 V). The SHT3x humidity sensor is available in both large and small volumes.

        The SHT3x builds on a completely new and optimized CMOSens® chip, which allows for increased reliability and improved accuracy specifications. The SHT3x offers a range of new features, such as enhanced signal processing, two distinctive and user-selectable I2C addresses, an alert mode with programmable humidity and temperature limits, and communication speeds of up to 1 MHz.

        The DFN package has a footprint of 2.5 × 2.5 mm2 with a height of 0.9 mm. This allows for integration of the SHT3x into a great variety of applications. Additionally, the wide supply voltage range of 2.4 to 5.5 V and variety of available interfaces guarantee compatibility with diverse integration situations. All in all, the SHT3x humidity sensor series incorporates 15 years of knowledge from Sensirion, the leader in the humidity sensor industry.

        Series Version Typ. Humidity
        Accuracy %RH
        Typ.
        Temperature °C
        SHT30 Low-Cost ±3 ±0.3
        SHT31 Standard ±2 ±0.2

        Features
        Size 2.5 x 2.5 x 0.9 mm
        Output I²C, Voltage Out
        Supply voltage range 2.4 to 5.5 V
        Energy consumption 4.8µW (at 2.4 V, low repeatability, 1 measurement / s)
        RH operating range 0 - 100% RH
        T operating range -40 to +125°C (-40 to +257°F)
        RH response time 8 sec (tau63%)
      • Digital Humidity Sensor SHT2x (RH/T)

      • The digital SHT2x humidity sensor series is used in high volumes in a wide variety of applications and has today become the de facto industry standard. The SHT2x series consists of a low-cost version with the SHT20 humidity sensor, a standard version with the SHT21 humidity sensor, and a high-end version with the SHT25 humidity sensor. The open cavity mold package - which encapsulates the complete chip except for the humidity sensor area - protects the capacitive humidity sensor against external impact and facilitates excellent long-term stability. The SHT2x sensors are available both in large and small volumes.

        Embedded in a reflow solderable dual-flat no-leads (DFN) package of 3 × 3 × 1.1 mm3, the SHT2x provides calibrated, linearized sensor signals in digital, I2C format. The SHT2x humidity sensor series contains a capacitive-type humidity sensor, a band-gap temperature sensor, and specialized analog and digital integrated circuits – all on a single CMOSens® chip. This yields superior sensor performance in terms of accuracy and stability as well as minimal power consumption.

        Every sensor is individually calibrated and tested. Lot identification is printed on the sensor and an electronic identification code is stored on the chip – which can be read out on command. Furthermore, the resolution of the SHT2x humidity sensor can be changed on command (8/12 bit up to 12/14 bit for RH/T) and a checksum helps to improve communication reliability. With this set of features and its proven reliability and long-term stability, the SHT2x humidity sensor series offers an outstanding price-performance ratio. To test a humidity sensor from the SHT2x series, two evaluation kits, EK-H4 and EK-H5, are available.

        Series Version Typ. Humidity
        Accuracy %RH
        Typ.
        Temperature °C
        SHT20 Low-Cost ±3 ±0.3
        SHT21 Standard ±2 ±0.3
        SHT25 High-End ±1.8 ±0.2

        Features

        Size 3 x 3 x 1.1 mm
        Output I²C digital, PWM, SDM
        Supply voltage range 2.1 to 3.6 V
        Energy consumption 3.2µW (at 8 bit, 1 measurement / s)
        RH operating range 0 - 100% RH
        T operating range -40 to +125°C (-40 to +257°F)
        RH response time 8 sec (tau63%)
         
      • Digital Humidity Sensor SHT1x (RH/T)

      • The SHT1x digital humidity sensor is a reflow solderable sensor. The SHT1x series consists of a low-cost version with the SHT10 humidity sensor, a standard version with the SHT11 humidity sensor, and a high-end version with the SHT15 humidity sensor. As with every other Sensirion sensor type from the SHTxx humidity sensor family, they are fully calibrated and provide a digital output.

        The SHT1x humidity sensor series (including SHT10, SHT11, and SHT15) is Sensirion’s family of surface-mountable relative humidity sensors. The humidity sensors integrate sensor elements plus signal processing on a tiny footprint and provide a fully calibrated digital output. A unique capacitive sensor element is used for measuring relative humidity, while temperature is measured by a band-gap sensor. Its CMOSens® technology guarantees excellent reliability and long-term stability. The humidity sensors are seamlessly coupled to a 14-bit-analog-to-digital converter and a serial interface circuit. This results in superior signal quality, a fast response time, and insensitivity to external disturbances (EMC).

        Each SHT1x humidity sensor is individually calibrated in a precision humidity chamber. The calibration coefficients are programmed into an OTP memory on the chip. These coefficients are used to internally calibrate the signals from the sensors. The two-wire serial interface and internal voltage regulation allows for easy and fast system integration. SHT1x is supplied in a surface-mountable LCC (leadless chip carrier), which is approved for standard reflow soldering processes. The same sensor is also available with pins (SHT7x).

        Series Version Typ. Humidity
        Accuracy %RH
        Typ.
        Temperature °C
        SHT10 Low-Cost ±4.5 ±0.5
        SHT11 Standard ±3 ±0.4
        SHT15 High-End ±2 ±0.3

        Features

        Size 7.5 x 4.9 x 2.6 mm
        Output digital (2-wire Interface)
        Supply voltage range 2.4 to 5.5 V
        Energy consumption 80µW (at 12bit, 3V, 1 measurements/ s)
        RH operating range 0 - 100% RH
        T operating range -40 to +125°C (-40 to +257°F)
        RH response time 8 sec (tau63%)
         
      • Digital Humidity Sensor SHT7x (RH/T)

      • A digital pin-type relative humidity sensor for easy replaceability in a wide range of applications. The series consists of a standard version, SHT71, which convinces with its attractive price-performance ratio, and a high-end version, SHT75.

        A unique capacitive sensor element is used for measuring relative humidity, while temperature is measured by a band-gap sensor. The sensors integrate sensor elements and signal processing in compact format and provide a fully calibrated digital output. This results in the SHT7x humidity sensor’s easy replaceability, so that individual calibration is no longer necessary. The unique design of the SHT7x allows for the best possible thermal coupling to the environment and decoupling from potential heat sources on the main board. In combination with the individual precision calibration, the on-chip calibration memory, and the digital two-wire interface, this guarantees the best possible sensor performance in demanding applications with easy and fast system integration.

        The easy replaceability and low power consumption make the SHT7x humidity sensor series the ultimate choice for even the most demanding applications. The SHT7x humidity sensor series is supplied on FR4 with pins and is designed for the best possible performance. The same sensor is also available as an SMD package (SHT1x).

        Series Version Typ. Humidity
        Accuracy %RH
        Typ.
        Temperature °C
        SHT71 Standard ±3 ±0.4
        SHT75 High-End ±1.8 ±0.3

        Features
         
        Size 19.5 x 5.08 x 3.1 mm
        Output digital (2-wire Interface)
        Supply voltage range 2.4 to 5.5 V
        Energy consumption 80µW (at 12bit, 3V, 1 measurements/ s)
        RH operating range 0 - 100% relative humidity
        T operating range -40 to +125°C (-40 to +257°F)
        RH response time 8 sec (tau63%)
      • SF2 Filter Cap for SHT2x and SHT3x Humidity Sensors

      • Easily mountable solution to protect SHT2x and SHT3x humidity sensors. The SF2 filter cap protects against water, dust, soot, particles and other contaminants. It consists of a single piece of PBT and an integrated water vapor-permeable filter membrane.

        The cavity inside the cap is designed so that the dead volume between membrane and sensor is negligible; hence the impact on response time for humidity measurements is reduced to a minimum. The cap is available in black with a black filter membrane. The cap is made of a single piece of polybutylene terephthalate (PBT) with a filter membrane welded on. The cap is designed to be mounted after soldering by clipping the four pins on to the PCB. Together with the sensor, it provides a compact entity that can serve as an adaptor to the device housing. With the addition of adhesive for sealing to the PCB and use of an o-ring, it provides a waterproof mounting solution.

        Features
         
        Filtration Efficiency 99.99% of all particles > 0.1µm
        Protection class IP67

        Easily mountable after reflow soldering

      • Filter Cap SF1 for SHT1x Humidity and Temperature Sensors

      • Easily mountable solution to protect SHT1x humidity sensors. The SF1 filter cap protects Sensirion’s humidity sensors SHT10, SHT11 and SHT15 against water, dust, soot, particles and other contaminants. It consists of a plastic housing with a water vapor-permeable filter membrane.

        The cavity inside the filter cap is designed so that the volume between membrane and sensor is negligible; hence the impact on response time for humidity measurements is reduced to a minimum. The cap is available in white and is made of a single piece of polypropylene (PP) and a filter membrane welded to the single piece. The filter cap is designed to be mounted after soldering by clipping the two pins on to the PCB and welding them from the back. Together with the sensor, it provides a compact entity that can serve as an adaptor to the device housing. With the addition of adhesive for sealing to the PCB and use of an o-ring, it provides a waterproof mounting solution.

        Features

        Filtration Efficiency 99.99% of all 0.1µm particles
        RH response time of SHT1x 30 sec (tau63%) in slow moving air

        Easily mountable after reflow soldering
      • Evaluation Kits For Sensirion's Humidity Sensors

      • Our evaluation kits enable easy testing of our humidity and temperature sensors. We offer four different types of evaluation kit:

        • Evaluation Kit EK-H4 for SHT21, SHT31 and SHT71 on PCB:
        Easy-to-use plug-and-play system, read out data for four SHTxx humidity sensors simultaneously, connects to PC via USB.

        • Evaluation Kit EK-H4 Flex for SHTC1, SHTW1 and SHT3x on PCB:
        Same functionality as EK-H4 plus sensor samples on flex PCB for easy integration of sensors into limited spaces.

