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PI miCos GmbH
  • Offer Profile
  • PI miCos specializes in innovative systems and components in micro and nano-positioning, photonics and laser-technology.

    We offer a complete range of standard products as well as experimental kits used in education and research.
Product Portfolio
  • VACUUM & CRYO

  • VACUUM & CRYO applications are becoming more essential due to technologies that can only be applied in vacuum and cryogenic. For over 14 years, PI miCos has applied its extensive vacuum and cryogenic experience to the motion technology field. We supply components and systems for vacuum levels from 10-3 mbar to 10-9 mbar. Most of our standard products are designed with vacuum applications in mind allowing us to easily convert our broad range of stages to be vacuum compatible. We also apply our vacuum expertise to complete turnkey system solutions.

    Vacuum: For specifying the necessary vacuum level it is important to analyze the application. Coating of optics, epitaxy or cristallography are different in the necessary vacuum level as well as mass spectroscopy or others. Not the general vacuum level of 10-6 or 10-9 mbar is often important but the partial pressure of hydrocarbons. As a result of using a wrong grease with higher vapor pressure or use of plastics these hydrocarbons can be a source of contamination of surfaces. Especially laser applications in the UV range are critical because the hydrocarbons can be split into fragments and these fragments can be deposed on optics. The choice of materials and handling processes are at the end the most important points to get the right vacuum stage
    • Low Vacuum

    • Preparation category
      • standard motor
      • standard measuring system, if measuring system required
      • standard wiring
      • standard connector for plug connection
      • standard limit switch
      • all Al parts are anodized
      • stainless steel screws
      • all guidance and driving elements are equipped with vacuum grease
      • Outgassing temperature max. +50°C
    • High Vacuum

    • Preparation category
      • special vacuum motor
      • measuring system modified for the use in vacuum
      • motor and limit switches equipped with teflon braids 1m length wired to a test plug
      • standard limit switches with plastic part
      • all Al parts left un-anodized
      • stainless steel screws
      • all guidance and driving elements are equipped with vacuum grease
      • no use of CuZn alloys
      • all holes are vented
    • Ultra High Vacuum

    • Preparation category
      • special vacuum motor
      • measuring system modified for the use in vacuum
      • motor and limit switches equipped with teflon braids 1m length wired to a test plug
      • no limit switches, but can be offered with special UHV limit switches
      • all Al parts left un-anodized
      • stainless steel screws are Ag coated with degass drilling (apart from M3 thread)
      • bearing and driving elements made of hardened stainless steel and equipped with vacuum grease
      • no use of CuZn alloys
      • no use of plastics, unless so desired after consultation with the customer
      • all holes are vented (if possible)
    • Cryo

    • Preparation category
      • cryogenic special vacuum motor
      • measuring system modified for the use in vacuum
      • motor and limit switches equipped with teflon braids 1m length wired to a test plug
      • no limit switches, but can be offered with special UHV limit switches
      • all Al parts left un-anodized
      • stainless steel screws are Ag coated with degass drilling (apart from M3 thread)
      • bearing and driving elements made of hardened stainless steel and equipped with vacuum grease
      • no use of CuZn alloys
      • no use plastics, unless so desired after consultation with the customer
      • all holes are vented (if possible)
    • Space Application

    • Preparation category
      • Stages for operation in space
      • High shock and vibration loads
      • Vacuum up to 10-11 mbar
      • Temperature ranges depend on the application
      • Radiation resistance up to 10-6 J/kg
      • Outgassing holes to avoid pockets of trapped gas
       
    • Extreme Environment

    • Categories
      • Non magnetic
      • Climate application
      • Clean Room application
      • Outdoor application powered by batteries
      • High humidity application
      • Working in high magnetic field
       
  • MOTION CONTROL

  • For your better guidance on our website, we splitted the main group MOTION CONTROL in the following subgroups.
    Engineered Systems, Controllers, Robotics, Linear Stages, Rotation Stages, Piezo Stages, Manual Stages, Accessories & Appendix
  • Engineered Systems - Cryo, UHV Vacuum

    • CRYO / ABSOLUTE 77 K

    • OEM application for UHV Precision Rotation Stage PRS-110
      PP-30, 3 axes Special xyz PP-30 stage for applications at Kelvin.
    • VACUUM & CLEAN ROOM

    • Depending on the application, parts are not anodized. For vacuum levels below 10-7 mbar, all cavities are vented to eliminate outgassing and components are assembled using special, clean-room compatible screws (Class 100). All stages can be equipped with vacuum compatible encoders and limit switches.
    • UHV VACUUM / CLOSED LOOP

    • Linear stage LS-1 0 equipped with a Heidenhain linear scale for vacuum in 10-10 mbar. The guides and ball screw are made from stainless steel, with dry lubricant applied.
    • LOW VACUUM

    • 5-axis system using 3 VT-80 linear stages and a motorized AMA-45 mirror mount for use in 10 -3 mbar vacuum.
    • HEXAPOD FOR VACUUM

    • This system consists of a HEXAPOD, a linear stage, and an additional tilting platform. This special arrangement was chosen to achieve a maximum of travel range within the limited space of the high vacuum chamber. The application is an angle-dependant characterization of super-conducting high frequency detectors (far infrared, FIR) for astronomy.
    • HEXAPOD FOR HV

    • This HEXAPOD was developed for inspection of mirrors used in vacuum of 10 -9 mbar. This HEXAPOD was equipped with linear encoders which enabled the user to achieve ultra-precise positioning.
  • Engineered Systems - Fiberalingment

    • SpaceFAB SF-3000 PS (Piezo) part. I

    • SpaceFAB SF-3000 PS is designed for applications in vacuum environments where probes have to be aligned in all six degrees of freedom. We have minimized the overall dimensions. SpaceFAB SF-3000 PS is based on LPS-30 stages which allow the highest resolution with the piezo inertia drive and a closed loop scale system.
    • SpaceFAB SF-3000 PS (Piezo) part. II

    • Maximum travel ranges in XY are 12.7 mm with a vertical displacement of only 2 mm; central load of up to 0,5 kg is possible. The pivot point, i.e. the center of the probe, can be set by the customer which is very important for several applications. The system is based on the PI miCos Motion Server which includes all the ...
    • SpaceFAB HV

    • Customized SpaceFAB for vacuum 10-7 mbar and temperature range of - 0°C to +80°C. 6 degrees of freedom. With the SpaceFAB SF-3000 BS (vacuum) all six degrees of freedom can be moved without additional positioning elements. The low weight of the moving platform allows highly dynamic positioning. Using no pre-load, the design...
    • HIGH RESOLUTION X-RAY / SPECTROMETER

    • A 5 m long spectrometer for soft x-rays used in a synchrotron radiation beamline for resonant x-ray emission spectroscopy and resonant inelastic x-ray scattering in the 00–1600 eV energy range. 5 axes advanced x-ray emission spectrometer is mounted on a rotating platform allowing the scattering angle.
    • SpaceFAB HV FOR SYNCHROTRON

    • This 7 axes positioning system consists of a LS-110 and a custom designed Sp ceFA which is used for dynamic measurements. To achieve the required precision, high stiffness and repeatability was required. The pivot point can be set by software - in this case important for adjusting an X-Ray single-reflection lens at BESSY II in Berlin.
    • FIBER ALIGNMENT

    • The fiber alignment system shown in the picture is an example of our customized systems. It was designed to connect two fiber arrays to a central waveguide component. Alignment of the components is realized in several steps.
  • Engineered Systems Air Bearing

    • MICROFILM SCANNER

    • As a project partner of the Millenium project, which is organized by the Fraunhofer Institute for physical measuring technique IPM, PI miCos got the task of developing a very fast and constant translation stage. The target of this project is to develop a functional imagesetter for storing analog and digital data on a monochrome film.
    • AIR BEARING

    • Test and Calibration Systems. Air Bearing linear axis with a travel range of 600 mm. Used for the measurement of high precision linear scales, this system requires a positioning stage with optimized accuracies (minimal pitch, yaw and roll angle). The system consists of a precision lapped granite plate and an aluminum carrier.
    • LONG TERM STABILITY - TIP TILT

    • Tip-Tilt Elevation System with NPE-200.
      This 3 axes system is used for the manufacturing of optical parts which require the highest long-term stability.
    • NANO ROBOTICS

    • PI miCos is a leading provider of positioning
      systems used for nano-technology applications. Our components and systems are specifically engineered for demanding uses such as laser technology, medical applications, space exploration, precision sensors and many other challenging application areas.
    • HEXAPOD

    • With a HEXAPOD system motions in all six
      degrees of freedom can be achieved. Due to the parallel kinematic design principle of HEXAPODS, a much higher system stiffness is achieved than with conventional stacked stages. The low weight of the moving platform allows highly dynamic positioning processes.
    • ANALYSING OF THIN FILMS

    • High-precision axes system for quality control of thin films. Using a linear UPM-160 stage, this application achieved a straightness of 0.5 µm/100 mm with a repeatability of less than 25 nm for both axes.
  • Engineered Systems Wafer Inspection

    • ELECTRONIC INSPECTION

    • Turnkey system using MT-65 linear stages and a SMC controller including a vision system to measure printed circuit boards.
    • MULTIAXES STANDARD / COMBINATION

    • DT-80 stack with a common center of rotation for realising a motorized gimbal mount. Iris diaphragm with DT-80
    • SENSOR CALIBRATION

    • LEFT: Two axes rotary system mounted on a DT-120 rotary stage with harmonic drive.
      RIGHT: XYZ-positioning system with 4 degrees of freedom using a PLS- 5 and DT-50.
    • MULTIAXEX STANDARD / COMBINATION

    • LEFT: Elevation stage HT-90, two goniometers WT-100 and WT- 5 plus a ARS-65 rotary stage with a common center of rotation.

      RIGHT: Manual VT- 0 stage with linear scale.
    • BALL SCANNING

    • LUCIA BalScan is a ballistic identification system, which can be used for routine bullet and cartridge case scanning and
      comparison work. It can also be used for building up central databases and for networking ballistic laboratories.
    • INSPECTION SENSOR MEASURMENT

    • 3 Axes Inspection System. This 3 axes positioning system was custom developed for inspection of small optical parts and is well suited for tasks of reflected and transmitted light microscopy. XY adjustment is made using a MS-8 scan stage with 8” travel range. A MT- 5 linear stage mounted on a granite bracket allows adjustment of focus of CCD...
  • Engineered Systems Climate, UV Application

    • POSITIONING IN ANTARCTICA

    • Rotation Stage ADT-65 is suited for vertical and horizontal use. With little effort it can be configured together with other PI miCos components in systems.
    • POSITIONING IN CLIMATE CHAMBER

    • Climate chamber 6 axes system for measuring sensors from -50°C to 80°C in the automotive industry. The test units are positioned using a 6 axes system. The travel range in XYZ is 50 mm, rotation is 360° or 10°. The linear axes provide a resolution of less than 0.1 µm, the rotary axes less than 0.0015°. For this task, only standard positioning ...
    • WAFER INSPECTION

    • 3 axes positioning system with UPS-150 linear motor stages for XY and PLS- 5 for sensor positioning. The system uses an SMC-Pegasus controller.
    • PRECISION OPTICS PRODUCTION

    • XYZ-system consisting of LMS-1 0 stages using linear motors and a DMC-series controller. We also design systems with up to 50 motorized axes including lasers, sensors and software.
    • STAGE FOR AUTOFOCUSING

    • Focusing axis for medical engineering
    • XY-STAGE FOR UV-LASER / APPLICATION

    • OEM Application for UV-Lasers. The miniature Micro Stage MTS-70 was developed for vacuum applications with a limited space requirement. The drive consists of a special micro-stepped gearless stepper motor. If high positioning accuracy and repeatability (0.1 µm) is needed, the MTS-70.
  • Controllers

  • For your better guidance on our website, we splitted the group Controllers in the following subgroups.
    Controllers 2011, Microstep, Linear/ Torque, Servo, Piezo & Amplifier
  • Controllers - Controllers 2012

    • MMC-series MMC-100 / 110

      • Integrated controller / driver for PI miCos stick-slip piezo
      • Compact, modular design
      • Configurable as a standalone unit or stackable up to 99
      • Open-loop / closed-loop operation
      • Open-loop resolution of less than 1 nm
      • Closed-loop resolution dependent on the encoder..
      • A quad B differenntial encoder feedback
    • DeltaTau-series Geobrick/Clipper