        • Evaluation Kit EK-H5 for SHT21 on PCB and SHT31 on PCB and flex:
        Very simple system (USB stick, single sensor cable and connector) enables fast and easy testing and sensor data read out and display on PC with minimal effort

        • Evaluation Kit EK-H5 for SHTC1, SHTW1 and STSC1:
        Same functionality as EK-H5, but designed for evaluation of 1.8V sensors.
    • High-Accuracy Digital Temperature Sensors

    • The high-accuracy digital temperature sensors are based on Sensirion’s CMOSens® technology, which combines the strengths of standard CMOS production processes and advanced MEMS technology on a single silicon chip. The working principle behind all STSxx temperature sensors is a silicon bandgap thermometer.

      Due to different requirements regarding power consumption and space, Sensirion is offering three types of high-accuracy temperature sensors. The universal STS3x temperature sensor has a wide supply voltage range of 2.4 to 5.5 V. Combined with its outstanding performance as well as high accuracy of ±0.3°C, it is ideally suited for integration into a wide variety of applications. The STSC1 temperature sensor focuses on consumer electronics applications that require very low power consumption and a tiny size. With compact dimensions of just 2 mm × 2 mm × 0.8 mm, low power consumption, and supply voltage of 1.8 V, it clearly fulfills industry requirements. The STS2x temperature sensor comes in a 3 mm × 3 mm × 1.1 mm package and operates at 2.1 to 3.6 V. It offers a typical temperature accuracy of ±0.3°C.

      The STSxx temperature sensors deliver high-accuracy, fully calibrated and processed digital temperature information. They come into play whenever there is a need for digital temperature information at low power consumption. In addition, the STS3x series has a built-in alert, which allows the sensor to be used as a watchdog.
        • High-Accuracy Digital Temperature Sensor STS3x

        • The STS3x is Sensirion’s newest high-accuracy digital temperature sensor series. The STS3x temperature sensor utilizes the industry-proven CMOSens® technology and wins over users with its increased intelligence, reliability, and improved accuracy specifications.

          The functionality of Sensirion’s new STS3x temperature sensor includes enhanced signal processing, two distinctive and user-selectable I2C addresses, and communication speeds of up to 1 MHz. The dual-flat no-leads (DFN) package has a footprint of 2.5 × 2.5 mm2 while retaining a height of 0.9 mm. This allows for easy integration of the STS3x series into various applications. Additionally, the wide supply voltage range of 2.4 to 5.5 V and low current consumption (2 µA typical average current at 1 measurement per second) guarantees compatibility with a wide range of applications.

          The STS3x temperature sensor gives a fully calibrated, linearized, and supply-voltage-compensated digital output and has an outstanding accuracy of +/–0.3°C (typical). There are two versions available: the standard version, STS31, guarantees an accuracy of ±0.3°C over a temperature range of –40°C to 90°C, while the low-cost version, STS30, has an accuracy range of 0°C to 65°C. Thanks to Sensirion’s CMOSens® technology, the STS3x temperature sensor is designed for mass production, comes with a high signal-to-noise ratio and high process capability, and is proven to be highly reliable and stable over the long term.

          An automotive version of the STS3x temperature sensor is also available.

          Features
           
          Output I²C
          Energy consumption 6.6µW (at 3.3 V, low repeatability, 1 measurement / s)
          T operating range -40 to +125°C (-40 to +257°F)
          T response time 2 sec (tau63%)
          Typical accuracy ±0.3 °C
        • STSC1 - High Accuracy Digital Temperature Sensor

        • The STSC1 is proving once again that high measurement accuracy can be combined with an extremely attractive price-performance ratio. The latest generation of temperature sensors features high accuracy, low power consumption and minimal size.

          The STSC1 focuses on applications that require very precise temperature measurement. It is suitable for consumer electronics, Internet of Things and smart home applications, as well as for data loggers and thermostats. With compact dimensions of just 2.0 x 2.0 x 0.7mm, low power consumption and supply voltage of 1.8 volts, it clearly fulfills industry requirements. In addition to its easy handling, the STSC1 provides a fully calibrated and linearized digital signal to a microcontroller.

          Its good genes are also apparent in its application: the STSC1 measures temperatures from -40 °C to 125 °C with a typical accuracy of +/- 0.3 °C. The fully calibrated sensor features an I²C interface and is reflow-solderable. It is suitable for standardized industrial series production of electronic devices and can be successfully integrated into complex applications.

          Features

          Output I²C
          Supply voltage 1.8 V
          Power consumption 2µW (at 1 reading per second in low power mode)
          Measuring range (T) -40 to +125°C (-40 to +257°F)
          Response time (T) 8s (tau63%)
        • STS21 - High Accuracy Digital Temperature Sensor

        • A 3x3mm, fully calibrated digital temperature sensor with impressive performance.

          Based on the same chip as the successful and industry proven SHT2x family of humidity and temperature sensors, the STS21 offers the same superior performance and space saving 3x3mm footprint. The temperature sensor features a different I²C address than the SHT2x and is pin compatible. Therefore it is custom-made for solutions in which temperature measurement is a prerequisite and humidity measurement is optional, as the same hardware can be used for both options. The outstanding accuracy and low power consumption paired with a competitive price make the STS21 an ideal solution for applications with high demands on both performance and economy.

          Features

          Output I²C
          Energy consumption 8.6µW (at 11bit, 1 measurement / s)
          T operating range -40 to +125°C (-40 to +257°F)
          T response time 5 sec (tau63%)
      • Liquid Flow Meters

      • Sensirion's liquid flow sensors establish new standards wherever low liquid flow monitoring, liquid handling and liquid dosing are important. Our unique CMOSens® Technology allows to measure the liquid flow even through the wall of the flow channel in milliliters, microliters or even nanoliters per minute. Applications in fields like medical devices, diagnostics and process technology benefit daily from our solutions.
          • SLx Series

              • SLI-Flow Meters for Life Science and Automation

              • Tailored to the integration in demanding flow control systems: The SLI flow meter series is a high precision solution for low flow rates of liquids based on water or hydrocarbons (alcohols, solvents, oil, fuel, adhesives).

                Based on Sensirion's well-proven thermal microsensor technology, it opens new perspectives in terms of sensitivity, reliability and speed. The short response time and high precision of the SLI Flow Meters allows the accurate monitoring of highly dynamic processes such as fast dosing operations. This reliable device works without any moving parts, measuring non-invasively through the wall of a straight flow path. Ultimate media compatibility of all wetted parts is ensured by the exclusive use of highly inert and bio-compatible materials (glass, PEEK, Teflon).

                A smart digital interface and robust RS485 communication is offered for long distance and bus capability. With this, the total dispensed volume can be determined automatically. The actual dispensed volume is available at any time.

                Features
                • 3 flow ranges available, from microliters to milliliters
                • For flow rates of water based liquids: up to 5 ml/min
                • For flow rates of hydrocarbons: up to 80 ml/min
                • Precision better than 1% of the measured value
                • Highest sensitivity down to <1 ul/min
                • Fast response time down to 30 ms
                • Smart RS485 digital interface
                • No moving parts, straight flow path, Superb media compatibility
                • Wetted materials glass, PEEK and Teflon only (inert, bio-compatible)
                • Maximum working pressure up to 50 bar depending on flow range


                Applications
                • General process monitoring
                • Pump control
                • Monitoring of fuel flow
                • Lubricants dosage monitoring
                • Monitoring of spray coating
                • Leakage detection
              • Compact Liquid Flow Meter SLS-1500

              • Featuring Sensirion’s innovative sensor technology in a robust housing, the SLS-1500 offers a versatile sensing solution for applications in demanding industrial environments and laboratory settings. Sensirion’s modular approach to combining sensor and interface cable ensures an optimal match, which means the integration of a flow sensor has never been easier.

                Capable of fast and precise measurements for flow rates of 0 ml to 40 ml/min, the SLS-1500 enables closer process monitoring than ever before. With a typical response time of 20 ms, it measures highly dynamic dispensing processes quickly and reliably. The flow channel inside the sensor is completely straight, open and has no moving parts. Inert, wetted materials provide outstanding chemical resistance and excellent biocompatibility.

                The SLS-1500 is compatible with SCC1 interface cables, offering USB, RS485 or analog voltage output connections. The most recent addition to Sensirion’s range of liquid flow sensors is a compact, cost-effective and precise sensor that is ready for immediate use.

                Features
                • RS485, USB or analog voltage output connections
                • Fast response time of 20 ms
                • Flow rates of 0-40 ml/min
                • No moving parts
                • Completely calibrated, digital linear output signal
                • Compact Size
                • Wetted materials: Stainless steel, PTFE und PEEK

                Applications
                • Diagnostics
                • Analytical instruments
                • Biomedical devices
                • Fuel cells
                • Industrial automation
              • Versatile Flow Meter for Flow Ranges of up to 120 ml/min

              • The SLQ-QT500 features a flow range up to 120 ml/min for water-based liquids as well as hydrocarbon based liquids. It is ideal for the integration into demanding coating systems in the semicon industry as well as for a wide array of dosing and flow applications in other industries.

                Based on Sensirion's proven thermal microsensor technology, it opens new perspectives in terms of sensitivity, reliability and speed. The wetted parts are just the PFA fittings and the quartz glass tube. The whole fluidic path is straight and there are no obstacles or moving parts in the sensor. The SLQ-QT500 is ideally suited for liquids with virtually any viscosity as well as liquids which contain small particles as long as they are not abrasive for the quartz glass tube.

                A smart digital interface and robust RS485 communication is offered for long distance and bus capabilities. The unsurpassed sensitivity and measuring speed offer new possibilities for the monitoring or control of fast dosing operations. The instantaneous flow rate of the fluid is available as well the output of a total dosed volume with automatic dosing detection. The sensor is available with calibration for H2O and isopropanol (IPA).

                Features
                • For flow rates up to 120 ml/min (hydrocarbons and water based liquids)
                • Fast response time down to 30 ms
                • For high and low viscosity liquids
                • For liquids with small particles
                • RS485 digital interface
                • Straight flow path, no moving parts
                • Assured purity
                • Highest sensitivity down to the lowest flow rates
                • Superb chemical resistance, inert materials
                • Wetted materials: PFA and quartz glass only
                • Maximum working pressure 10 bar

                Applications
                • High-end semiconductor process control
                • Industrial automation
                • Fast dosing operations
              • Flow Meter SLQ-QT105 for Semiconductor Applications

              • Tailored to the integration in demanding coating systems, the SLQ-QT105 is a semicon grade-sensor solution for flow rates below 120 ml/min of hydrocarbon based liquids like photoresists and solvents.