      • 4 or 8 axes of simultaneous control (0.1 ms update t.)
      • 80 MHz CPU optional 240 MHz
      • Ethernet TCP/IP, USB and RS-232 communication interf.
      • Multitasking of up to 256 motion and 64 asynchronous..
      • Easy-to-use, high-level programming language
      • Linear, circular, rapid, B-spline, Hermite-spline interp.
      • True S-curve accel/decel for jerk-limited profiles
  • Controllers - Microstep

    • SMC
      Technical Info

      • Kyfeatures description SMC family
      • Open Loop Figures resolution 100nm, 25nm & 10nm
      • Closed Loop Figures resolution 100nm, 25nm & 10nm
      • Open Loop, positioning error
      • Open Loop; positioning corrected
    • SMC-series
      SMC corvus

      • 2 or 3 Axes Microstep-Controller System
      • High-Resolution-Microstep
      • 48Vbus-voltage
      • 133 MHz RISC Processor, with Flash-Memory
      • Velocity-range <0.1µm/s ...45rev/s (200stepmotor)
      • Closed-loop for quadrature encoders (RS-422)
      • and sin-cos encoders (1Vpp)
    • SMC-series
      SMC corvus eco

      • 2 or 3 Axes Microstep-Controller System
      • High-Resolution-Microstep
      • 24 V bus-voltage
      • 133 MHz RISC Processor, with Flash-Memory
      • Velocity-range < 0.1 µm/s... 15 rev/s (standard)
      • 25 rev/s (with speed upgrade) (200 step motor)
      • Closed-loop for (RS-422) and (1Vpp)
    • SMC-series
      SMC coruvs pci

      • 12 V PC
      • PCI plug-in board with onboard microstepping p.amp.
      • Motor power 12 V (PC power), or opt. ext. 24 V
      • COM via PCI-Com-bridge, assures software
      • Compatibility to SMC corvus and SMC corvus eco
    • SMC-series
      SMC pollux

      • Single-axis Microstep-Controller System
      • Stand-alone-system, or with integ. 2Ph. stepper m..
      • High-Resolution-Microstep
      • Up to 16 SMC pollux can be combined...
      • DSP Controller Type
      • Serial Interface RS-232 19200 Baud
      • NEW Closed-Loop 1 Vpp interface, ...
    • SMC-series
      SMC hydra CM

      • 2 Axes Microstep-Controller System
      • High-Resolution-Microstep
      • 24 V bus-voltage
      • Closed-loop with absolute encoder (multiturn)
      • Closed-loop with incremtal encoder 1Vpp
      • Serial Interface RS-232 460 KBaud
      • Ethernet 10/100 MBit
    • SMC-series
      SMC hydra TT

      • 2 Axes Microstep-Controller System
      • High-Resolution-Microstep
      • 24 V bus-voltage
      • Closed-loop with absolute encoder (multiturn)
      • Closed-loop with incremtal encoder 1Vpp
      • Serial Interface RS-232 460 KBaud
      • Ethernet 10/100 MBit
    • SMC-series
      SMC taurus

      • Analog joystick-port
      • Manual hand-wheel port
      • SPS in/outputs
      • Limit-switch-inputs
      • Enable-input
      • Potential-free emergency contacts
      • Closed-loop (RS-422) and (1Vpp)
    • SMC-series
      SMC pegasus

      • Analog joystick-port
      • Manual hand-wheel port
      • SPS in/outputs
      • Limit-switch-inputs
      • Enable-input
      • Potential-free emergency contacts
      • Closed-loop (RS-422) and (1Vpp)
    • SM-series
      SM 32

      • 3 Axes Microstep Controller System
      • Microsteps down to 1/64 (software configuration)
      • PCI plug-in board with onboard microstepping p.amp.
      • ast PCI-slot communication
      • 36 W max. power, 1.8 A per axis
      • 32 bit step counter
      • Point to point, trapezoidal and 3 axis contouring
    • DMC-series DMC Ethernet/RS-232

      • Form-Factor: PCI-PC Slot & external 19" Rack
      • Availabe in DMC PCI-eco & Accelera
      • Availabe in DMC Ethernet/RS232
      • Number of Axes 1 ... 8
      • Closed Loop
      • Linear interpolation
      • Circular interpolation
      • Contouring Independent
    • DeltaTau-series Geobrick / Clipper

      • 4 or 8 axes of simultaneous control (0.1 ms update t.)
      • 80 MHz CPU optional 240 MHz
      • Ethernet TCP/IP, USB and RS-232 communication interf.
      • Multitasking of up to 256 motion and 64 asynchronous..
      • Easy-to-use, high-level programming language
      • Linear, circular, rapid, B-spline, Hermite-spline interp.
      • True S-curve accel/decel for jerk-limited profiles
    • FlexMotion-series
      734x

      • Stepper / servo 4-axis controller (NI)
      • Real-time CPU, onboard multitasking real-time...
      • Closed loop control...
      • 62 µs PID loop update rate...
      • Quadrature encoder or analog feedback
      • 32 digital I/O lines, 4 analog inputs / outputs
      • High-speed position capture inputs
  • Controllers - Linear/Torque

    • SMC-series
      SMC hydra CM

      • 2 Axes Microstep-Controller System
      • High-Resolution-Microstep
      • 24 V bus-voltage
      • Closed-loop with absolute encoder (multiturn)
      • Closed-loop with incremtal encoder 1Vpp
      • Serial Interface RS-232 460 KBaud
      • Ethernet 10/100 MBit
    • SMC-series
      SMC hydra TT

      • 2 Axes Microstep-Controller System
      • High-Resolution-Microstep
      • 24 V bus-voltage
      • Closed-loop with absolute encoder (multiturn)
      • Closed-loop with incremtal encoder 1Vpp
      • Serial Interface RS-232 460 KBaud
      • Ethernet 10/100 MBit
    • SMC-series
      SMC taurus

      • Analog joystick-port
      • Manual hand-wheel port
      • SPS in/outputs
      • Limit-switch-inputs
      • Enable-input
      • Potential-free emergency contacts
      • Closed-loop (RS-422) and (1Vpp)
    • SMC-series
      SMC pegasus

      • Analog joystick-port
      • Manual hand-wheel port
      • SPS in/outputs
      • Limit-switch-inputs
      • Enable-input
      • Potential-free emergency contacts
      • Closed-loop (RS-422) and (1Vpp)
    • LMC-series
      LMC-100

      • Single axis servo control for 2 Phase brush motors
      • 2 & 3 Phase brushless motors, linear and torque m.
      • RS-232 interf. for 1 axis, CANopen for multi axes
      • SimpllQ programming language
      • onboard programming
      • Single axis point to point
      • RS-232 and 1Vpp feedback
    • DeltaTau-series Geobrick / Clipper

      • 4 or 8 axes of simultaneous control (0.1 ms update t.)
      • 80 MHz CPU optional 240 MHz
      • Ethernet TCP/IP, USB and RS-232 communication interf.
      • Multitasking of up to 256 motion and 64 asynchronous..
      • Easy-to-use, high-level programming language
      • Linear, circular, rapid, B-spline, Hermite-spline interp.
      • True S-curve accel/decel for jerk-limited profiles
  • Controllers - Servo

    • LMC-series
      LMC-100

      • Single axis servo control for 2 Phase brush motors
      • 2 & 3 Phase brushless motors, linear and torque m.
      • RS-232 interf. for 1 axis, CANopen for multi axes
      • SimpllQ programming language
      • onboard programming
      • Single axis point to point
      • RS-232 and 1Vpp feedback
    • MoCo-series
      MoCo DC

      • Single-axis DC-controller system
      • Cost effective, stand alone controller
      • Up to 16 MoCo DC can be combined
      • LM629 servo controller for simultaneous
      • Position compare output (≤1 kHz)
      • With PID filtering
      • LabVIEWTM VIs
    • DMC-series
      DMC Ethernet/RS-232

      • Form-Factor: PCI-PC Slot & external 19" Rack
      • Availabe in DMC PCI-eco & Accelera
      • Availabe in DMC Ethernet/RS232
      • Number of Axes 1 ... 8
      • Closed Loop
      • Linear interpolation
      • Circular interpolation
      • Contouring Independent
    • DeltaTau-series
      Geobrick / Clipper

      • 4 or 8 axes of simultaneous control (0.1 ms update t.)
      • 80 MHz CPU optional 240 MHz
      • Ethernet TCP/IP, USB and RS-232 communication interf.
      • Multitasking of up to 256 motion and 64 asynchronous.
      • Easy-to-use, high-level programming language
      • Linear, circular, rapid, B-spline, Hermite-spline interp.
      • True S-curve accel/decel for jerk-limited profiles
    • FlexMotion-series
      734x

      • Stepper / servo 4-axis controller (NI)
      • Real-time CPU, onboard multitasking real-time...
      • Closed loop control...
      • 62 µs PID loop update rate...
      • Quadrature encoder or analog feedback
      • 32 digital I/O lines, 4 analog inputs / outputs
      • High-speed position capture inputs
  • Controllers - Piezo

    • MMC-series MMC-100 / 110

      • Integrated controller / driver
        for PI miCos stick-slip piezo
      • Compact, modular design
      • Configurable as a standalone unit or stackable up to 99
      • Open-loop / closed-loop operation
      • Open-loop resolution of less than 1 nm
      • Closed-loop resolution dependent on the encoder.
      • A quad B differential encoder feedback
    • PiCo 33

      • Special design
        for piezo driven step motor
      • Manual control by keypads or RS-232
      • works with batteries or external power supply
      • operates up to 3 axes
      • Customized designs
      • USB-interface optionally (without keypads)
      • USB closed-loop controller (optionally)
    • PiCo 33 USB

      • Special design
        for piezo driven step motor
      • operates up to 3 axes
      • Customized designs
      • USB-interface (without keypads)
      • USB closed-loop controller
    • PMA-100 Piezo Motor Amplifier

      • Single axis piezo motor
        (inertial or stick-slip) driver
      • Interfaces directly with a stepper motor controller
      • Standard pulse and direction interface
      • Typical open loop step resolution
        of 1.5 nm
      • Typical maximum velocity of 3 mm/s
      • No setup or adjustments required
      • Universal power supply included
  • Controllers - Amplifiers

      • MPA Power Amplifiers

        • DC-brush 2 A
        • DC-brush 5 A
        • 2SM microstep 24 V 2 A
        • 3-Phase brushless 24 V 5 A
        • DC brush 12 V 1 A
        • 3-Phase linear/torque motor
        • Piezo-Motor Driver (PMA-100)
  • Robotics

  • For your better guidance on our website, we splitted the group Robotics in the following subgroups:
    Vacuum, Robotic 2011, SpaceFAB & Hexapod
  • Robotics - Vacuum

    • SpaceFAB SF-3000 BS HV

      • Six axes micro robot system
      • Compact, low profile system, ballscrew
      • Travel ranges linear 50 x 12.7 x 100 mm
      • Travel ranges rotation Rx, Ry, Rz 10°
      • Load capacity 3 kg center mounted
      • Pivot point can be set by the customer
      • Including software, controller and amplifiers
    • SpaceFAB SF-3000 BS UHV

      • Six axes micro robot system
      • Compact, low profile system, ballscrew
      • Travel ranges linear 50 x 12.7 x 100 mm
      • Travel ranges rotation Rx, Ry, Rz 10°
      • Load capacity 3 kg center mounted
      • Pivot point can be set by the customer
      • Including software, controller and amplifiers
    • Hexapod PAROS HV

      • Six axes Parallel Robot Operating System
      • Travel ranges linear 200 x 200 x 80 mm
      • Travel ranges rotation Rx, Ry 30°, Rz 60°
      • Maximum speed 30 mm/sec (leg speed)
      • Repeatability in space ±30 µm
      • High stiffness
      • Including software, controller and amplifiers
  • Robotics - Robotic 2011

    • Hexapod HP-550

      • Six axes Parallel Kinematic System
      • Travel ranges linear ( XYZ ) 100x100x100 mm
      • Travel ranges rotation Rx, Ry 40°, Rz 60°
      • Maximum speed 1 mm/sec
      • High stiffness
      • Random Definition of the Pivot Point
      • Load capacity central ( vertical / Fz ) 50 kg
    • Hexapod HP-140