                Based on Sensirion's proven thermal microsensor technology, it opens new perspectives in terms of sensitivity, reliability and speed. The short response time of the SLQ-QT105 allows the accurate monitoring of highly dynamic processes such as fast dosing operations. Equipped with fittings for 4x3mm PFA tubing, this reliable device works without any moving parts measuring non-invasively through the wall of a straight flow path. A smart digital interface and robust RS485 communication is offered for long distance and bus capability.

                Features
                • For flow rates up to 120 ml/min (hydrocarbons)
                • Highest sensitivity down to the lowest flow rates
                • Fast response time down to 30 ms
                • RS485 digital interface
                • For photoresists and solvents
                • Straight flow path, no moving parts
                • Assured purity
                • Superb chemical resistance, inert materials
                • Wetted materials: PCTFE, PFA and quartz glass only
                • Maximum working pressure 3 bar (high pressure ratings available on request)

                Applications
                • High-end semiconductor process control
                • Fast dosing operations
              • SLG Flow Meters for UHPLC and Ultra-Low Flow Rates

              • The SLG liquid flow meters for ultra-low flow rates are the perfect solution for dynamic liquid flow monitoring in cutting edge UHPLC applications.

                Through the wall of the fused silica flow channel a highly sensitive CMOSens® microchip detects the mass flow. The flow channel withstands pressures up to 1200 bar / 17500 psi. At the same time the response time for measurements is 40 ms only. These properties mean that the high-end devices of the SLG series are especially suited for monitoring dynamic flow rates in cutting-edge chromatography systems. Great repeatability for analyses - the most important criterion in HPLC and microfluidic systems - is ensured. The maximum flow rate of the SLG-0075 is 5 µl/min in precision mode and 20 µl/min in extended mode. The SLG-0025 provides reliable liquid flow measurement down to 70 nl/min and below.

                Features
                • Max. flow rate [µl/min]: 5.0/20
                • Ultra low flow detection with 0.5 nl/min resolution
                • Response time: 40ms
                • Repeatability better than 0.6% of the measured value
                • Media isolated, ultra high pressure resistance
                • Flow path made of fused silica; PEEK sealing
                • Stainless steel fittings for 1/16" OD tubing
                • Calibrated bus interface; RS485, 0-10 V analog Output or I2C

                Applications
                • Ultra High Pressure Liquid Chromatography, LC/MS
                • Analytical instruments & life sciences
                • Sample preparation
                • Leakage testing
            • Lx Series

                • OEM Liquid Flow Meter LG16

                • Sensirion manufactures CMOSens® microsensors in high volumes. Liquid flow sensing solutions for flow rates below 80 ml/min down to the microfluidic sector and sub nano litre resolutions are Sensirion's unique strength.

                  For orders starting at 100 pieces per year, we produce the liquid flow sensor you choose out of a selection OEM-standard designs:

                  The LG16 series offers calibrated, digital liquid flow sensing performance. The pressure resistant, non invasive sensors offer small sized, highly efficient solutions to measure all flow rates below 80 ml/min. Due to the extremely short response time the sensors allow for monitoring of highly dynamic effects and bubble detection.

                  Features
                  • LG16 for flow rates from nl/min up to 5 ml/min
                  • Totally non-invasive sensing principle
                  • Resolutions down to the sub nl-range
                  • High speed: 40 ms response time
                  • Digital I²C interface or analog output 0...5V
                  • Supply voltage range 5 V-12 V or 3.3 V-12 V
                  • Flow channel made of glass (borosilicate or fused silica)
                  • Bio compatible, high chemical resistance

                  Applications
                  • Medical applications
                  • Point of care diagnostic devices
                  • Vapourizers
                  • Environmental testing units
                  • Fuel cell systems
                • Flow Switch and Bubble Detector LG01 for Liquids

                • The LG01 Flow Switch sensor detects ultra-low liquid flow rates or the presence of air in fluidic systems and therefore makes them more reliable.

                  The detection of liquid flows is possible within the range of a few ml/min and less. The sensor's output signal of either 0 or 5 volts indicates whether the current flow rate is above or below the specified flow switch level. At flow rates above this limit the identification of air bubbles within the flow channel is equally consistent (leak detection). The non-invasive measurement principle of the liquid flow sensor LG01 allows detecting the current state of fluid through the wall of the internal glass capillary. Thus, the sensor provides highest bio-compatibility and chemical resistance. Measurements of the liquid flow detector are performed with a response time of less than 100ms.

                  Features
                  • Maximum flow rate up to 220 ml/min (valid for H2O)
                  • Standard Switch Limit at 4.5 ml/min or 0.25 ml/min (valid for H2O)
                  • Air-/bubble detection enabled (leak detection)
                  • Fluid connections: 1/4-28 standard fittings for OD 1/8" (3.2 mm) or 1/16" (1.6 mm) plastic tubing
                  • Fast response below 100 ms
                  • Wetted materials: inert, bio-compatible (glass, PEEKTM, Teflon®)
                  • Supply voltage of 5....12V

                  Applications
                  • Biomedical devices
                  • Fuel supply monitoring
                  • Lab automation
                  • Production Equipment
                • Chemically-resistant Liquid Flow Meter LS32-1500

                • Sensirion is now offering the compact, chemically-resistant liquid flow meter LS32-1500 for low flow rates in the 0-40 ml/min range.

                  With a compact size of just 18x18x59 mm, the LS32-1500 liquid flow meter is mechanically extremely robust. Its fast response time of 20 ms, excellent repeatability and outstanding chemical resistance makes the sensor ideal for use in biomedical applications. The sensor is highly versatile and suitable for use in fuel cells, for example, as well as a wide range of applications in dosage control and industrial automation monitoring.

                  The use of high-performance stainless steel, PTFE and PEEK ensures outstanding bio-compatibility and exceptional chemical resistance. Customized solutions (e.g. a downmount version for manifolds) based on the LS32-series are also possible.

                  The LS32-1500 liquid flow meter offers a cost-effective, compact and reliable solution for the measurement of low flow rates and is an excellent addition to the range of high quality products from Sensirion AG.

                  Features
                  • Fast response time of 20 ms
                  • Flow rates of 0-40 ml/min
                  • No moving parts
                  • Completely calibrated, digital linear output signal
                  • Compact Size
                  • Wetted materials: Stainless steel, PTFE und PEEK

                  Applications
                  • Diagnostics
                  • Analytical instruments
                  • Biomedical devices
                  • Fuel cells
                  • Industrial automation
              • LPG10 / LD20 Series

                  • OEM Liquid Flow Meter LPG10

                  • For applications with strict space limiations or for very high order volumes, Sensirion now offers the incredibly small planar package Flow Meter LPG10. On a footprint of just 10x10mm, it offers a smart sensor solution for flow rates below 1 ml/min down to the low microliter per minute range.

                    The LPG10 offers a calibrated, digital liquid flow sensing performance. Unique CMOSens® planar packaging technology allows low fabrication costs by enabling non-invasive measurement of liquid flow inside a cost-effective planar substrate. The digital microsensor chip provides the full signal processing functionality for a fully calibrated, temperature compensated digital output. The fluidic ports are designed for integration into manifolds.

                    Features
                    • Incredibly small foot print of 10mm x 10mm
                    • High speed: 30 ms response time and better
                    • Flow rates up to 1ml/min
                    • Completely calibrated, digital linear output signal
                    • Excellent bio-compatibility, chemically-resistant
                    • Media isolated sensing principle - no direct sensor contact with the fluid
                    • Supply voltage 3.3V - 3.6V
                    • Digital I²C interface
                  • LD20 Disposable Liquid Flow Sensors for Biomedical Applications

                  • Safe, precise, and reliable measurement of low flow rates in medical environment has never been so easy: The disposable liquid flow sensors in the LD20 series measure the liquid flow rate directly and at the point of interest for more effective patient treatment and improved safety.

                    The CMOSens® based flow sensors in the LD20-series optimize costs by reducing the flow sensor to its bare minimum while still ensuring easy fluidic, electrical and mechanical connections. Standard luer lock fittings guarantee secure and straight-forward integration into the fluidic line: for example, into a catheter or an infusion set. Medical-grade wetted materials provide outstanding chemical resistance and excellent biocompatibility. By providing a bidirectional measurement of the flow rate from 1200 ml/h down to just single-digit ml/h, the sensor reliably detects common failure modes such as occlusion, free flow, or leaks in the tubing connection with unprecedented speed and sensitivity. Drug delivery from an infusion set, an infusion pump or other medical devices can be measured precisely and in real time. Treatments will become more effective, as they become easier to monitor and control. The LD20 liquid flow sensor series enables medical device manufacturers to enhance the safety, performance, and reliability of their products for the benefit of patients and care givers.

                    Features
                    • Low flow rates: 0-20 ml/min (0-1200 ml/h) bi-directionally
                    • High speed measurement: Response time < 50 ms
                    • Media isolation: No contact or contamination with valuable medications
                    • Low power consumption: Suitable for battery-powered applications
                    • Highly integrated: Fully calibrated digital signal from a single chip
                    • Highly scalable design: Competitive pricing even for disposable units
                • Liquid Flow Meter Kit

                      • Liquid Flow Meter Kit

                      • In order to conduct initial measurements quickly and easily, individual liquid flow meters with two different interface cables are delivered in the Sensirion Flow Meter Kit.

                        Along with the flow meter, the kit contains everything necessary to get initial results within 10 to 15 minutes. Special Windows Viewer software displays time data for the flow on screen and allows export to a data file, which in turn enables further data analysis with Excel. Even highly dynamic dosing processes can be measured and recorded.

                        Contents
                        • Choice of flow meter SLI, SLG, SLS or digital SLQ-QT
                        • Calibration certificate and documentation
                        • SSC1-USB: USB cable for plug and play connection to PC
                        • SSC1-Analog: Analog cable 0...10V with added functionality
                        • Fluid connection material depending on sensor type
                        • MS Windows software (XP, Vista, 7) on USB flash drive
                         
                  • Mass Flow Meters for Gases

                  • With our long history of designing mass flow solutions for medical and industrial automation, Sensirion is your ideal partner to support you in the development of new products. Our mass flow meters ensure fast, accurate and economical measurements of gas flow over a wide dynamic range. They are extremly reliable and long-term stable and are free from zero-point drift.