      • Six axes Parallel Kinematic System
      • Travel ranges linear 32 x 32 x 12 mm
      • Travel ranges rotation Rx, Ry 12°, Rz 20°
      • Maximum speed 1 mm/sec
      • Pivot Point can be set by the customer
      • User friendly software
      • Load capacity central ( Fx; Fy ) 2kg / ( Fz ) 5 kg
  • Robotics - SpaceFAB

    • SpaceFAB SF-3000 BS

      • Six axes micro robot system
      • Compact, low profile system, ballscrew
      • Travel ranges linear 50 x 12.7 x 100 mm
      • Travel ranges rotation Rx, Ry, Rz 10°
      • Load capacity 3 kg center mounted
      • Pivot point can be set by the customer
      • Including software, controller and amplifiers
    • SpaceFAB SF-3000 LS

      • Six axes micro robot system
      • Compact, low profile system, ballscrew
      • Travel ranges linear 50 x 12.7 x 50 mm
      • Travel ranges rotation Rx, Ry, Rz 10°
      • Load capacity 1 kg center mounted
      • Pivot point can be set by the customer
      • Including software, controller and amplifiers
    • SpaceFAB SF-2500 LS

      • SpaceFAB System with controller and software
      • Adj. Range: 5x5x3.5mm, +/- 5° each
      • Calculated Resolution: 0.5µm and 10µm
      • Load 0.3kg
      • Option: vacuum, other dimensions
        will be available in 10-2009
  • Robotics - Hexapod

    • Hexapod HP-140

      • Six axes Parallel Kinematic System
      • Travel ranges linear 32 x 32 x 12 mm
      • Travel ranges rotation Rx, Ry 12°, Rz 20°
      • Maximum speed 1 mm/sec
      • Pivot Point can be set by the customer
      • User friendly software
      • Load capacity central ( Fx; Fy ) 2kg / ( Fz ) 5 kg
    • Hexapod HP-550

      • Six axes Parallel Kinematic System
      • Travel ranges linear ( XYZ ) 100x100x100 mm
      • Travel ranges rotation Rx, Ry 40°, Rz 60°
      • Maximum speed 1 mm/sec
      • High stiffness
      • Random Definition of the Pivot Point
      • Load capacity central ( vertical / Fz ) 50 kg
    • Hexapod HP-430

      • Six axes Parallel Robot Operating System
      • Travel ranges linear 50x50x30 mm
      • Travel ranges rotation Rx, Ry 20°, Rz 40°
      • Maximum speed 30 mm/sec (legspeed)
      • Repeatability inspace ±5 µm
      • High stiffness
      • High dynamic
    • Hexapod HP-300

      • Hexapod system with controller and software
      • Adj. Range: 30x30x15mm, 20° each
      • Calculated Resolutuion: 1µm and 10µm
      • Load 5kg
      • Option: vacuum, cleanroom
  • Linear Stages

  • For your better guidance on our website, we splitted the group Linear Stages in the following subgroups.
    Vacuum, Ultra, Direct, Precision, Eco, Micro, Lift, Pusher, Scan
  • Linear Stages - Vacuum

      • UHV Reference Model PLS-85

        • Travel range up to 155 mm (6")
        • Uni-directional repeatability down to ± 0.05 µm
        • Maximum speed 8 [15] mm/sec
        • Maximum speed 4 mm/sec [UHV - no lubrication]
        • Load capacity up to 6 [7] kg
        • Limit & Reference switches in ceramic-gold [UHV]
        • Limit & Reference switches in platic [HV]
        • Optionally Optical Linear Encoder vacuum type
        • Accessories D-type Connectors & Feedthroughs
  • Linear Stages - Ultra

    • Ultra Precision Linear Motor Stage UPS-150

      • Linear Motor
      • Travel range up to 305 mm (12")
      • Uni-directional repeatability down to ± 0.015 µm
      • Maximum speed 600 mm/sec
      • Load capacity up to 15 kg
      • Integrated limit switches
      • Integrated linear scale (center mounted)
      • High long-term stability
    • Ultra Precision Linear Stage UPM-160

      • Travel range up to 205 mm (8")
      • Uni-directional repeatability down to ± 0.02 µm
      • Maximum speed 100 mm/sec
      • Load capacity up to 35 kg
      • Load capacity up to 35 kg
      • Integrated linear scale (center mounted)
    • Linear Motor Stage LMS-230

      • Travel range up to xx mm (x")
      • Uni-directional repeatability down to ± 0.0x µm
      • Maximum speed x00 mm/sec
      • Load capacity up to xx kg
      • Load capacity up to xx kg
      • Integrated linear scale (center mounted)
    • Nano Precision Elevation Stage NPE-200

      • Travel range 13 mm (1/2")
      • Uni-directional repeatability down to ± 0.025 µm
      • Maximum speed 0.2 mm/sec
      • Load capacity up to 30 kg
      • Integrated limit switches
      • Integrated linear scale (center mounted)
    • Ultra Precision Elevation Stage UPL-120

      • Travel range 13 mm (1/2")
      • Uni-directional repeatability down to 0.05 µm
      • Maximum speed 6 mm/sec
      • Load capacity up to 15 kg
      • Integrated optical limit switches
      • Option: linear scale (center mounted)
  • Linear Stages - Direct

    • Ultra Precision Stage UPS-150

      • Linear Motor
      • Travel range up to 305 mm (12")
      • Uni-directional repeatability down to ± 0.015 µm
      • Maximum speed 600 mm/sec
      • Load capacity up to 15 kg
      • Integrated limit switches
      • Integrated linear scale (center mounted)
      • High long-term stability
    • Linear Motor Stage LMS-230

      • Travel range up to xx mm (x")
      • Uni-directional repeatability down to ± 0.0x µm
      • Maximum speed x00 mm/sec
      • Load capacity up to xx kg
      • Load capacity up to xx kg
      • Integrated linear scale (center mounted)
    • Linear Motor Stage LMS-180

      • Linear Motor
      • Travel range up to 508 mm (20")
      • Uni-directional repeatability down to ± 0.03 µm
      • Maximum speed 500 mm/sec
      • Load capacity up to 45 kg
      • Integrated limit switches
      • Integrated linear scale (center mounted)
    • Linear Motor Stage LMS-80

      • Linear Motor
      • Travel range 120 mm
      • Uni-directional repeatability down to ± 0.03 µm
      • Maximum speed 500 mm/sec
      • Load capacity up to 5 kg
      • Integrated limit switches
      • Integrated linear scale
    • Linear Motor Stage LMS-60