                    At the heart of every mass flow sensor is a MEMS based calorimetric microsensor, which measures the gas flow using the thermal measurement principle. The sensor element is integrated with the complete signal conditioning electronics on one single chip. This unique integrated technological approach - provided by the unparalleled and innovative CMOSens® Technology - results in excellent performance at a very attractive cost.
                      • Low-Pressure-Drop Flow Meter SFM3000

                      • The SFM3000 is a digital flow meter especially suitable for high-volume applications. The design of the flow channel results in very low pressure drop through the sensor element, making it highly suitable for medical ventilation and respiration applications.

                        The SFM3000 bidirectionally measures the flow of air and other non-aggressive gases at rates up to 200slm with excellent accuracy and extremely high speed. It outputs a 14-bit digital signal at a 2kHz update rate. The signal is internally linearized and temperature compensated. Furthermore, the SFM3000 flow meter operates from a 5 Vdc supply voltage and features a digital 2-wire interface, making it easy to connect directly to a microcontroller.

                        The outstanding performance of the SFM3000 sensor is based on Sensirion's patented CMOSens® Technology, which combines the sensor element, signal processing and digital calibration on a tiny microchip. The gas is measured by a thermal sensor element to provide an extended dynamic range and enhanced long-term stability compared to other flow measuring technologies. Thanks to this proven CMOSens® Technology, the flow meter is perfectly suited for high-quality mass production and is the ideal choice for demanding and cost-sensitive OEM applications.

                        Features
                        • Very low pressure drop < 6mbar @ 200sml
                        • Flow range: +/-200slm (bidirectional)
                        • Accuracy 1.5% m.v.
                        • Ultra fast response time
                        • Digitally calibrated & temperature compensated
                        • Digital Output (I²C)

                        Applications
                        • Ventilation, anaesthesia, inhalers and other medical instruments
                        • Process automation
                        • Burner control
                        • Fuell cell control
                        • Spectroscopy
                        • Environment monitoring
                        • Laboratory
                      • Mass Flow Meter SFM3100 for Artificial Respiration Applications

                      • The analog mass flow meter SFM3100 is highly accurate and fast. The SFM3100 has a compact design and can be easily integrated into existing devices. There is a temperature sensor in the gas channel of the flow meter. This enables highly precise temperature compensation and obviates the need to integrate a dedicated temperature sensor.

                        The SFM3100 measures flow ranges between -24 and +240 slm. It can also detect negative flow ranges, thereby recognizing errors or impeded flows in a reliable manner. At the same time, multiple gases are compensated with great precision. The flow rates and signal characteristics can be customized to meet customer-specific requirements.

                        Like all Sensirion sensors, the analog mass flow sensor is based on the patented CMOSens® Technology, which combines the sensor and analysis electronics on a single microchip. The result is a highly stable and precise system for demanding and cost-sensitive applications. The SFM3100 is particularly suitable for inspiration applications as well as for mixing oxygen and air to a very precise degree.

                        Features
                        • Flow range: -24 to +240 slm
                        • Accuracy 5% m.v. (typ.)
                        • Ultra-fast response time
                        • Low pressure drop < 16mbar @ 200slm (typ.)
                        • Temperature sensor integrated
                        • Compact design, easy integration
                        • Gas compensation
                        • Detection of errors and impeded flows
                        • Customized flow rates and signal characteristics
                        • Analog output
                        • Fully calibrated and temperature compensated

                        Applications
                        • Ventilation (Inspiratory)
                        • Gas Mixture
                        • Inhalers
                      • Mass Flow Meter SFM3200 for a Superior Performance at Low Flows

                      • The SFM3200 mass flow meter is characterized by its wide dynamic measurement range of up to 250 slm, as well as its measurement accuracy at low flows.

                        The special design of the flow channel results in a very low pressure drop through the flow body of the sensor, which makes it extremely suitable for medical ventilation and other respiratory applications. The thermal sensor element assures very fast signal processing time and bidirectional measurement mode, with the signal being internally linearized and temperature compensated.

                        The outstanding performance of the SFM3200 sensor is based on Sensirion's patented CMOSens® Technology. The technology allows the integration of the sensor element and the analysis electronics on a single, tiny CMOS silicon chip. The result is a highly stable and precise system for demanding and cost-sensitive applications.

                        Features
                        • Flow range: up to 250 slm (bidirectional measurement mode)
                        • Superior performance at very low flows
                        • Low pressure drop
                        • High robustness and reliability at variable inlet conditions
                        • Very fast signal processing time
                        • Signal internally linearized and temperature compensated

                        Applications
                        • Inspiratory flow measurement
                        • Respiratory measurements
                        • Ventilation
                        • Anesthesia
                        • Drug delivery
                      • Autoclavable SFM3200-AW Mass Flow Meter for Expiratory Measurements

                      • The SFM3200-AW mass flow meter is able to withstand autoclave procedures, making it autoclavable, cleanable and therefore reusable.

                        Due to the special design of its flow channel, the pressure drop through the sensor element is very low. Thus, the sensor is the perfect choice for expiratory flow measurements in medical applications. It measures flow rates highly accurate and performs superiorly not only at low flows, but also at rates up to 250 slm. Furthermore, the SFM3200-AW features a very fast signal processing time and superior robustness.

                        The SFM3200-AW sensor is, as are all Sensirion sensors, based on the patented CMOSens® Technology. The technology combines the sensor element and the analysis electronics on a single microchip. Thus, the CMOSens® gas flow sensor measures long-term stable and noise free and a very fast and highly precise sensor signal results.

                        Features
                        • Autoclavable and cleanable
                        • Flow rates: -100 to +250 slm (bidirectional)
                        • Superior performance at low flows
                        • Very low pressure drop
                        • Very fast signal processing time and superior robustness
                        • Medical cones for pneumatic connection to standard breathing circuits
                        • Mechanical interface for electrical reconnection

                        Applications
                        • Expiratory flow measurements
                        • Respiratory measurements
                        • Ventilation
                        • Anesthesia
                        • Metabolic measurements
                      • Autoclavable SFM3300-AW Mass Flow Meter for Proximal Measurements

                      • The SFM3300-AW mass flow meter is able to withstand autoclave procedures, making it autoclavable, cleanable and therefore reusable.

                        The sensor can be used completely bidirectional und measures flow rates up to 250 slm in both directions. Thus, the SFM3300-AW is highly suited to proximal flow measurements in medical ventilation and other respiratory applications. The special design of the flow channel results in a small dead space and the slightly higher pressure drop leads to a lower dependency on different inlet conditions.

                        Like all Sensirion sensors, the outstanding performance of the SFM3300-AW is based on the innovative CMOSens® Technology, which combines the sensor element and the analysis electronics on a single CMOS microchip. Thus, the CMOSens® gas flow sensor measures long-term stable and noise-free and a very fast and highly precise sensor signal results.

                        Features
                        • Autoclavable and cleanable
                        • Flow rates: ±250 slm (bidirectional)
                        • Small dead space: < 10 ml
                        • Lower dependency on different inlet conditions
                        • Very fast update time (0.5 ms)
                        • Very fast signal processing time and superior robustness
                        • Medical cones for pneumatic connection to standard breathing circuits
                        • Mechanical interface for electrical reconnection
                        • Disposable solution under development

                        Applications
                        • Proximal flow measurement
                        • Expiratory flow measurement
                        • Ventilation
                        • Anesthesia
                        • Respiratory measurements
                        • Metabolic measurements
                      • Mass Flow Meter SFM4100 for Medical Gases

                      • Designed for anaesthesia equipment, the CMOSens® mass flow meter SFM4100 precisely measures air and other non-aggressive gases. It provides an impressively wide dynamic measuring range up to 20 slm. The sensor unit has a digital I2C interface, provides a fully calibrated and temperature compensated output signal, and operates reliably at pressures of up to 7 bar.

                        Its outstanding long-term stability makes the SFM4100 first choice for products that require a high rate of deployment with long service intervals. For OEM projects, more than one gas calibration can be stored simultaneously in each sensor device. Self-test features allow testing of the entire signal chain (from capture of the analogue signal through digital signal chain) while the mass flow meter is in use. This makes the SFM4100 an optimal solution for safety-critical applications.

                        Features
                        • Measurement of flow rates from 0 to 20 l/min
                        • No drift
                        • Wide dynamic range (1:500)
                        • Digital I²C interface
                        • Digitally calibrated and temperature compensated
                        • Multigas Option

                        Applications
                        • Anaesthesia, inhalers and other medical instruments
                        • Analytical equipment
                        • Process Automation
                      • Evaluation Kit EK-F3x for the SFM3000 Mass Flow Meter

                      • The evaluation kit EK-F3x is designed for an easy and cost-efficient evaluation of Sensirion's SFM3000 digital mass flow meters. Test now the features of the mass flow meter. Especially at lowest flow rates, the sensor provides very low pressure drop, highest accuracy and fast response time.

                        The evaluation kit consists of a USB Stick with an adapter cable. The SFM3000 mass flow meter must be ordered separately. The EK-F3x viewer software as well as the datasheet of the SFM3000 can be downloaded here from the website. The viewer software is easy to install on your computer. No further calibration is necessary.

                        The software allows measuring at variable resolution and it displays mass flow in standard liter per minute (slm). Absolute or relative timing may be chosen and data are displayed in a graph. The software has the capability for easy data-logging and data may be exported to Excel format.

                        Features
                        • Fast and reliable evaluation (for a reduced time-to-market)
                        • Easy to connect to a PC
                        • High-performance measurements thanks to digital SFM3000 mass flow meter
                    • Mass Flow Controllers for Gases

                    • Sensirion's mass flow controllers are characterized by fast and accurate control of gas flow over a wide dynamic range. Based on the innovative CMOSens® Technology, the heart of these mass flow controllers is a calorimetric microsensor (MEMS), which is integrated with the complete signal conditioning electronics on one single chip. While the flow is measured using the thermal measurement principle, efficient control is provided by an analog controlling circuit. This unique integrated technological approach results in excellent performance and reliability - at a very attractive cost.
                        • Mass Flow Controller SFC5000

                        • The SFC5000 series enables extremely precise and repeatable control over a wide dynamic measuring range. The excellent performance of the mass flow controllers is based on Sensirion's innovative CMOSens® Technology which combines the high-precision sensor element and the analog and digital signal processing circuitry on a single CMOS silicon chip.

                          The sensor signal is converted into a fully calibrated and temperature compensated digital signal directly on the chip. The new mass flow controllers feature both analog and digital interfaces. Furthermore, they enable new optional features such as multi-gas, gas recognition and self-test capability. The mass flow controllers of the SFC5000 series are the ideal solution in different applications across industrial and medical markets.

                          Features
                          • High accuracy and repeatability
                          • Excellent long-term stability and reliability
                          • Wide dynamic range (turndown ratio 1000:1)
                          • Ultra-fast gas flow control (settling time < 50 ms)
                          • Optional multi-gas, multi-range and gas recognition functionality
                          • Digital and analog interfaces
                          • Flexible mechanical connection options: down mount, VCR and VCO, Swagelok, C-/W-Seal, etc.
                          • Calibration traceable to NIST standard
                          • Outstanding value for money thanks to innovative CMOSens® Technology
                          • Customized versions available on request

                          Applications
                          • Analytical instruments (e.g. gas chromatography, mass spectrometry)
                          • Medical devices (e.g. ventilation, anesthesia)
                          • Industrial process automation (e.g. coating, thermal processing)
                          • Semiconductor industry (e.g. plasma etching processes, thin film deposition)
                        • Mass Flow Controller SFC4000

                        • Sensirion's mass flow controller SFC4000 offers fast response times and accurate control of gas flows over a wide range.

                          Based on the CMOSens® Technology the digital calibrated and temperature compensated sensor signal is converted directly into a signal which is used in the analog controlling circuit to control the valve. Thanks to this principle the mass flow controller is insusceptible to electromagnetic interferences. The SFC4000 offers an analog interface (0 - 5 V) and provides stable and precise control of gas flows. Required power supply is unipolar 14 to 24 VDC.

                          Features
                          • Unbeaten price/performance ratio thanks to leading CMOSens® Technology
                          • Very high control speed (settling time <100ms)
                          • Wide control range (1:1000)
                          • High accuracy (0.8% m.v. for 10-100% FS)
                          • Fully temperature compensated
                          • Analog interface 0-5 V
                          • Manufactured under ISO 9001 certified quality control system
                          • Rugged chemically inert housing

                          Applications
                          • Analytical instruments (e.g. gas chromatography, mass spectrometry)
                          • Medical devices (e.g. ventilation, anesthesia)
                          • Industrial process automation (e.g. coating, thermal processing)
                          • Semiconductor industry (e.g. plasma etching processes, thin film Deposition)
                        • Mass Flow Controller SFC3000

                        • The mass flow controller SFC3000 offers fast and accurate control of gas flows over a wide range. Its high accuracy and fast settling time is mainly based on the innovative CMOSens® Technology. Thereby the digitally calibrated and temperature compensated sensor signal is converted directly into a signal which is used in the digital controlling circuit to control the valve.

                          The SFC3000 is a small, fully digital mass flow controller for high-volume OEM applications. Its excellent stability and repeatability make it ideal for analytical instruments. Different gas types and control ranges can be calibrated and switched by software.

                          Features
                          • Unbeaten price/performance ratio thanks to leading CMOSens® Technology
                          • Multi gas / multi ranges options
                          • Very high control speed (settling time <100ms)
                          • Wide control range (1:1000)
                          • Extremely stable flow control § Digital RS485 interface
                          • Manufactured under ISO 9001 certified quality control system
                          • Rugged chemically inert housing

                          Applications
                          • Analytical instruments (e.g. gas chromatography, mass spectrometry)
                          • Medical devices (e.g. ventilation, anaesthesia)
                          • Industrial process automation (e.g. coating, thermal processing)
                          • Semiconductor industry (e.g. plasma etching processes, thin film Deposition)
                        • Evaluation Kit EK-F5x for Mass Flow Controllers of the SFC5000 Series

                        • The EK-F5x evaluation kit is a simple test set for the evaluation and qualification of Sensirion SFC5000 mass flow controllers. Precise measurements for test purposes can be made quickly and inexpensively with this easy-to-use kit. The evaluation kit consists of a RS485-to-USB adapter cable, a 100/240V AC adapter, an USB stick with PC software and a Sensirion mass flow controller out of the SFC5000 series.

                          The EK-F5x Viewer software, data sheet and calibration certificate can be downloaded from this page. Installing the software on a PC is quick and easy. No hardware or software configuration or supplementary calibration is necessary. The Windows Viewer software shows mass flow versus time on the monitor and supports data export in a file, enabling subsequent data analysis with Excel.

                          Features
                          • Fast and reliable evaluation and qualification
                          • Enables initial testing of samples
                          • Easy to use with a normal PC
                          • Precise measurement with the SFC5000 mass flow Controller
                      • Gas Meter Modules for Smart Gas Meters

                      • The microthermal gas meter modules from Sensirion enable gas consumption to be reliably monitored in real-time. The modules boast long-term stability and dust and dirt resistance and have proven their mettle in the field for several years. In Germany and Italy, over 100'000 sensors have been integrated in microthermal gas meters. The advantages of the gas meter module make it the epitome of smart energy.
                            • Gas Meter Module SGM70xx

                            • The gas meter modules of the SGM70xx series are available for G1.6, G2.5, G4 and G6 gas meters. Due to their compact design, they are easy to integrate in gas meters. The module is digital, temperature compensated and pressure independent. Furthermore, it is fully calibrated for air and natural gas and has a standard connection and I2C interface. The SGM70xx features GWI-tested software and hardware to compensate for the various gas mixtures. Natural gas meters with an integrated Sensirion gas meter module can obtain European NMI certification.

                              The sensor performance is based on the innovative CMOSens® Technology, in which the sensor component and the evaluation circuit are integrated on a single CMOS microchip. The result is a cost-effective system for mass production and long-term stability for applications.

                              For projects with large unit quantities, an evaluation kit is available for our SGM70xx mass flow meters that enable simple and cost-effective evaluation of the new gas flow module.

                              Features
                              • For G1.6, G2.5, G4 and G6 flow ranges (residential market)
                              • High reliability and long-term stability
                              • Dust and dirt resistance
                              • Gas Quality Compensation (tested by GWI)
                              • Calibrated for air and natural gas
                              • Temperature compensated and pressure independent
                              • Compact design, easy integration
                              • Digital output (I2C interface)
                              • Evaluation kit available (only for projects with large unit quantities)

                              Applications
                              • Gas Metering
                        • Differential Pressure Sensor for Gases

                        • The differential pressure sensors from Sensirion measure reliably, fast and long-term stable. The fully calibrated and temperature compensated sensors offer highest accuracy and resolution, especially at very low differential pressures. The small and cost-effective design makes them an ideal match for price-sensitive solutions, e.g. in medical and HVAC applications.

                          Sensirion's digital and analog differential pressure sensors are mostly used to measure mass air flow in a bypass configuration. In many high-volume applications, it is the low-cost alternative to complete flow sensors.

                          The outstanding performance of Sensirion's differential pressure sensors is based on the CMOSens® dynamic measuring principle, in which the differential pressure is determined using intrinsic flow measurement. Due to internal intelligence on the CMOSens® sensor chip, the systems are precise and flexible for customized OEM adaptations.
                            • SDP3x Series - Differential Pressure Sensors

                            • The SDP3x is the world's smallest differential pressure sensor. It measures just 5 mm x 8 mm x 5 mm, opening up new dimensions of integration and application possibilities. The senor is based on the next generation of the CMOSens® sensor chip and is the heart of Sensirion's new sensor platform for measuring differential pressure and mass flow.

                              The SDP3x differential pressure sensor is reflow solderable, provides extended functionality, such as multiple I2C addresses and interrupt functions and a fast sampling time. Like all Sensirion differential pressure sensors, the SDP3x features excellent accuracy and long-term stability and has no zero-point drift. All this makes Sensirion's differential pressure sensor of the SDP3x series the perfect choice for high volume and cost-sensitive applications, where small size is essential.

                              The digital and fully calibrated and temperature compensated differential pressure sensor are available in different versions. The digital SDP31 sensor and the analog SDP36 sensor measure bi-directional pressure differences up to 500 Pa. Sensor versions with other pressure ranges will be available later 2016.

                              The SDP3x Series

                              SDP31 - digital version (I2C), pressure range: +/- 500 Pa

                              SDP36 - analog version, pressure range: +/- 500 Pa

                              Features
                              • Smallest size (5mm x 8mm x 5mm), opening up new dimension of integration and applications possibilities
                              • Measurement range ±500Pa (±2 in. H2O), other ranges available later 2016
                              • Excellent accuracy and repeatability, even below 1Pa
                              • No zero-offset, no drift
                              • Calibrated and temperature compensated
                              • Fast sampling time of 2kHz at 16 bit resolution
                              • Digital I2C and analog output versions
                              • Reflow solderable, shipped in tape and reel for pick and place
                              • Smart averaging algorithm and other digital and analog features
                              • Evaluation kit available

                              Applications
                              • Medical home care applications
                              • Portable medical devices
                              • Lifestyle, appliances and consumer
                              • Filter monitoring
                              • Heating, ventilation air conditioning (HVAC)
                            • SDP600 Series - Differential Pressure Sensors

                            • With the SDP600 series, Sensirion provides the first digital, dynamic differential pressure sensor. The sensor has a digital I²C output and measures with highest sensitivity and accuracy even at low differential pressures (10 Pa). Its excellent long-term stability makes drift issues a thing of the past. Thanks to its exceptional integration level and clever packaging, the small, fast and reliable CMOSens® sensor can be offered at an economical price.

                              The fully calibrated and temperature compensated sensors are available in different versions. The SDP600 is intended for a direct threaded connection to a pressure manifold via O-ring sealing, while the SDP610 is designed for a tube connection. SDP600 series is designed for high-quality mass production, which makes it a perfect fit for demanding OEM applications.