      • Linear Motor
      • Travel range up to 65 mm
      • Uni-directional repeatability down to ± 0.03 µm
      • Maximum speed 500 mm/sec
      • Load capacity up to 3 kg
      • Integrated limit switches
      • Integrated linear scale
  • Linear Stages - Precision

    • High Precision Stage HPS-170

      • Travel range up to 305 mm (12")
      • Uni-directional repeatability down to ± 0.05 µm
      • Maximum speed 90 mm/sec
      • Load capacity up to 35 kg
      • Integrated limit switches
      • Optionally: linear scale (center mounted)
    • Linear Stage LS-270

      • Travel range up to 1016 mm (40")
      • Uni-directional repeatability down to ± 0.05 µm
      • Maximum speed 150 mm/sec
      • Load capacity up to 150 kg
      • Integrated limit switches
      • Optionally: linear scale (center mounted)
    • Linear Stage LS-180

      • Travel range up to 508 mm (20")
      • Uni-directional repeatability down to ± 0.05 µm
      • Maximum speed 200 mm/sec
      • Load capacity up to 100 kg
      • Integrated limit switches
      • Optionally: linear scale (center mounted)
    • Linear Stage LS-120

      • Travel range 40 mm (1.5")
      • Uni-directional repeatability down to ± 0.05 µm
      • Maximum speed 90 mm/sec
      • Load capacity up to 10 kg
      • Integrated limit switches
      • Optionally: linear scale (center mounted)
    • Linear Stage LS-110

      • Travel range up to 305 mm (12")
      • Uni-directional repeatability down to ± 0.05 µm
      • Maximum speed 90 mm/sec
      • Load capacity up to 10 kg
      • Integrated limit switches
      • Optionally: linear scale (center mounted)
    • Precision Linear Stage PLS-85

      • Travel range up to 155 mm (6")
      • Uni-directional repeatability down to ± 0.05 µm
      • Maximum speed 100 mm/sec
      • Load capacity up to 10 kg
      • Integrated limit switches
      • Optionally: linear scale
  • Linear Stages - Eco

    • Linear Stage VT-75

      • Travel range up to 600 mm
      • Uni-directional repeatability down to ± 0.4 µm
      • Maximum speed 100 mm/sec
      • Load capacity up to 5 kg
      • Integrated limit switches
    • Translation Stage VT-80

      • Travel range up to 300 mm
      • Uni-directional repeatability down to ± 0.2 µm
      • Maximum speed 20 mm/sec
      • Load capacity up to 5 kg
      • Integrated limit switches
    • Linear Stage LS-65

      • Travel range up to 102 mm (4")
      • Uni-directional repeatability down to ± 0.2 µm
      • Maximum speed 10 mm/sec
      • Load capacity up to 2 kg
      • Integrated limit switches
      • Optionally 0.4 mm pitch
  • Linear Stages - Micro

    • Micro Stage MTS-65

      • Travel range up to 52 mm (2")
      • Uni-directional repeatability down to ± 0.1 µm
      • Maximum speed 8 mm/sec
      • Load capacity up to 2 kg
      • Integrated limit switches
      • Optionally: linear scale
    • Micro Stage MTS-70

      • Travel range 8 mm
      • Uni-directional repeatability down to ± 0.1 µm
      • Maximum speed 7 mm/sec
      • Load capacity up to 2 kg
      • Integrated limit switches
      • Optionally: linear scale
    • Linear Stage LS-40

      • Travel range up to 52 mm
      • Uni-directional repeatability down to ± 0.1 µm
      • Maximum speed 15 mm/sec
      • Integrated limit switches
      • High resolution
  • Linear Stages - Lift

    • Nano Precision Elevation Stage NPE-200

      • Travel range 13 mm (1/2")
      • Uni-directional repeatability down to ± 0.025 µm
      • Maximum speed 0.2 mm/sec
      • Load capacity up to 30 kg
      • Integrated limit switches
      • Integrated linear scale (center mounted)
    • Elevation Stage
      ES-82

      • Travel range 13 mm (1/2")
      • Uni-directional repeatability down to ± 0.05 µm
      • Maximum speed 0.1 mm/sec
      • Load capacity up to 2 kg
      • Integrated limit switches
      • Optionally: linear scale
    • Ultra Precision Elevation Stage UPL-120

      • Travel range 13 mm (1/2")
      • Uni-directional repeatability down to 0.05 µm
      • Maximum speed 6 mm/sec
      • Load capacity up to 15 kg
      • Integrated optical limit switches
      • Option: linear scale (center mounted)
    • Elevation Stage
      ES-100

      • Travel range up to 26 mm (1")
      • Uni-directional repeatability down to ± 0.05 µm
      • Maximum speed 20 mm/sec
      • Load capacity up to 5.5 kg
      • Integrated limit switches
      • Optionally: linear scale (center mounted)
      • Higher load on request
  • Linear Stages - Pusher

    • Micro Actuator MA-35

      • Travel range 52 mm (2")
      • Uni-directional repeatability down to ± 0.5 µm
      • Maximum speed 100 mm/sec
      • Force max. 200 N
      • Integrated limit switches
      • High resolution
    • Micro Pusher MP-20 B

      • Travel range up to 76 mm (3")
      • Uni directional repeatability down to 0.3 µm
      • Max. speed 10 mm/sec
      • Force 125 N
      • Integrated limit switches (hall)
    • Micro Pusher MP-20

      • Micro puscher with 2phase stepper- or dc motor
      • Travel range:
        13, 26, 52 or 76mm
      • Resolution 100nm and
        speed max. 15mm/s
      • Force: max. 120 N
      • Integrated limit switches
      • High resolution
      • Options: vacuum up to 10-9mbar and other materials
    • Micro Pusher MP-15

      • Travel range up to 12.7 mm
      • Uni-directional repeatability down to ± 2 µm
      • Maximum speed 0.16 mm/sec
      • Force max. 10 N
      • Integrated limit switches
      • a choice of different interfaces like M6
  • Linear Stages - Scan

    • Cross Stage CS-430

      • Travel range 350x300 mm
      • Uni-directional repeatability down to ± 0.1 µm
      • Maximum speed 100 mm/sec
      • Load capacity up to 30 kg
      • Integrated limit switches
      • Optionally: linear scale (center mounted)
    • Scan Table MS-8