                              Features
                              • No offset, zero drift, hysteresis free
                              • Digital I²C Output
                              • Accuracy < 0.04% full-scale near zero
                              • Measurement range ±500 Pa / ±5 mbar / ±2 inch water
                              • Excellent repeatability (even below 10 Pa)
                              • Fully calibrated and temperature compensated

                              Applications
                              • Medical
                              • Heating, Ventilating, Air Conditioning (HVAC)
                              • Gas Boilers, Gas Ovens, Pellet Stoves
                              • Industrial
                              • Automotive
                            • SDP1000 Series - Differential Pressure Sensors

                            • The SDP1000 family of low differential pressure sensors provides precise differential pressure measurement with an analog 0 to 4 voltage output.

                              The fully calibrated and temperature compensated sensors feature excellent long-term stability and measure even miniscule pressure differences below 0.25 Pa (0.001 inch water). Superior performance and simple operation help minimize design effort. Several ranges from ±62 Pa to 0-3500 Pa (14 inch water) are available. The SDP1000 series is an ideal choice for demanding applications, for example medical and HVAC systems.

                              Features
                              • Accuracy of 0.1% full-scale near zero
                              • Amplified, analog voltage output: 0 to 4 Vdc
                              • No offset, zero drift, hysteresis free
                              • High dynamic range thanks to flow measurement principle
                              • Fully calibrated and temperature compensated
                              • Not sensitive to the mounting orientation

                              Applications
                              • Medical
                              • Heating, Ventilating, Air Conditioning (HVAC)
                              • Gas Boilers, Gas Ovens, Pellet Stoves
                              • Industrial
                              • Automotive
                            • SDPx108 Series - Differential Pressure Sensors

                            • The differential pressure sensors of the SDPx108 series are a high-performance sensor solution, specially designed for air flow measurements in medical applications.

                              Based on the differential pressure sensors of the SDP1000 series, SDPx108 features the same high-value mechanical, electrical and physical characteristics. The SDPx108 sensor provides an analog output signal with a range of 0-4 V and is fully calibrated and temperature compensated. In addition, it has a high resolution. Thanks to the principle of thermal flow measurement the SDPx108 sensor series achieves outstanding sensitivity and accuracy even at extremly low differential pressures, exhibits very high stability and is freedom of zero point drift. Furthermore, the SDPx108 series offers square-root output characteristics for a wider dynamic measurement range. The faster response time - compared to the SDP1000 series - makes the differential pressure sensor a perfect solution for respiratory devices and time-critical process automation applications.

                              Features
                              • Analog voltage output: 0 to 4 VdcHighest dynamic range thanks to root-square output characteristics
                              • Fast response time: 8 MS
                              • Highest resolution: 0.05 Pa
                              • Outstanding accuracy and sensitivity thanks to principle of dynamic measurement
                              • No offset, zero drift, hysteresis free
                              • Fully calibrated and temperature compensated

                              Applications
                              • Medical
                              • Ventilation
                              • Process Automation
                            • Evaluation Kit EK-P3 for Sensors of the SDP600 Series

                            • The evaluation kit EK-P3 is designed for an easy and cost-efficient evaluation and qualification of Sensirion's digital differential pressure sensors. The evaluation kit consists of a USB Stick with an adapter cable and a SDP610 differential pressure sensor. The viewer software is easy to install on a computer. No further calibration is necessary.

                              The software allows measuring at variable resolution, displaying differential pressure in Pa and Inch Water. Absolute or relative timing may be chosen and data are displayed in a graph. The software has the capability for easy data-logging and data may be exported to Excel format.

                              Features
                              • Fast and reliable evaluation and qualification (for a reduced time-to-market)
                              • Easy to connect to a PC
                              • High-performance measurements thanks to SDP610 differential pressure sensor

                              SDP610 - Characteristics
                              • Pressure range: -500 to 500 Pa, -/+ 2" H2O
                              • Accuracy: 0.2 Pa, + 3% of reading
                              • Response time: 4.6 ms
                              • Calibrated gases: Air, N2
                            • Evaluation Kit EK-P4 for Differential Pressure Sensors of the SDP3x Series

                            • The evaluation kit EK-P4 is designed for an easy and cost-efficient evaluation and qualification of Sensirion's SDP3x differential pressure sensors. Test now the features of the new differential pressure sensor. Especially at lowest pressure differences, the sensor provides highest accuracy and long-term stability.

                              The evaluation kit consists of a USB Stick with an adapter cable and a SDP3x differential pressure sensor. The viewer software is easy to install on a personal computer. No further calibration of the sensor is necessary.

                              The software allows measuring at variable resolution, displaying differential pressure in Pa and Inch Water. Absolute or relative timing may be chosen and data are displayed in a graph. The software has the capability for easy data-logging and data may be exported to Excel format.

                              Features
                              • Fast and reliable evaluation and qualification (for a reduced time-to-market)
                              • Easy handling, with a Windows PC
                              • High-performance measurements thanks to SDP3x differential pressure sensor

                              SDP3x - Characteristics
                              • Pressure range: -500 to 500 Pa, -/+ 2" H2O
                              • Accuracy: 0.1 Pa, + 3% of reading
                              • Calibrated gases: Air, N2
                          • Customized OEM Solutions

                          • For applications not covered by standard commercial products, Sensirion offers individual OEM solutions and special customized system solutions featuring unbeatable value for money. We aim to always offer refined and economical products that exactly meet your needs. Our many years of experience make this possible. See for yourself.
                              • Customized OEM Gas Flow Sensor Solutions

                              • Besides the standard gas flow sensor solutions, Sensirion also offers customized OEM sensor solutions at an attractive price performance ratio. We adapt or develop your customized mass flow meters according to your specific requirements.

                                Developing your product, we rely on our unique and patented CMOSens® Technology. This technology allows for integrating the highly precise sensor element as well as the electronics for signal processing on one single tiny chip. Correspondingly, gas flow sensor solutions based on CMOSens® set new standards for precision, reliability, functionality and cost effectiveness.

                                During the development process, you can rely on Sensirion's highly qualified project teams. Thanks to our committed and competent employees you always benefit from fast and effective technical Support.
                              • Customized OEM Liquid Flow Meters

                              • Sometimes innovative ideas ask for new solutions and the team of experts at Sensirion is always keen on finding ways to make interesting applications happen through our technology. Customizations are made to fit special requirements, such as resistance to aggressive chemicals, limited space constraints or dedicated low-price and even disposable sensor designs for high-volume applications.

                                Our cutting-edge sensor technology and a wealth of experience in liquid flow sensing lead to many successful customer projects. Customized sensors are used in a variety of applications, such as medical devices, diagnostic equipment or process control. The essential goal is to understand the requirements of our customers and to skillfully implement the key benefits of our technology to their advantage:

                                Low Flow Rates
                                Years of experience and expertise combined with the high sensitivity of our sensors enables flow measurement in extremely low ranges, from nanoliters to milliliters per minute.

                                High Speed
                                The MEMS sensor integrated on a CMOS chip permits ultra-fast response times below 50 ms due to its small thermal mass.

                                Flexibility and Cost-Efficiency
                                With our advanced technology, Sensirion has the flexibility to address the customer’s requirements in a way that ensures a customized sensor solution which is both high-performance and cost-efficient.

                                Features
                                • Flow rates from nl/min up to 120 ml/min
                                • Media isolated sensing principle - no direct sensor contact with the fluid
                                • High speed: 50 ms response time and better
                                • Bio-compatible and high chemical resistance
                                • Small size micro and nano flow meters
                                • Ultra high sensitivity (< 0.5 nano liter/min)
                              • Customized OEM Gas Flow Controllers

                              • Besides the standard gas flow sensor solutions, Sensirion also offers customized OEM sensor solutions at an attractive price performance ratio. We adapt or develop your customized mass flow controllers according to your specific requirements.

                                Developing your product, we rely on our unique and patented CMOSens® Technology. This technology allows for integrating the highly precise sensor element as well as the electronics for signal processing on one single tiny chip. Correspondingly, gas flow sensor solutions based on CMOSens® set new standards for precision, reliability, functionality and cost effectiveness.

                                During the development process, you can rely on Sensirion's highly qualified project teams. Thanks to our committed and competent employees you always benefit from fast and effective technical Support.
                            • Upcoming Technologies

                                • SGPC10 - Multi-Pixel Gas Sensor

                                • The world’s smallest, digital gas sensor SGPC10 opens up new possibilities for, among other things, the measurement of indoor air quality.

                                  The SGPC10 and Sensirion's proprietary intelligent algorithms and state-of-the-art pattern recognition, are able to detect human induced VOCs and distinguish them from background VOCs. This enables your devices to operate smarter and more autonomously. The SGPC10 takes Internet of Things (IoT) applications to a new level, and thanks to its tiny dimensions of 2.45 × 2.45 × 0.75 mm it can be integrated everywhere.

                                  With the SGPC10 multi-pixel gas sensor, Sensirion is expanding its range of environmental sensors and, in combination with the SHTC1 and the SPT-B100 it is, opening up new dimensions in environmental sensing.

                                  Features
                                  • Broad sensitivity to various gases for the reliable detection of indoor air pollutants such as aldehydes, ketones, aromatics among others
                                  • Distinguish human presence and activity and measure it in Units of CO2 equivalents or total VOC
                                  • Suitable for IoT applications, smart appliances and home automation
                                  • Low power consumption
                                  • Size: 2.45 x 2.45 x 0.75 mm (DFN package)
                                  • Interface: I²C
                                  • Supply voltage 1.8V
                                • SPT-BX - Barometric Pressure Sensor

                                • Ultimate Accuracy from the Smallest Pressure Sensor

                                  Based on an innovative capacitive measurement principle, the barometric pressure sensor SPT-BX can measure pressure differences with an unrivaled accuracy of ±1 Pa. With this previously unheard-of degree of precision, it is capable of detecting altitude differentials as small as the height of a single step on a stairway. Thanks to its unique sensitivity and temperature stability, the sensor opens up new dimensions in indoor navigation and in applications for monitoring daily routines and activities. As well as determining ambient pressure, the SPT-BX can also measure temperatures to an absolute accuracy of ±0.4°C. Sized just 1.4 × 1.0 × 0.6 mm, it is the smallest sensor in its class, and thus offers unlimited scope for use in mobile and Internet of Things (IoT) applications, such as in smartphones, tablets, and wearables.