      • Travel range
        205 mm (8") x 205 mm (8")
      • Uni-directional repeatability down to ± 0.25 µm
      • Maximum speed 60 mm/sec
      • Load capacity up to 4 kg
      • Integrated limit switches
      • Optionally: linear scale
      • Clear aperture 205 x 205 mm
    • Scan Table MS-4

      • Travel range
        102 mm (4") x 76 mm (3")
      • Uni-directional repeatability down to ± 0.25 µm
      • Maximum speed 90 mm/sec
      • Load capacity up to 3 kg
      • Integrated limit switches
      • Optionally: linear scale
      • Clear aperture 100 mm
    • Scan Table KT-120

      • Travel range
        26 mm (1") x 26 mm (1")
      • Uni-directional repeatability down to ± 2 µm
      • Maximum speed 3.5 mm/sec
      • Load capacity up to 5 kg
      • Integrated limit switches
      • Clear aperture 45 mm
    • Metrology Cross Stage MCS

      • Travel range 102 mm x 102 mm (4”)
      • navUni-directional repeatability down to 0.1 µm
      • navMaximum speed 200 mm/sec
      • navLoad capacity up to 20 kg
      • navIntegrated optical limit switches
      • navOption: Linear scale
  • Rotation Stages

    • Ultra Precision Rotation Stage UPR-270 AIR

      • Torque Motor
      • Uni-directional repeatability down to 0.00003 °
      • Maximum speed 360 °/sec
      • Load capacity up to 40 kg
      • Integrated reference switches
      • Integrated angular scale
      • High precision air bearings
      • Free center hole 35 mm diameter
      • Eccentricity ± 0.07 µm
      • Wobble ± 1.25 µrad
      • Option: Clean room
    • Ultra Precision Rotation Stage UPR-270

      • Torque Motor
      • Uni-directional repeatability down to 0.00007 °
      • Maximum speed 360 °/sec
      • Load capacity up to 40 kg
      • Integrated reference switches
      • Integrated angular scale
      • High-precision ball bearings
      • Free center hole 60 mm diameter
    • Ultra Precision Rotation Stage UPR-160 AIR

      • Torque Motor
      • Uni-directional repeatability down to 0.00005 °
      • Maximum speed 360 °/sec
      • Load capacity up to 20 kg
      • Integrated reference switches
      • Integrated angular scale
      • High precision air bearings
      • Free center hole 35 mm diameter
      • Flatness & eccentricity ± 0.1µm
      • Wobble ± 1.25 µrad
      • Option: Clean room
    • Ultra Precision Rotation Stage UPR-160

      • Torque Motor
      • Uni-directional repeatability down to 0.00008 °
      • Maximum speed 360 °/sec
      • Load capacity up to 20 kg
      • Integrated reference switches
      • Integrated angular scale
      • Free center hole 35 mm
      • High-precision ball bearings
    • Ultra Precision Rotation St. UPR-120 AIR

      • High-precision air bearings
      • Torque motor
      • Uni-directional repeatability down to 0.00005 °
      • Flatness & eccentricity ± 0.1μm
      • Wobble ± 1.25 μrad
      • Maximum speed 360 °/sec
      • Load capacity up to 20 kg (center mounted, on top)
      • Integrated optical reference switch
      • Free center hole 35 mm diameter
      • Integrated angular scale
    • Ultra Precision Rotation Stage UPR-120

      • High-precision bearings
      • Torque motor
      • Uni-directional repeatability down to 0.00008 °
      • Flatness & eccentricity ± 3 μm
      • Wobble ± 25 μrad
      • Maximum speed 360 °/sec
      • Load capacity up to 20 kg (center mounted, on top)
      • Integrated optical reference switch
      • Free center hole 35 mm diameter
      • Integrated angular scale
    • Ultra Precision Rotation Stage UPR-100

      • Torque Motor
      • Uni-directional repeatability down to 0.00008 °
      • Maximum speed 360 °/sec
      • Load capacity up to 2 kg
      • Integrated reference switches
      • Integrated angular scale
      • Free center hole 20 mm diameter
    • Precision Rotation Stage
      PRS-200

      • Uni-directional repeatability
      • down to ± 7.627E-5°
      • Maximum speed 150 °/sec
      • Load capacity up to 50 kg
      • Integrated reference switches
      • Optionally: angular scale
      • Clear aperture 120 mm
      • Preloaded worm drive for zero backlash
    • Precision Rotation Stage PRS-110

      • Uni-directional repeatability
      • down to ± 0.0002°
      • Maximum speed 200 °/sec
      • Load capacity up to 10 kg
      • Integrated reference switches
      • Optionally: angular scale
      • Clear aperture 35 mm
      • Preloaded worm drive for zero backlash
    • Rotation Stage DT-65 N

      • Uni-directional repeatability down to ± 0.002°
      • Maximum speed 60 °/sec
      • Load capacity up to 3 kg
      • Integrated reference switch
      • Clear aperture 25 mm
      • Preloaded worm drive for zero backlash
    • Rotation Stage RS-40

      • Uni-directional repeatability down to ± 0.005°
      • Maximum speed 7°/sec
      • Load capacity up to 2 kg
      • Integrated reference switch
      • Clear aperture 20 mm
      • Worm gear drive
      • Precise, smooth
      • continuous 360° motion
      • Rotation Stage DT-80

        • Uni-directional repeatability down to ± 0.01°
        • Maximum speed 45°/sec
        • Load capacity up to 2 kg
        • Integrated reference switch
        • Clear aperture 40 mm
        • Travel range 360°, endless
      • Rotation Stage DT-80 R

        • Uni-directional repeatability down to ± 0.01°
        • Maximum speed 1100 °/sec
        • Load capacity up to 2 kg
        • Integrated reference switches
        • Clear aperture 40 mm
        • Travel range 360°, endless
      • Rotation Stage DT-50

        • Uni-directional repeatability down to ± 0.015°
        • Maximum speed 4000 °/sec
        • Load capacity up to 1 kg
        • Integrated reference switch
        • Clear aperture 20 mm
        • Travel Range 360°, endless
      • Rotation Stage DT-34