                                  In addition to the SHTW1 humidity and temperature sensor and the SGPC10 multi-pixel gas sensor, the Sensirion environmental sensor range also includes the SPT-BX pressure sensor. All three sensors open up new dimensions in environmental sensing.

                                  Features
                                  • Pressure operating range: 30 - 110 kPa
                                  • Temperature operating range: -40 °C - 85 °C
                                  • Size: 1.4 x 1.0 x 0.6 mm (including solder balls)
                                  • RMS noise x power consumption: 1.6 Pa x 4.2 µW
                                  • Typ. pressure relative accuracy: ± 1 Pa
                                  • Typ. temperature induced pressure offset coefficient: ± 0.5 Pa/°C
                                  • Typ. absolute accuracy pressure: ± 200 Pa
                                  • Typ. absolute accuracy temperature: ± 0.4 °C
                                  • Interface: I2C
                                  • Supply voltage: 1.8 V

                                  Applications
                                  • Indoor Navigation (dead-reckoning, floor detection, etc.)
                                  • Outdoor Navigation (enhancement of GPS signal, slope detection, etc.)
                                  • Leisure, sports and fitness applications
                                  • Weather forecast
                                  • Healthcare applications (smart inhalers, spirometry, etc.)
                                  • User interaction, context and activity recognition
                              • Solutions

                              • Mobile and wearable devices, the Internet of Things (IoT) and smart home systems impact increasingly on every aspect of our lives. Thanks to its unique expertise in environmental sensing and collaboration with key players in the industry, Sensirion plays a key role in actively shaping these applications.

                                With over 15 years' experience in developing and supplying environmental sensor solutions, from component-level integration to cloud-based services, we lead the field in sensor technology innovation. We provide the sensor hardware and support our customers in the mechanical design-in, the development of sophisticated algorithms, and the integration of their software in embedded as well as cloud-based systems.

                                Sensirion's extensive product range includes sensors designed specifically for the mobile, consumer, IoT, and wearable markets. Apart from providing unmatched performance, we focus on key characteristics such as minimum size, ultra-low power consumption, fully calibrated digital output, and compatible supply voltages.

                                Sensirion is the only company with years of experience and market expertise that can provide comprehensive solutions from a single source.
                                  • Design-In

                                  • There is far more to measuring the temperature, humidity, pressure and gas concentration around a device than simply integrating a semiconductor component in a PCB. It is vital that the sensor is positioned correctly and has an ideal interface with the environment. With experience of hundreds of product designs and the expertise of a team of dedicated specialists, we can provide you with the advice, detailed instructions and application notes, system simulations and rapid prototyping that lead to a successful solution. Rely on us to provide cost-effective design-in options that can easily be implemented into high-volume production runs.
                                  • Drivers

                                  • Our sensors are already embedded in various platforms such as Atmel and Qualcomm. As part of our all-round support, we also supply customers with dedicated driver software. For example, the drivers written for Sensirion's SHTC1 product family have been approved by the Linux subsystem maintainer and will be part of the next stable mainline Linux kernel. We are currently extending these applications, which started with our humidity and temperature sensors, to all relevant product lines.
                                  • Algorithms

                                  • The data streams generated by sensors are rarely what end-users need or expect from a top-level system. To make it usable, the data needs either to be analyzed and combined, or adjusted to take the effects of local systems into account. The types of questions confronting end-users are wide-ranging: how, for example, can you tell from the sensor data if your device was unexpectedly submerged in water? How can you measure ambient temperature reliably if your telephone gets unusually hot during intense use or recharging? In order to answer these questions and others like them, we develop a continuous stream of new and sophisticated algorithms that are designed to obtain meaningful information from environmental sensors and to ensure we get to the heart of what our customers actually want to measure.

                                    Sensirion Compensation Engine
                                    When integrating temperature and humidity sensors into handsets and wearable devices, an integral part of our product offering is the Sensirion Compensation Engine. The device compensates for internal heat sources to achieve fast and accurate measurements of ambient temperature and humidity. The Sensirion Compensation Engine now enables tens of millions of mobile device to measure ambient weather conditions accurately with a fast response time. This was not possible before.
                                  • Use Case Development

                                  • Sensirion develops its own software applications for integration in mobile and wearable devices to demonstrate the use cases achievable with our environmental sensors. These applications give a good idea of the final use case and are ideal tools for marketing executives, product planning teams and engineers. They can also be made available for end-users.
                                  • Environmental Cloud

                                  • Sensirion's Environmental Cloud is a highly available and highly scalable platform for all types of sensor data. Our generic data model enables to us not only manage our own sensors but to process any arbitrary sensor-types and to correctly reflect all system-states. We attach great importance to the security of your data and your privacy. You decide who has access to the Environmental Cloud as well as when and how. Those rights can be granted by user, device or on application-level. We also put focus on local legislation. If needed, the data can be distributed to all major regions.

                                    As market leader in environmental sensors we have successfully implemented integration projects on a variety of different platforms, including mobile devices, wearables, and even cloud-enabled household appliances (Internet of Things).

                                    Key Features of the Cloud:
                                    • Monitor and Alerting
                                    • REST-API
                                    • Control-API
                                    • Cloud-to-Cloud
                                    • Stream-Analysis
                                    • Big-Data-Analysis
                                    • Smart-Data-Cleaning
                                    • Specific Algorithms
                                    • Highly scalable & available
                                    • Data-Security and Privacy
                                • Markets

                                • Sensirion’s sensors are used in a wide range of markets and different applications. In many markets, Sensirion’s years of experience and continuous innovation have made us the market leader. Again and again, Sensirion sets the standard in markets around the world.
                                    • Appliances

                                    • Thanks to the use of innovative sensor solutions, we help household appliance manufacturers make their systems more energy-efficient, lowering power consumption for the end consumer. For example, instead of powering built-in heaters in refrigerators all the time they can be activated only when a risk of condensation exists. Our sensors can also be used to optimize humidity and temperature in the refrigerator enhancing freshness and extending shelf life.

                                      Other fields of application where our sensors can be used to increase quality of life and lower energy consumption include air conditioners, dehumidifiers, and air purifiers.

                                      Applications
                                      • Air Conditioners
                                      • Air Purifiers
                                      • Thermostats
                                      • Refrigerators
                                      • Dryers
                                      • Washing Machines
                                      • Gas Boilers
                                      • Pellet Stoves
                                      • Gas Ovens
                                    • Building Technology

                                    • The technical infrastructure of buildings and the accurate measurement of environmental influences form the basis for a pleasant indoor climate. Using Sensirion’s proven sensor solutions, we help ensure energy-efficient operation of family homes, industrial facilities, and entire building complexes also increasing the level of comfort. Often, the interrelationships in buildings are particularly complex, so that finding the right parameters to measure is very difficult.

                                      This is where our sensor experts can help with their many years of experience. With our wide-ranging knowledge of sensor technology, we are able to support our customers and help them save energy, reduce operating costs, and improve the indoor climate. For example, our differential pressure sensors ensure optimum heat recovery from the exhaust air of buildings, thus substantially minimizing energy consumption.

                                      Applications
                                      • Heating, Ventilation, Air Conditioning
                                      • Thermostats
                                      • VAV Control
                                      • Heat Recovery Systems
                                      • Filter Monitoring
                                      • Burner Control
                                      • AC Ventilation / Fan Control
                                      • Clean Rooms
                                      • Fume Hoods
                                      • Fuel Cells
                                    • Industrial Automation

                                    • Reliable processes and durability are essential in industrial automation. Sensirion’s proven sensor solutions help companies to optimize processes and make them as efficient as possible. As the leading expert in the field, Sensirion has unique expertise in sensor integration, even where conditions are particularly challenging. Thanks to this, Sensirion defines the market standard over and over again.

                                      Applications
                                      • Analytical Instruments:
                                      • Mass Spectrometry, Thermal Analysis, Gas/Liquid Chromatography
                                      • Coating:
                                      • Thin Film & Crystalline Silicon PV, Physical & Chemical Vapor Deposition, Diffusion Furnace
                                      • Dispensing
                                      • Leakage Testing
                                    • Automotive

                                    • Sensirion offers comprehensive sensor solutions for the automotive market with outstanding quality, low prices, and expert support. Using Sensirion’s proven sensor solutions, we help automotive manufacturers meet stringent emission standards in the automotive industry. Our sensors set new standards in terms of comfort, safety, and energy consumption. They ensure that cabin air is always optimally regulated inside the vehicle for the driver by means of air-conditioning or climate-controlled seats. Furthermore, by determining the dew point the vehicle’s air-conditioning can be controlled to eliminate fogging of the windshields and ensure a clear view of the road ahead.

                                      Applications
                                      • Climate Control
                                      • Anti-Fogging
                                      • Climate Seat
                                    • Consumer Electronics

                                    • Sensirion brought environmental sensing to the field of consumer electronics. By using our proven sensor solutions we help manufacturers of mobile devices and wearables to make their applications smarter and create new ones that offer customers added value. Our sensors enable a whole range of new applications in the areas of comfort and indoor navigation.

                                      Applications
                                      • Wearables
                                      • Mobile Phones
                                      • Tablets
                                    • Medical Technology

                                    • Medical devices must meet the highest standards in terms of quality and reliability. Doctors, nurses, and patients benefit daily from applications in the field of medical technology that are getting smarter by the day. The use of proven Sensirion sensor solutions contributes to this and offers the possibility of making applications safer, more reliable, and more convenient. Our many years of experience in the field of medical technology make us the preferred experts for leading medical-technology companies.

                                      Applications
                                      • Home Care Devices (Ventilation)
                                      • Critical Care Devices (Ventilation)
                                      • Anesthesia
                                      • Point-of-Care Diagnostic
                                      • Drug Delivery / Infusion
                                      • Catheters
                                      • Smart Inhalers
                                      • Metabolic measurements
                                      • E-Health / M-Health
                                    • Internet of Things

                                    • The Internet of Things (IoT) is no longer just a vision but a reality. Although it is hardly visible, digital networking has been around much longer. Terms such as Internet to Machine, Internet of Everything (IoE), and Machine to Machine (M2M) are also often used in this context. All have the same goal, though: to make the world smarter, simpler, and more efficient. Sensors play a major role here. Using our sensor solutions, applications in the areas of smart homes or smart energy can be developed, which make daily life significantly easier and more convenient for the user, and also offer a financial advantage by reducing energy costs. As a leading supplier of sensor technology, we help our customers by ensuring that their applications in the area of the IoT are among the best.

                                      Our Expertise – Your Benefit
                                      Correctly measuring physical parameters in complex systems requires extensive knowledge and many years of experience. As a leading sensor expert, we support our customers from the integration of our sensors to the connection to the cloud, thus offering comprehensive solutions for applications in the area of the IoT. Hence, we are the perfect partner when it comes to taking your application to the next level.
                                    • Smart Home

                                    • The Internet of Things (IoT) makes our house a smart home: effectively an interconnected living area where machines, too, interact with each other. Due to this tight network of and communication between electronic devices via sensors, a house “learns” how best to work according to the requirements of its occupants. For example, it controls and monitors the power consumption, household appliances, heating and ventilation, etc. This smart control increases the quality of life and living significantly, and leads to a more efficient use of energy.

                                      Smart control is based on the measurement of ambient parameters such as humidity, temperature, and air quality. Often, however, the electronic devices distort the measurement through their own heat or gas emissions so that even correct data acquisition becomes a major challenge. A customized implementation of the sensors in the respective application is crucial to obtaining precise and realistic results.

                                      Thanks to our many years of experience in sensor technology and software development, we are the only company to offer holistic solutions for applications in the areas of IoT and smart homes – from the implementation of the sensors to industrialization support. This makes us a valuable partner who can support you in all matters relating to a more comfortable life at home.

                                      Applications
                                      • Smart Thermostats
                                      • IP/Security Cameras
                                      • Environmental Hubs
                                    • Smart Energy

                                    • Sensirion stands for smart energy: Our goal is to make the world smarter, more comfortable, and more resource-conserving. For example, our gas meter modules allow billing of gas consumption in real time, and provide more transparency and better control options for energy utilities and end consumers, making it possible to reduce gas consumption in the long term and prolong equipment service life. Sensirion offers sensor solutions for gas meters, gas stoves, pellet stoves, fuel cells, and gas boilers. All products are characterized by high reliability and long-term stability.

                                      Applications
                                      • Gas Meters
                                      • Submetering on Apartment Level
                                      • Submetering on Appliance Level
                                      • Gas Boilers
                                      • Pellet Stoves
                                      • Gas Ovens
                                      • Fuel Cells
                                  • Technology

                                      • CMOSens® - Core of Sensirion's Sensor Solutions

                                      • Sensirion sensor products guarantee outstanding performance and correspondingly high customer utility. They are all based on our innovative CMOSens® Technology, which enables the sensor component to be combined with the analog and digital signal processing circuitry on a tiny CMOS silicon chip. This is implemented in advanced semiconductor technology, using specific microsystem processing steps to produce the microsensor structures on specially developed and patented semiconductor parts. The resulting sensor chips enable precise and reliable sensing of the desired physical parameters, such as relative humidity, temperature, or mass flow. CMOSens® accordingly represents a guarantee of high precision, reliability, and functionality combined with cost effectiveness.

                                        Precision and Reliability
                                        Combining the sensor with the signal processing circuitry ensures that the weak analog sensor signals can be amplified and digitized with high precision directly where they are generated, thereby making them resistant to interference. This provides the basis for the extremely high measurement accuracy of CMOSens® sensors. With the elimination of fault-prone solder joints, users also benefit from outstanding long-term stability, as has been proven by extensive field tests. Furthermore, CMOSens® Technology is based on proven and reliable standard processes used in semiconductor fabrication, which also contribute to the high reliability and reproducibility of Sensirion sensor solutions.

                                        Functionality
                                        CMOSens® chips are intelligent microsensor systems with a high degree of integration and functionality. This is provided by analog and digital signal processing, which is integrated on the semiconductor chip along with the sensor component. Our chips are further enhanced by additional intelligence for self-tests, low-power operation, and built-in linearization, digitization and temperature compensation (the latter using an integrated temperature sensor). The present high level of functionality and intelligence results from many years of development work, as can be seen from the evolutionary stages leading up to the present chip generation:

                                        1st generation: miniaturized sensor component

                                        2nd generation: 1st generation plus amplifier and A/D converter

                                        3rd generation: 2nd generation plus intelligence for linearization and temperature compensation

                                        4th generation: 3rd generation plus memory to hold calibration data

                                        Cost Effectiveness
                                        As a standard semiconductor fabrication process, CMOS is optimized for reliable mass production. Sensors fabricated in CMOSens® Technology are based on this cost-optimized standard process, which assures customers of an optimal price/performance ratio. Merging the sensor components with the signal processing circuitry on a single small chip allows system costs and package sizes to be reduced even further compared with conventional sensors. As a result, users obtain extremely high reliability and quality at a lower price.

                                        Testing & Calibration
                                        An important technical benefit for customers of Sensirion products is that our digital sensor systems are fully calibrated. This means that expensive and difficult calibration procedures no longer have to be performed by the customer. Our in-house sensor calibration and testing infrastructure allows effective testing and calibration procedures according to established quality standards. The results are high quality, fully interchangeable multi sensor modules at unbeatable price-performance ratios.
                                      • Humidity Sensors with CMOSens®

                                      • Capacitive Humidity Sensor Principle
                                        In addition to the resistive method, the capacitive measurement principle, above all, established and proved itself as a standard in the past. For this principle, the sensor element is built out of a capacitor. The dielectric is a polymer which absorbs or releases water proportional to the relative environmental humidity, and thus changes the capacitance of the capacitor. This change in capacitance can be measured by an electronic circuit. This allows the relative air humidity to be determined. For humidity sensors with CMOSens® technology, a "micro-machined" finger electrode system with different protective and polymer cover layers forms the capacitance for the sensor chip, and, in addition to providing the sensor property, simultaneously protects the sensor from interference in ways previously not achieved.

                                        Humidity, Temperature and Dew Point
                                        The temperature sensor and the humidity sensor together form a single unit. This also enables an accurate and point-precise determination of the dew point, without incurring errors due to temperature gradients between the humidity and the temperature sensors. Through the unique linkage of these sensor elements with the signal amplifier unit, the analog-to-digital converter, the calibration data memory, as well as the digital, bus-ready interface, all on a surface area of a few square millimeters.

                                        Highest Stability and Performance
                                        Total coverage with condensation or even immersion in liquid present no problems whatsoever. Over two years of hardness tests have already shown this result. The signal amplification near the sensor allows the polymer layers to be optimized not for the signal strengths, but rather for long-term stability, which is significant for numerous applications. The analog-to-digital conversion, which is also performed "in place," makes the signal extremely insensitive to noise. A checksum generated by the chip itself is used for additional reliability. Last but not least, the calibration data loaded on the sensor chip guarantees that Sensirion humidity sensors have identical specifications and thus they can be replaced 100%. Other obvious advantages are the very short response times (4 sec at 1/e), high precision (±2% to ±5% according to configuration), as well as very low power consumption (< 3µA standby).

                                        Digital Interface
                                        Humidity and temperature sensors with CMOSens® technology can be connected directly to any microprocessor system by means of the digital 2-wire interface, which minimizes the system development times, saves costs, and leads to a significant advantage, especially for high-volume applications.
                                      • CMOSens® in Liquid Flow Measurement

                                      • For more than 30 years, thermal mass flow measurements using coils around a steel capillary have been the standard in the precise measurement and dosing of mass flow rates.

                                        The new CMOSens® Technology integrates this basic physical measuring principle in an extremely fast, miniaturized thermal sensor with all of the high-precision signal-conditioning circuitry on a single CMOS microchip. A heating element on the microchip adds a minimal amount of heat to the medium for the thermal flow measurement. Two temperature sensors, symmetrically positioned above and below the source of the heat, detect even the slightest temperature differences, thus providing the basic information about the spread of the heat, which itself is directly related to the flow rate. Integration on a single chip ensures that the sensitive analog sensor signals can be amplified with high precision, digitalized and further processed. Semiconductor technology also allows small, battery-operated sensor modules to run very well.

                                        Digital signal processing and the stored calibration data together provide repeatability of < 0.6% of the measurement value and allow for the output of a linear, completely calibrated, temperature-compensated flow measurement signal with speeds up to 1000 values per second. As this type of sensor has a completely digital internal function, output signals may be provided as either analog or digital outputs.

                                        In addition to interesting solutions for gas applications, CMOSens® Technology allows mass flow measurements for ultra low liquid flow rates. Sensors based on this new principle are extremely fast, small, lightweight, and can be produced in large quantities. The accurate measurement of volume flow within the range of several milliliters per minute, and even down to the sub-nanoliter range, poses no problem.

                                        Just a Straight Flow Channel

                                        In the most diverse application areas, a liquid medium must be completely separated from its environment, and pressure resistance must be ensured. To this end, Sensirion has come up with a surprising solution, which has been patented in the meantime: Special packaging means the highly sensitive microsensor chip is media-isolated by the flow channels wall which can be made of glass, ceramic or plastic. The chip can measure mass flows inside the channel in nanoliters, microliters, or milliliters per minute with the greatest accuracy. The sensor for the fluid system is a simple, straight tubing without seals, dead volumes or restrictions. According to the flow range, the internal diameter can be several millimeters or micrometers. A digital sensor for liquid flow based on this new technology is already up to 100 times faster, 10 times smaller and 25 times lighter than previous conventionally designed flow meters, which means optimization potential is not exhausted and battery-operated variants are possible.
                                      • CMOSens® Technology for Gas Flow and Differential Pressure

                                      • All on One Chip
                                        At the heart of Sensirion's sensor products is our innovative CMOSens® Technology which enables us to combine the sensor component with signal-processing circuitry on a tiny CMOS silicon chip. The CMOSens® sensor provides error-free gas flow metering that remains stable over long periods of time and generates a very fast, high-precision sensor signal.