        • Maximum speed 24 °/sec
        • load capacity up to 0.4 kg
        • Integrated reference switch
        • Clear aperture 12.7 mm
        • Rotation Range 360°, endless
        • With thread mount 1/2 inch UNC
        • Compact design
      • Goniometer WT-120

        • Uni-directional repeatability down to ± 0.0002174°
        • Maximum speed 60°/sec
        • Load capacity up to 20 kg
        • Integrated limit switches
        • Optionally: angular scale
        • Hardened worm gear drive
        • Precise, smooth continuous 90° motion
      • Goniometer WT-90

        • Uni-directional repeatability down to ± 0.0005°
        • Maximum speed 30 °/sec
        • Load capacity up to 8 kg
        • Integrated limit switches
        • Optionally: angular scale
        • Hardened worm gear drive
        • Precise, smooth continuous 90° motion
        • Together with WT-120 one centre of rotation
      • Goniometer WT-100

        • Uni-directional repeatability down to ± 8.72E-5°
        • Maximum speed 15 °/sec
        • Load capacity up to 2 kg
        • Integrated limit switches
        • Optionally: angular scale
        • Clear aperture 60 x 25 mm
        • Precise, smooth continuous 10° motion
      • Goniometer WT-85

        • Uni-directional repeatability down to ± 0.0001208°
        • Maximum speed 15 °/sec
        • Load capacity up to 2 kg
        • Integrated limit switches
        • Optionally: angular scale
        • Clear aperture 30 mm
        • Precise, smooth continuous 10° motion
        • Together with WT-100 one centre of rotation
      • Filter Wheel AFW-65

        • Maximum speed 360°/sec.
        • Integrated reference switches
        • up to 6 filters
        • Clear aperture 25 mm
    • Piezo Stages

      • Linear Piezo Stage LPS-65

        • Piezo driven inertia motor
        • Travel range up to 52 mm (2")
        • Uni-directional repeatability down to 0.025 µm
        • Maximum speed 10 mm/sec
        • Load capacity up to 1 kg
        • Encoder resolution 5 nm
        • Integrated linear scale
      • Linear Piezo Stage LPS-45

        • Piezo driven stepping motor with subnano..
        • Travel range up to 26 mm (1")
        • Uni-directional repeatability down to 0.050 µm
        • Maximum speed 10 mm/sec
        • Load capacity up to 1 kg
        • Encoder resolution 2 nm
        • Integrated linear scale
      • Linear Piezo Stage LPS-23

        • Piezo driven stepping motor with subnano...
        • Travel range up to 26 mm (1")
        • Uni-directional repeatability down to 0.020 µm
        • Maximum speed 10 mm/sec
        • Load capacity up to 0.2 kg
        • Encoder resolution 2 nm
        • Optional integrated linear scale
    • Manual Stages

      • Linear Stage APT-65

        • Travel range 25 mm
        • Load capacity 30 kg
        • Dove tail slide
        • Module combination
      • Linear Stage AVT-65

        • Travel range 5 mm
        • 30 mm clear aperture
        • Dove tail slide
        • Module combination
      • Cross Stage AKT-65

        • Travel Range 5 mm XY
        • Load capacity 4 kg
        • Dove tail slide
        • 30 mm clear aperture
        • Module combination
      • Linear Stage APT-38

        • Travel range 5 mm
        • Clear aperture 30 mm
        • Center load capacity 5 kg
        • Dove tail slide
        • Module combination
      • Cross Stage AKT-120

        • Travel Range 25 mm XY
        • Load capacity 4 kg
        • Cross-roller-bearings
        • 45 mm clear aperture
        • Micrometer screw
      • Elevation Stage AHT-65

        • Travel Range 25 mm
        • 25 mm clear aperture
        • Load capacity 3 kg
        • Linear ball-bearings
        • Module combination
      • Linear Stage AMT-120

        • Travel range up to 50 mm
        • Clear aperture 56 mm
        • Center load capacity 20 kg
        • Crossed-roller bearings
        • Special, tempered Aluminium
      • Linear Stage AMT-65 C

        • Travel range 25 mm
        • Load capacity 16 kg
        • Crossed-roller bearings
        • Module combination
      • Linear Stage AMT-65 S

        • Travel range 25 mm
          Load capacity 16 kg
        • Crossed-roller bearings
        • Module combination
      • Linear Stage AVT-54

        • Travel range 25 mm
        • Load capacity 1 kg
        • Ball guided system
        • Micrometer pitch, 0.5 mm
        • Module combination
      • Rotation Stage ADT-65

        • Clear aperture 25 mm
        • Preloaded worm drive for zero-backlash
        • High precision four point-bearings
        • Precise, smooth continuous 360° motion, endless
        • Load up to 3 kg
        • Module combination
      • Rotation Stage ADT-80

        • EcoLine in lightweight construction
        • Clear aperture 40 mm
        • Travel range 360°, endless
        • Double row ball bearings
        • Load up to 1 kg
        • Module combination
    • MAC PhotonX

      • Albatros®

      • Up to now the use of optomechanical construction systems for optics and laser technology is necessary in the labs of scientists and engineers for research and development.
        The Albatros® system with an optical height of 65 mm is designed to support and simplify the layout of optical systems and laser systems in scientific labs and industry. The precise and handy components of this system are established in many labs around the world since 1991. The easy use and the adaptability of the Albatros® components even to other systems explains the constant success in the market.
      • Moskito®

      • The industry is forced to shrinkt heir products to dimensions where conventional equipment reaches its limits. Consequently PI miCos decided to offer a miniaturized optomechanical system with all necessary components to support the scientists and engineers in their work. The optical height of 1" (25.4 mm) and useful high precision components make small system layouts in short time schedules and affordable prices possible.
      • Campus®

      • The use of lasers in a variety of research fields, industry, medicine and finally in many products of daily life demands a qualified education and training of students in laser technology from uni versitie s, technical high schools and vocational schools. These institutions are addressed by PI miCos, the series of educational laser kits from PI miCos developed to support and improve practical laser training. Within this product line 7 laser training systems of the topics optics fundament als, laser basics , laser metrology, fiber optics and telecommunications, laser material processing, and laser applications are presented. Besides these products PI miCos offers support for elaboration of suited curriculums for laser courses, design of the laboratories and advice in equipment selection with concepts for complete laser training facilities. Last but not least, training courses for all experimental systems are held at ’ place as well as at your site.